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Making A
Measure me
nt
System Ch
eclf:s
Model
5526A
Parallelism Measurements
Use the Instru ctions for "SYSTEM
CHECK"
given
In
Section 10
or Section
11
of
this
User's
Guide.
Procedu
re
If
you use the
riP Dimensiona
l
Metrology
Analysis
System,
refer to its Operating Manual
to
record and store th
e
data for
this
seco
nd
axis.
If
you don't
use
the
HP
Dimensional
Metrology
Ana
lysis Sys
tem, fo llow th
e
instru
ctions
given
in
Section
10
or Section
11 of this
User's Guide,
then refer
to Section 21 and
calculatc the slope
of
this second
-axis
measurement.
Calculating linear Parallelism
Once
you
ha
ve the
slope for
each
measu
rement
ax is
(from Section 21 ), translate
the slope values
in
to
a Para
llelism
value.
What
you mu st
do is
-
1.
For
each
axis,
determine the angle
of
mi salignment
(6).
This is done
by
taking the arctange
nt
of
the slope (m
)
of each
Straight
ness
mcasuremenl and
multiplying by
" 3600",
to
co
nvert
to
" arcseco nds".
/1
::=
(arctangent
(m)1 x
3600
(arcseconds)
Be sure your
slope
value
is dimensio nless,
i.e., metre/
metre
or
inch
/ inch.
2.
Add
the
angles together.
linear Parallelism
=
8,
+
82
In
order
to do thi
s,
both
the
first
-
and
seco
nd-axi
s
measurements must have
deflections of
the
Interferometer
produce the same sign
co
nvention when in the
sa
me di rection
.
Figure
14·1
shows
that
the
"z"
and
"w"
axes
arc not parallel
by
the
amount
0,
+
02.
Figure
14-1 shows
that
the
"z"
and
"w" axes
are parallel
if
the magnitude of 0, equals
the
magnilUde
o
f
02.
When
you
add
6,
+
82,
you
are actually adding
8,
+
(-
02
)
=
01
+
(-
0,
) =
0.
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