2 x HCSMU configuration
6
Agilent N1259A opt 033
1
1 k
Force
Sense
Low
High
Module Selector Output
Figure 3-4. Common connection for Ic-Vce, hFE_Vbe-Ic and Vce(sat)-Ic 2 for 2xHCSMU configuration.
42
HCSMU1
Force
Sense
Force
High
2
3
Guard
4
Low
5
HCSMU2
Sense
Force
Force
High
7
Guard
Low
2
Agilent N1259A opt 010
8
9
Force
Guard
1
Sense
Force
Sense
Guard
HPSMU1
HVSMU1
Sense
Force
Guard
GNDU1 1 1 1
HPSMU2
Force
Sense
Sense
Force
Sense
Force
Sense
1
10
1 2 3
AUX1
Signal
AUX2
Signal
Agilent N1259A opt 022
2
1
100 k
2
DC Bias Input
Force
Guard
11
High
3
Low
MF CMU
High Voltage Bias-Tee