(A) HPSMU Output and Measurement range
Current
-200V
-100V
-1A
(B) HCSMU Output and Measurement range
Current
20A
10A
1A
-40V
-20V
-1A
-10A
-20A
Figures 1-1. Output and measurement range.
8
Output and measurement range of each module are visually shown in figure 1-1.
1A
500mA
125mA
Voltage
200V
100V
40V
20V
Pulse
DC
Voltage
20V
40V
(C ) HVSMU Output and Measurement range
Current
8mA
4mA
-3000V
-1500V
3000V
1500V
- 4mA
1500V Range
- 8mA
3000V Range
Voltage
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