Optical Probing Systems - Zeiss CONTURA Operating Instructions Manual

RDS-D / ...
Application
Measuring principle
Optical probes in combination with RDS-D:
Application
Universal
Measuring (discrete point and scanning)

Optical Probing Systems

The optical probes can be used in combination with the RDS-D articulat-
ing system and the MASS technology option.
ViScan
– Edge measurement
by means of image
sensor
– Distance measure-
ment by means of
autofocus
61211-1310402
LineScan
Profile measurement
CONTURA
Probing system
DotScan
Distance measuring
method
3-17