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Model
5528A
Flatness Measurements
9-2
Reference Plane Accuracy
:
The
uncenainty of
a
surface
plate
flatness
measurement
is
bounded by
two paraliel
planes spearated
by
the
va
lue
below.
Melric
Unils
Mode
:
0.03
M2
microns
English
Units
Mode
:
0.12
F2
microinches
where
:
M
=
length of
the
surface
diagonal in
metres
F
-
length of Ihe
surface diagonal in
feet
h.teril OUset
and
Flatness
Ri nge: The
combination of
lateral
offset
and
maKimum
flatnes
s
deviation must not displace the Reflector more than ±1.0 mm (0.04 inch
)
from the
beam path in any direction
.
Adal Separation
:
Same
as for an Angular measurement
;
see
Section 8.
HARDWARE REQUIRED
In
addition to the
hardware required for
any
measurement using the laser Measurement System
(see
Figure
4-1),
any
Flatness
measurement requires the hardware
shown
in
Figure
9-1,
plus
-
•
an
HP Dimensional Metrology Analysis
System (which
includes an HP Personal
Computer
and
programs),
and -
•
a Straigh tedge
that is
at least
as
long
as
the
diagonal of the surface
plate
you're
measuring.
and
thick
enough
to contact
the
sides of the
Footspacers (and not
their
small
ground
pods).
REFERENCE MATERIAL
Physical
Setup of
the laser
Head and
Tripod
.................
....
......
Section
4
Interconnections.
Turn-on ..........................
,..
..
.
.
...........
Section
5
Angular Measurements
Section 6
Alignment
Techniques
Sectio
n
15
INSTALLATION AND ALIGNMENT OF OPTICS
Important Considerations
1.
The Angular
Interferometer
must
be located
between the laser Head
and the Angu
lar
Reflector in the laser beam.
2.
The
beam
'rom the
laser
Head mu st
enter the Angular Interferometer
through the
single
opening on
o
ne
side.
The
side of the Angu
lar Int
erferometer with two openings should
always
be facing the
Angular
Reflector.
3. The
laser
beam
must be returned to the bottom port
on
the laser Head's turret.
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