MICRO-EPSILON interferoMETER IMS5200 Quick Manual page 5

Operating Modes
Ambient pressure Atmospheric pressure
EMC According to EN 61000-6-3 / EN 61326-1
(Class B) and EN 61 000-6-2 / EN 61326-1
Glossary
Thickness sensor
You can find further information about the sensors in the
operating instructions, chapter Technical Data.
IMS5200-TH / IMS5200MP-TH
Target
Operating range
Working distance
Operating Modes
The interferoMETER measuring system measures thick-
nesses with high precision on transparent and multi-lay-
er materials, e.g., glass or coatings, at a wavelength of
570 nm.
Glass
Gap measurement be-
tween two glass plates
Measuring ranges for thickness measurements
The possible resolution here is in the nanometer range.
To get started quickly, it is recommended to use saved
configurations (presets) for various targets and applica-
tions, see Chap. Presets, Measurement Configuration.
1 ... 100 µm
1.5 ... 150 µm
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