Edwards STP-iXA3306BV Manuals

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Edwards STP-iXA3306BV Manual (181 pages)

STP-iXA3306 Series STP Series Turbomolecular Pumps

Brand: Edwards | Category: Water Pump | Size: 6 MB

Declaration of Conformity
2
Table of Contents
3
Introduction
13
Scope and Definitions
13
Applied Standards
14
Limited Warranty
15
- Warranty Period
  15
- Item Warranted
  15
- Disclaimer
  15
- Spare Parts
  16
Precautions for Safe Operation of the STP Pump
17
- Usable Gases
  17
STP Pump Installation Warning Label
18
Hot Surface Warning Label
18
Maintenance and Inspection Precautions
18
Labels
18
Heavy Product Caution Label
19
High Voltage Device Caution Label
19
Rotation Instruction Label
19
Cross Sectional View of the STP Pump
20
Operation Principle of the STP Pump
20
STP Pump Specification
22
Technical Data
25
STP Pump Specifications
25
Maximum Gas Flow-Rate (STP-Ixa3306C)
26
Maximum Gas Flow-Rate (STP-Ixa3306Cv)
26
- STP-Ixa3306B/Bv
  27
Maximum Gas Flow-Rate
26
- STP-Ixa3306C/CV
  26
Maximum Gas Flow-Rate (STP-Ixa3306B)
27
Maximum Gas Flow-Rate (STP-Ixa3306Bv)
27
Water Cooling Use Condition
28
Control Unit
29
External Appearance of STP-Ixa3306C(V)/Ixa3306B(V)
31
External Appearance of the STP Pump
31
Label Affixing Positions
32
Installation of the Stp Pump
33
Precautions before Installation
33
- Operating Environment
  33
Environmental Requirements for Installation
34
- Installation Area
  35
Space Around the STP Pump
35
- Bench
  36
- Insulation Test
  36
Eyebolt Size
37
Example of Lifting the STP Pump
37
Unpacking
37
- Unpacking the STP Pump
  37
Example of Lifting the STP Pump (Horizontal Positioning)
38
Jack-Up the STP Pump
39
Control Unit Bottom Face
39
Prohibited Matter
40
STP Pump with Eyebolts
40
Pump Functions
41
- Name and Function of the Control Unit
  42
Configuration of the STP Pump
41
Name and Function of each Part
41
- Name and Function of the Pump
  41
Control Unit (Front Panel)
42
Control Unit Front Panel Functions
43
Control Unit Front Panel Functions (Continued)
44
Installation of the STP Pump to the Vacuum Equipment
45
- Cleaning the Seal
  46
- STP Pump Installation Positions
  47
How to Install the STP Pump
45
Positions of the Outlet Port on the Horizontally or Slanted Installed STP Pump
47
- Secure the STP Pump
  48
Tightening Torque of Bolt
48
Maximum Torque Predicted and Recommended Securing Bolt for Inlet Port Flange
49
Shape of Reduced Diameter Shank Bolts
51
Methods of Securing the STP Pump
51
- Legs for Securing the Base
  52
Screw Holes for Securing the Base
52
- Power Cable
  53
Connecting Method of the Power Cable
54
- How to Connect the Power Cable
  55
Precautions of Vacuum Piping
57
- Vacuum Piping Method
  57
Connecting the Purge Port
58
Connecting the Water Cooling Pipe
59
Positions of the Cooling Water Port
59
Attaching a Baking Heater
60
Baking Heater Installation Position
60
Installation of the TMS Unit
61
- TMS Unit Specification
  61
- Configuration of the STP Pump with the TMS
  62
Configuration of the TMS
62
- TMS Heater
  63
- Connecting the TMS Heater Cable
  63
- TMS Valve
  63
- Connecting the Pump and TMS Valve
  64
TMS Valve Connection
64
Connecting to Semiconductor Equipment
65
- 3.10.1 Connecting to Power
  65
- Emergency off Circuit (EMO Circuit)
  65
Operation
67
Gas Pumping, Cooling and Baking the STP Pump
67
- Gas Pumping
  67
- How to Introduce a Purge Gas
  68
Cooling the STP Pump
68
- Water-Cooling Method
  68
Baking the STP Pump
69
Before Starting the STP Pump
70
- Confirmation before Starting
  70
- Confirmation of Vacuum System
  70
Powering on
71
Pump Operation
71
- Input Operation Port Setting
  71
- Starting/Stopping the STP Pump
  72
Starting/Stopping the STP Pump Using Contact Input (X2 REMOTE)
72
Pump Operation Method 1 (Contact Input)
72
Pump Operation Method 2 (Contact Input)
72
Starting/Stopping the STP Pump Using Voltage Input (X2 REMOTE) (Voltage Input)
73
Pump Operation Method 1 (Voltage Input)
73
Pump Operation Method 2 (Voltage Input)
73
Reset Operation (X2 REMOTE)
74
How to Start/Stop the STP Pump
74
LED Indications for each State
75
Led
75
35 "ROTATION" LED Indication
75
Parallel Port Input/Output Signal
76
- Input Signal Pins
  76
X2 REMOTE Connector
76
X2 REMOTE Input Signal Pins
77
