Keithley Series 2600 Application Manual page 122

--Configure Substrate (node [2] SMUA) source and measure settings
node[2].smua.source.func = node[2].smua.OUTPUT_DCVOLTS
node[2].smua.source.autorangev = node[2].smua.AUTORANGE_ON --Enable source
autorange
node[2].smua.source.levelv = 0
node[2].smua.source.limiti = l_icmpl
node[2].smua.measure.autorangei = node[2].smua.AUTORANGE_ON --Enable measure
autorange
node[2].smua.measure.autozero = node[2].smua.AUTOZERO_AUTO
node[2].smua.measure.nplc = l_nplc --Measurement integration rate
node[2].smua.source.output = node[2].smua.OUTPUT_ON --Enable Output
--Enable Substrate Bias (node [2] SMUA)
node[2].smua.source.levelv = l_vsbsource
--Execute sweep
for l_vgs_iteration = 1, l_vgssteps
node[1].smub.source.levelv = l_vgssource_val
l_vds_data[l_vgs_iteration] = {} --Create new row in table
l_id_data[l_vgs_iteration] = {} --Create new row in table
l_vgs_data[l_vgs_iteration] = node[1].smub.measure.v() --Measure gate-source
voltage
for l_vds_iteration = 1,l_vdssteps do
measure.v()
--Measure sourced voltage
--Measure current
value
after last
if (l_vds_iteration == 1) then --Intialize start source value
l_vdssource_val = l_vdsstart
end --if
--delay(1)
l_vds_data[l_vgs_iteration][l_vds_iteration] = node[1].smua.
l_id_data[l_vgs_iteration][l_vds_iteration] = node[1].smua.measure.i()
l_vdssource_val = l_vdssource_val + l_vdsstep --Calculate new source
if (l_vds_iteration == l_vdssteps) then --Reinitialize voltage value
--iteration
l_vdssource_val = l_vdsstart
end --if
do
APPenDIx A
Scripts
A-69