Typical Program 12 Results; Program 12 Description; Figure 5-4. Program 12 Typical Results: I - Keithley Series 2600 Application Manual

System sourcemeter instruments semiconductor device test
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SeCTIon 5
Using Substrate Bias
represents the start value for the gate-source
vgsstart
voltage sweep
represents the stop value for the gate-source
vgsstop
voltage sweep
represents the number of steps in the sweep
vgssteps
If these values are left blank, the function will use the default
values given to the variables, but you can specify each vari-
able value by simply sending a number that is in range in the
function call . As an example, if you wanted the drain-source
voltage (V
) to be 2V, substrate-source (V
DS
gate-source (V
) voltage sweep start value at 1V, the gate-
GS
source sweep stop value at 12V, and the number of steps to
be 15, you would send FET _ Isb _ Vgs(2, -2, 1, 12,
15) to the instrument .
11 .
The sources will be enabled, and the gate-source voltage
sweep will be executed .
12 .
Once the sweep has been completed, the data (I
will be presented in the Instrument Console window of TSB .

5.3.3 Typical Program 12 Results

Figure 5-4 shows a typical plot generated by example Program 12
using an SD210 MOSFET .

5.3.4 Program 12 Description

After the SMUs are returned to default conditions, Node 1 SMUB,
which sweeps V
, is configured as follows:
GS
Source V
1µA compliance, autorange

Figure 5-4. Program 12 typical results: I

5-4
) to be –2V, the
SB
, V
, and I
D
GS
0.00E+00
–5.00E–13
–1.00E–12
–1.50E–12
–2.00E–12
–2.50E–12
–3.00E–12
–3.50E–12
0
2
vs. V
SB
GS
Local sense
: 0V
vgsstart
: 10V
vgsstop
: 10
vgssteps
Next, Node 1 SMUA, which sources V
following manner:
Source V
Local sensing
100mA compliance, autorange
: 1V
vdssource
Finally, Node 2 SMUA, which sources V
grammed as follows:
)
Source V
SB
Local sensing
1 compliance, autorange measure
1 NPLC Line cycle integration
After both instruments are set up, the outputs are zeroed and
enabled . The bias values V
sweep begins . At each point in the sweep, the drain current (I
and substrate leakage (I
After the sweep is complete, the data (I
the Instrument Console of TSB .
I
vs. V
SB
GS
4
6
8
V
(Volts)
GS
, is set up to operate in the
DS
and measures I
SB
and V
are applied, then the V
SB
DS
) are measured .
SB
, V
, and I
D
GS
Series 1
10
12
, is pro-
SB
GS
)
D
) is printed to
SB

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