Technical Data; General; M-Model And P-Model Pumps - Edwards Diffstak 63/150 Instruction Manual

Mk2 diffusion pumps
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2

Technical data

2.1

General

2.1.1

M-model and P-model pumps

Pumping speed
nitrogen
hydrogen
Minimum backing pump displacement for
maximum throughput
Recommended backing pump
Maximum pump pressure
Recommended pump fluid
Fluid charge (dry)
Inlet connection, compatible with
Backing connection
Cooling water connection
Minimum cooling-water flow at 20
Heater power
Pneumatic connections
Pneumatic actuating pressure
Mass
M-model
P-model
Dimensions
Position indicators
Maximum voltage
Maximum current
Enclosure protection
Mounting screw torque
*
For applications where maximum throughput is not required, the RV3 can be used.
P-model pumps only.
© Edwards Limited 2007. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
63/150M
63/150P
135 l s
200 l s
5 m
RV3* or RV5
1300 mbar
1.3 x 10
Santovac 5
o
C
42 l h
0.45 kW
48 V a.c.
380 mA
0.4 Nm
100/300M
100/300P
-1
-1
280 l s
-1
-1
500 l s
3
-1
3
-1
h
5 m
h
RV5 or RV8
1300 mbar
5
5
Pa
1.3 x 10
Pa
Santovac 5
60 ml
125 ml
ISO63
ISO100
NW10
NW25
6 mm compression
couplings
-1
-1
60 l h
0.65 kW
6 mm couplings x
2.4 to 6.9 bar (35 to 100 psi,
5
2.4 x 10
to 6.9 x 10
8 kg
12 kg
9 kg
13 kg
See Figures
48 V a.c.
380 mA
IP67
IP67
0.4 Nm
B344-21-880 Issue N
160/700M
250/2000M
160/700P
250/2000P
-1
700 l s
2000 l s
-1
1300 l s
3000 l s
3
-1
3
12 m
h
40 m
h
RV12 or E2M18
E2M40
1300 mbar
1300 mbar
5
1.3 x 10
Pa
1.3 x 10
Santovac 5
Santovac 5
250 ml
500 ml
ISO160
ISO250
NW25
NW40
10 mm compression
couplings
-1
115 l h
180 l h
1.35 kW
2.25 kW
1
/
BSP male stud
4
5
Pa)
26 kg
59 kg
27 kg
60 kg
5
and
6
48 V a.c.
48 V a.c.
5 A
5 A
IP22
IP22
-
-
Page 9
-1
-1
-1
5
Pa
-1

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