HP 5528A User Manual page 349

Laser measurement system
Table of Contents

Advertisement

Model
5528A
Measurements
Using
a Plane
Mirror Interferometer
D-2
Velocity of Light (VOL)
Compensation
Method
,
Manual
Operating
(VOL Exactly
Automatic'
Temperature
Known in
(Using
10151A/B
Range 2
Beam Path)
Air Sensor)
19.5·20.5°C
±
0.1 ppm
±
1.5
ppm
lS-25
Q
C
±
0.1 ppm
±
1.7ppm
0-4O"C
±
O .l ppm
±
3.0
ppm
If
automatic
material
temperature
sensing 15 used, tile
system
error will
be
Increased
by
T
e
(ppm).
Te (ppm)
coefficient of expansion In ppm!C
x
average senior
error
In
°e.
(See
10752A/B
Maximum SeMor Error Spt!cificatlon.)
Temperature
of
~II
system components
are stabilized anywhere within
the
temperature
range
shown.)
,
1 0751A/B
moon
ted
in recommended
orienMtion.
12
month
catlbl~tion
interval used Humidity swit ch
sci
to
position
closest to
actu~1
humidity.
If humidity
swi tch setta
50%,
tolerances
u
e
1.75
ppm at
20
0
e,
2.00
ppm
at
15·25°e,
and
3.70
ppm
at
0·40"C.
If
10751A/B
moonted
Incorrectly,
~dd
2
ppm.
Resolution:
Metric Units Mode: 0.01 micron
(O.OOOOlmm)
English
Units
Mode:
1 microinch
Maximum Velocity:
±
9000mm/ minute (360 inches/minute)
Measurement Range:
Maximum
(with
proper alignment, 15-25°C.)
20 metres
(65
feel)
Velocity
Accuracy:
±
0.1% of
displayed
va lue
Resolution:
±
O.1
mm/minute
± O.O
l in./minute
Maximum
Velocity:
same
as distance
measurement
Measurement
Range:
Silme ilS distilnce
meilsurement
HARDWARE REQUIRED
In
addition
to
the
hardware required for
any
measurement
using the laser Measurement
Sys-
tem
(see
Figure
1),
distance
or velocity
measurements
with
plilne mirror interferometers
re-
quire
the hardware
shown In Figure 0 -1. Use of
iln ildjustilble mount, HP
10711
A, is
recommended for
ease of illignment.
It
is
recommended thilt the plilne mirror used have
the
following
specificiltions:
SEAlES 2732A

Advertisement

Table of Contents
loading

Table of Contents