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ANT95LZ-050
Aerotech ANT95LZ-050 Manuals
Manuals and User Guides for Aerotech ANT95LZ-050. We have
1
Aerotech ANT95LZ-050 manual available for free PDF download: Hardware Manual
Aerotech ANT95LZ-050 Hardware Manual (50 pages)
Brand:
Aerotech
| Category:
DC Drives
| Size: 1.9 MB
Table of Contents
ANT95LZ Series Single-Axis Z Direct-Drive Nanopositioning Stage
1
Table of Contents
3
List of Figures
4
List of Tables
5
EU Declaration of Incorporation
7
Safety Procedures and Warnings
8
Installation and Operation
9
Electrical Warnings
10
Motor-Related Warnings
11
Pinch Points
12
Magnetic Hazards
13
Handling and Storage
14
Chapter 1: Overview
17
Figure 1-1: GEN2 Vs GEN1 Visual Comparison
17
Table 1-1: Model Numbers and Ordering Options
17
Environmental Specifications
18
Accuracy and Temperature Effects
18
Table 1-2: Environmental Specifications
18
Basic Specifications
19
Table 1-3: ANT95LZ Series Specifications
19
Air Requirements
20
Figure 1-2: Counterbalance Air Flow Vs. Counterbalance Pressure
20
Figure 1-3: Air Inlet Location
20
Chapter 2: Installation
21
Dimensions
21
Figure 2-1: ANT95LZ-025 Dimensions
21
Figure 2-2: ANT95LZ-025 Dimensions
22
Securing the Stage to the Mounting Surface
23
Table 2-1: Stage Mounting Surface Flatness Requirement
23
Figure 2-3: Mounting Hole Pattern (and Pneumatics Cylinder Clearance)
24
Table 2-2: Stage to Mounting Surface Hardware
24
Setting up the Pneumatic Counterbalance
25
Figure 2-4: Counterbalance Pressure Vs. External Payload
25
Attaching the Payload to the Stage
27
Table 2-3: Payload to Stage Surface Hardware
27
Figure 2-5: Load Orientations
28
Figure 2-6: Cantilevered Load Capabilities
29
Chapter 3: Electrical Installation
31
Motor and Feedback Connectors
32
Table 3-1: 25-Pin Motor and Feedback Connector Pinout
33
Table 3-2: 25-Pin Mating Connector Part Numbers
33
Motor and Feedback Wiring
34
Figure 3-1: ANT95LZ Motor and Feedback Wiring
34
Motor and Feedback Specifications
35
Table 3-3: Hall-Effect Sensor Specifications
35
Table 3-4: Thermistor Specifications
35
Table 3-5: Encoder Specifications
35
Table 3-6: Limit Switch Specifications
35
Table 3-7: ANT95LZ Motor Specifications
36
Table 3-8: Encoder Resolution
36
Limits, Marker, and Machine Direction
37
Figure 3-2: Machine Direction
37
Motor and Feedback Phasing
38
Figure 3-3: Hall Phasing Diagram
38
Figure 3-4: Encoder Phasing Reference Diagram (Standard/Square Wave)
39
Figure 3-5: Encoder Phasing Reference Diagram (Analog/Sine Wave)
39
Chapter 4: Maintenance
41
Service and Inspection Schedule
41
Cleaning and Lubrication
42
Troubleshooting
44
Appendix A: Warranty and Field Service
45
Appendix B: Revision History
47
Index
49
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