Basic Specifications; Table 1-3: Atx165Sl/Sle Series Specifications - Aerotech ATX165SL Hardware Manual

ATX165SL/SLE

1.3. Basic Specifications

Resolution is dependent on screw pitch, encoder resolution, and controller interpolation.
Table 1-3: ATX165SL/SLE Series Specifications
Travel
(1)
Accuracy
Resolution
(Minimum
Incremental
(8)
Motion)
Bidirectional
(1)
Repeatability
Horizontal Straightness
Vertical Straightness
Pitch
Yaw
Ball Screw Lead
(5)
Maximum Speed
Load Capacity
Moving Mass
Stage Mass
Material
1. Certified with each stage.
2. Available with Aerotech controllers.
3. Achieved with Aerotech rotary motor with amplified sine encoder. The specification is unidirectional.
4. Achieved with Aerotech rotary motor with 10,000 lines/rev digital encoder.The specification is unidirectional.
5. Requires the selection of an applicable amplifier with sufficient voltage and current.
6. Requires a motor with a 1 Vpp amplified sine encoder (-M3, -M4, -M7, and -M8 Motor Options) and linear amplifier.
7. Specifications listed are non-foldback kit options. Contact the factory for specifications when a foldback kit (-FBx) is used.
18
Uncalibrated
SL
(2)
Calibrated
Uncalibrated
SLE
(2)
Calibrated
SL
(6)
-E1
SLE
-E2
-E3
SL
SLE
(1)
(1)
DC Motor
(-M1, -M2, -M5, -M6)
DC Motor
(-M3, -M4, -M7, -M8)
Stepper Motor (-M9)
Horizontal
Side
Vertical (Axial)
-150 -200
150 mm 200 mm
±8 µm ±8 µm
±1 µm ±1 µm
±4 µm ±5 µm
±0.4 µm ±0.5 µm
0.05 µm
0.1 µm
0.025 µm
0.1 µm
0.2 µm
±0.5 µm
±0.15 µm ±0.2 µm
±1.75 µm ±2.0 µm
±1.75 µm ±2.0 µm
80 µrad 85 µrad
(16 arc­ · sec) (17 arc·sec)
80 µrad 85 µrad
(16 arc­ · sec) (17 arc·sec)
2 mm/rev
100 mm/s
130 mm/s
25 mm/s
40 kg
25 kg
20 kg
3.4 kg 3.8 kg
12.3 kg 13.7 kg
Anodized Aluminum
Hardware Manual
-250
250 mm
±9 µm
±1 µm
±6 µm
±0.5 µm
(3)
(4)
±0.25 µm
±2.25 µm
±2.25 µm
90 µrad
(18 arc·sec)
90 µrad
(18 arc·sec)
4.1 kg
15.0 kg
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