HP 5528A User Manual page 154

MAKING A MEASUREMENT
System Checks
1. Milke sure bot h laser Head porls <lfe switched 10 their large apertu re$.
2. The laser Head turret must be set 10 " Olher",
3. The laser Head's READY indicator must be lishl ed steadily (i.e., not blinking ).
4. Make sure your Laser Measurement System is properly connected to the HP Dimensional
Metrology Analysis System.
Make sure the Measurement Display 15 set-up to accept a controller via HP-18. Follow the
Instructions for "Data Transfer with an HP-IB Controller", in Section 18 of this User's Guide.
Procedure
Non
The HP Dimensional Melrology Analysis System expects the
inspection lines
10
be patterned exact ly like Ihose in Figure 9-4,
However, you can insped Ihe lines in either direction, and in any
order, See Figure 9-7 for a SutUj:cs led rouline of line directions
and numbers,
1.
For cach linc -
a, Tell the Melrology program Ihe direction you arc traveling , relative to the direction
arrows in figure 9-4, and whether you are moving toward or away from Ihe
Inlerleromel er,
b.
PasHion Ihe Footspacer fl ush wilh Ihe Inl erferomeler's Flalness Mirror,
c, Press RESET on the Measurement Display unit or on Ihe Remote Co ntrol unit.
d, Move t he Footspacer a distance equa l to its footspacing./These increments should be
marked on the St rai ghtedge.)
e, Press the Remote Conlrol Unit's RECORD bUll on, One measurement is made each time
you press this bullon.
f, Continue moving Ihe Foolspacer in increments equa l to its footspacing . pressing Ihe
RECORD bUllon afler each move,
2. Reposition the Optics for the nexi lin e to be measured. Realign the laser beam to Ihe new
palh , Repeat Ihe measuremenl process,
Refer to figure 9-7 to sec where you can position the Optics to measure each line of your
grid.
Keep in mind Ihal Figure 9-7 is not Ihe only way to make Ihese measuremenls. You can set up
In any arrangemenl th ai is easiest for your parlicutar application.
STEP 1.
LINE DIRECTION
AND NUMBER: + 1
<ff
FLA THEIS
II
MIRRORS
,
STEP 2.
LINE DIRECTION
AND NUMBER: - 3
STEP 3.
LINE DIRECTION
AND NUMBER: - 7
•
DIAGONAL LINE I.E
FOOT'PACER WITH
ANGULAR REFLECTOR
MOVEMENT OF
REFLECTOR
ANGULAR
INTERFEROMETER
PERIMETER LINE CA
CENTER LINE DH
STEP 4.
LINE DIRECTION
AND NUMBER: - 5
STEP 5.
LINE DIRECTION
AND NUMBER:
-e
STEP
I.
LINE DIRECTION
AND NUMBER: -I
•
PERIMETER LINE EG
PERIMETER LINE loG
CENTER LINE BF
STEP 7.
LINE DIRECTION
AND NUMBER: -4
STEP I .
LINE DIRECTION
AND NUMBER: +2
•
ModelSS28A
FIOiIIlness MeasuremenlS
PERIMETER LINE CE
DIAGONAL LINE CG
fiRure 9-7. Suggested
Routine For
Posilioning
Optics
9-11