HP 5528A User Manual page 183

Model 5528A
Straightness Measurements
11 -2
OPERATING SPECIFICATIONS
Th e fo llowin g specifications assu me that the o ptional Dimensional M etrology Analysis System is
used in conj un ction with the HP 5528A
to
provid e averaging and calculation capabilit ies for
Straightne ss. Parall elism and Square ness mea surements and thaI the Optica l S quare is aligned
with in 5 arc-min using autorefl ecti on techniqu es.
Accuracy: Overall accuracy is th e sum of the two componen ts below.
1
Overall Accuracy == Opt ical Reference Accuracy
+
Measurement Accu racy
Oplical Reference Accuracy :2
Short Range Optics :
Melrie Units Mode : 0.15 M 2 mi crons TIR
English Unils Mode : 0.5 F2 microin ches TIR
Long Range Optics :
Metric Units Mode : 0.015 M 2 mi crons TlR
English Unils Mode : 0.05 F2 microinches TIR
where :
TIR "" Total Indica ted Read ing
M == distance of tra ve l of th e movi ng optic in metres
F
==
di stance o f trave l o f the moving optic in feet
Measurement Accuracy:
Short Range Optics :
Temperature
Displayed Value
Range
0-' 0
mi crons
, 0-' 500
mi crons
10-400
micrOinches) 1400-60000 mi croinches )
15-25° C
±3.S% ± 1% ±0.25 mi crons
no
microi nches )
0-40°C
± 6% ± 1% ±0.5 mi crons
(20 mi croi nches )
Long Range Optics:
Temperature
Displayed Value
Rang e
0- ' 00 microns
100-1500
microns
(0-4000 mi croi nches \ 14000-60000 mi croinches l
15-25° C :tS% ± 2.5% -:t 2.5
microns
(100 mi croi nches)
0-40° C
± 7.5% ± 2.5% ± 5 m ic rons
(200
mi croinches)
I
I hi s
i ~ ~rmIOIlOU ~
1 0
the
tradl!lon~1 ~ tfal ll htedlic
and indicat o r mcth od
01
tnca ~ urinll ~ traillhtnc n .
where
Optl c~1
Referen ce Accuracy
corre ~pol1d ~
to the
slrd t ~htedllc
aCl ura cy. and Mea lurement Accu rd l Y
cOfrc ~pond ~
10 the
Ind l c~ t O I
acc ul OlCy.
20p ticalH·lcrencc Clr Qr
c ~n
be climirlJled by usll1!,: wai!:hlcd!,:c Iml rlOfi rCVCnallc chniqucs.