Section 5. Using Substrate Bias; Program 12 . Substrate Current Vs . Gate-Source; Sb Gs - Keithley Series 2600 Application Manual

System sourcemeter instruments semiconductor device test
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Section 5. Using Substrate Bias

Program 12. Substrate Current vs. Gate-Source Voltage (FeT I
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FET_Isb_Vgs():
This program applies a voltage bias on the drain-source (VDS), a voltage bias on the
substrate-source (VSB) of an FET, then sweeps the gate-source voltage (VGS) from a user-
defined stop, through a defined number of steps.
At each point, the VGS, ID, and ISB are measured and the data is printed.
Required equipment:
(1) Dual-channel Keithley Series 2600 System SourceMeter instrument
(1) Keithley Model 2636 System Sourcemeter instrument (Required for low current
measurement)
(1) Crossover Ethernet Cable
(1) SD210 N-channel FET
- Connect the single-channel SourceMeter instrument to the dual-channel master using a
crossover Ethernet cable.
- Connect the test fixture to both units using appropriate cables.
- Turn on the SourceMeter instruments and allow the units to warm up for two hours for
rated accuracy.
Configure the TSP-Link communications for each instrument:
Slave: A single-channel instrument such as the Model 2601, 2611, or 2635.
1. Press the MENU key to access MAIN MENU.
2. Select the COMMUNICATION menu. (Skip this step if the Series 2600 instruments
used have firmware Revision 1.4.0 or later installed.)
3. Select the TSPLINK_CFG menu. (If the Series 2600 instruments used have firmware
Revision 1.4.0 or later installed, the menu name should be TSPLINK.)
4. Select the NODE menu.
5. Set the NODE number to 2 and press ENTER.
Master: A dual-channel instrument such as the Model 2602, 2612, or 2636.
1. Press the MENU key to access MAIN MENU.
2. Select the COMMUNICATION menu. (Skip this step if the Series 2600 instruments
used have firmware Revision 1.4.0 or later installed.)
3. Select the TSPLINK_CFG menu. (If the Series 2600 instruments used have firmware
Revision 1.4.0 or later installed, the menu name should be TSPLINK.)
4. Select the NODE menu.
5. Set the NODE number to 1 for the Master and press ENTER.
6. Select the TSPLINK_CFG menu. (If the Series 2600 instruments used have firmware
Revision 1.4.0 or later installed, the menu name should be TSPLINK.)
7. Select the RESET to initialize the TSP-Link.
A-60
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