Aerotech ANT130L Series Hardware Manual page 48

Index
serial number
shimming
Solution
solvents
Specifications
Encoder
Hall-Effect Sensors
Limit Switch
Thermistor Specifications
Speed
stabilizing stage
stage
distortion
stabilizing
Stage Mass
Storage
Straightness
Symptom
Table of Contents
Temperature Effects
Thermistor Specifications
Travel
Troubleshooting
vacuum guidelines
vacuum lubricant (Braycote 602EF)
Vacuum Operation
Vibration
Warnings
Warranty and Field Service
Yaw
48
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13-14
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ANT130L Hardware Manual
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21
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3
16
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