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Model 5528A
Straightness Measurements (Along A
Hori
zon
tal
Axis)
'0-2
M eisurement
Accuracy:
Short
Range Optics
:
Temperature
Displayed
Value
Range
0-10
microns
10-1500
microns
(0-400
microinches
l
(400-60000
microinchesl
'S-2S'
C
±3.S%
1:'1%
+0.25
microns
(10
microinches
)
0-40°
C
±
6%
±
1%
±
O.S
microns
(
20
mlcrolnches
)
Long
Range
Optics:
Temperature
Displayed
Value
Range
0-'00
microns
100-1500
microns
(0-4000
m lcrOi nches
)
14000-60000
microi
nches)
15-25°
C
±
S%
±
2.S%
±
2.5
microns
(100
microinches
)
0-40°
C
±
7.5%
±
2.S%
±5
microns
(200
mlcrolnches
)
'This
Is
an~lol!ous
to thc traditional
str~ightcd
gc
and
indi
cator
method
of measuring
malghtnl!!is.
where
Optical
Reference
Accunley
C OrrC)I>Ol1ds
to
the
~traighted8e
a«wary.
and Mcasw emen,
Accur~
cy
corrc~pond)
to
the
Indlattor
ilccuracy.
20p,lcal
refcrence
error
C~n
be eliminated
by
using
~tr.lllhtc-dgc
Imillon
reversal
techniques.
RESOLUTION:
Short-Range
:
Metric
Units
Mode:
0.01
micron
(O'(X)OOl
mm
)
Englis
h
Un its
Mode:
1 rnicroin
ch
Lo
ng-Range:
Metric
Uni ts Mode: 0.
1
micron
(0.0001
mm
)
English Units
Mode:
10
microinches
STRAIGHTNESS DEVIATION RANCE
:
±1.5
mm
(0.060
inch
)
AXIAL SEPARATION RANGE
(Typical,
with
proper
alignment.
15-25°C):
Distance of
travel
between
the
Interferometer
and
Reflector.
Interferometer
located
within 5
metres
(16.5
(eet
)
of laser
Head.
Shorl-
ROtnge:
0.1
-
3 metres
(4-
120
inches
)
Long-ROtnge Oplics
:
1-
30 metres
(3-
100
feet
)
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