X2 REMOTE Input Signal Pins (Continued)
78
X2 REMOTE Input Signal Pins (Contact Input)
79
X2 REMOTE Input Signal Pins (Voltage Input)
80
X2 REMOTE Input Signal Pins (Voltage Input) (Continued)
81
X2 REMOTE Input Signal Pins (Voltage Input)
82
- Input Operation Port Setting
  83
- Rotation INHIBIT Signal
  84
Rotation INHIBIT Signal Input
84
- Second Speed Option
  85
Second Speed Function
85
- Output Signal Pins
  86
X2 REMOTE Output Signal Pins
87
X2 REMOTE Output Signal Pins (Continued)
88
X2 REMOTE Output Signal Pins
88
Operating the TMS Unit (for Use with the TMS Unit)
90
Serial Communication Protocol
91
Introduction
91
Serial Port
91
Connection and Setting up
92
- Signal Connection
  92
X3/X4 Pin Position
92
X3/X4 Connector (D-Sub9)
93
- Connecting the RS485
  94
RS485 Connections
94
- Communication Parameter Setting
  95
Communication Parameters
95
- Input Operation Port Setting
  96
Input Operation Port
96
- Serial Communication Timeout Setting
  97
Serial Communication Time out Setting
97
- Recommended Items about Communication Cable Installation
  98
Grounding Example (both Ends Grounding)
98
Grounding Example (Single Point Grounding)
98
Example of Ring Ferrite Core Installation
99
Example of Cable Installation in Metallic Duct
99
Example of Differential Signal Waveform
100
Protocol Specifications
101
- General Description
  101
PC to SIM Communication
101
- Standard Transmission Frame
  102
Transmission Control Characters
102
Pump Operation Commands
110
- 5.3.12 Application Note
  111
Block Diagram of Communication Process Example
111
Example of Answer Resending Process
112
Example of Response When the Command Is Sent Continuously
112
Example of Command Sending During Answer Data Reply
112
Example of Communication Cycle Process
113
Example of Command Sending Process
114
Example of Answer Receiving Process
114
Command Specifications
115
- Command List
  115
- Readmeas
  116
- Command
  116
- Readfailmess
  117
Pump Operation Commands
117
Error Message Values
119
Error Message Values (Continued)
120
- Readmodfonct
  121
Pump Operation Mode
122
- Readversion
  123
- Readcounters
  124
- Readsetpoint
  125
- Readmotortemp
  125
- 5.4.10 Readstatus
  126
- 5.4.11 Readevents
  127
Remote Mode
127
- 5.4.12 Setspeedsetpoint
  128
- 5.4.13 Readspeedsetpoint
  129
- 5.4.14 Readmodfonctwithwarning
  130
Warning Value Bit Assign
131
- 5.4.15 Readmeasvalue
  133
- 5.4.16 Readoptionfunc
  135
Parameter Setting Value
136
- 5.4.17 Setoptionfunc
  138
- 5.4.18 Readcondition
  140
- 5.4.19 Readeventswithtime
  142
- 5.4.20 Setoptions
  146
Option Function Number and Parameter List
146
Second Speed Option Setting
146
5.4.20.2 Second Speed Selection
147
- 5.4.21 Readoptions
  148
5.4.21.1 Second Speed Function Setting
148
Option Function Number and Parameter List
148
Second Speed Select
149
Stp-Link and Display Unit
151
STP-Link
151
Functions of STP-Link
151
Display Unit
152
Display Unit Idt-001
152
Safety Functions
153
- Power Failure
  153
- Operation after a Power Recovery
  154
States of Leds and X2 REMOTE Output Signals at Power Failure
154
WARNING" Function
157
WARNING Function
157
WARNING Output
158
Contents of WARNING Function
159
- First Damage Limit
  159
- Second Damage Limit
  159
- Pump Run Time over
  159
- Pump Overload
  160
- Imbalance
  160
Default Setting of WARNING Function
161
Factory Setting and Variable Range
161
WARNING Function Setting
161
Error List
162
Troubleshooting Immediately after Failure Occurs
162
- After Power Failure
  162
- After Other Abnormality/Error
  162
Priority of Failure Signal
163
Failure Output
163
Troubleshooting
163
- Indication of "FAILURE" LED (Red)
  163
Error List (Continued)
165
Error List (Continued)
166
Error List (Continued)
167
Error List (Continued)
168
Error List (Continued)
169
- Indication of "FAILURE" LED (Green)
  170
- No Indication of the "FAILURE" LED
  170
Troubleshooting with no Indication of the "FAILURE" LED
170
Maintenance and Inspection
171
Cleaning
172
Inspecting the Deposit
172
Maintenance
173
Transporting for Repair or Overhaul
175
Storage and Disposal
177
Storage of the STP Pump
177
Disposal
178
Service, Spares and Accessories
179
Introduction
179
Service
179
Spares
179
Accessories
180

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