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ANT130LZS Series Single-Axis Z Low-Profile Direct-Drive Nanopositioning Stage HARDWARE MANUAL Revision 2.00...
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Global Technical Support Portal for information and support about your Aerotech, Inc. products. The website supplies software, product manuals, Help files, training schedules, and PC-to-PC remote technical support. If necessary, you can complete Product Return (RMA) forms and get information about repairs and spare or replacement parts.
ANT130LZS Hardware Manual Table of Contents Table of Contents ANT130LZS Series Single-Axis Z Low-Profile Direct-Drive Nanopositioning Stage Table of Contents List of Figures List of Tables EU Declaration of Incorporation Safety Procedures and Warnings Installation and Operation Electrical Warnings Motor-Related Warnings...
EU Declaration of Incorporation ANT130LZS Hardware Manual EU Declaration of Incorporation Manufacturer Aerotech, Inc. 101 Zeta Drive Pittsburgh, PA 15238-2811 herewith declares that the product: ANT130LZS Linear Stage is intended to be incorporated into machinery to constitute machinery covered by the Directive 2006/42/EC as amended;...
To find the newest information about this product, refer to www.aerotech.com. If you do not understand the information in this manual, contact Aerotech Global Technical Support. IMPORTANT: This product has been designed for light industrial manufacturing or laboratory environments.
WARNING: Trip Hazard! Route, house, and secure all cables, duct work, air, or water lines. Failure to do so could introduce trip hazards around the system that could result in physical injury or could damage the equipment. www.aerotech.com...
It is the responsibility of the End User/System Integrator to make sure that stages are properly connected and grounded per Engineering Standards and applicable safety requirements. It is the responsibility of the End User/System Integrator to configure the system drive or controller within the Aerotech motor/stage electrical and mechanical specifications. www.aerotech.com...
Motor-Related Warnings ANT130LZS Hardware Manual Motor-Related Warnings Aerotech motors are capable of producing high forces and velocities. Obey all warnings and all applicable codes and standards when you use or operate a stage or system that incorporates Aerotech motors. DANGER: Hot Surface Hazard! The stage/motor frame temperature could exceed 70°C in some applications.
(during normal operation, for example). when the system is moved manually (during the installation process or when you do maintenance, for example). Motors are capable of very high speeds and acceleration rates. Figure 1: Typical Pinch Point Locations www.aerotech.com...
Loose items such as metallic tools, watches, or keys could get drawn into and dam- age the magnet track assembly. IMPORTANT: Use non-magnetic tools when you install or do service to the stage. Figure 2: Exposed Magnet Locations www.aerotech.com...
Before you operate the stage, let it stabilize at room temperature for at least 12 hours. This will ensure that all of the alignments, preloads, and tolerances are the same as they were when they were tested at Aerotech. www.aerotech.com...
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Store the stage in the original shipping container. If the original packaging included ESD protective packaging, make sure to store the stage in it. The storage location must be dry, free of dust, free of vibrations, and flat. Section 1.1. Environmental Specifications Refer to www.aerotech.com...
Aerotech logo and the introduction of additive (3D-printed) parts. Refer to Figure 1-1. Contact Aerotech if you need a first generation manual. Figure 1-1: GEN2 vs GEN1 Visual Comparison Table 1-1: Model Numbers and Ordering Options...
Indoor use only 1.2. Accuracy and Temperature Effects Aerotech products are designed for and built in a 20°C (68°F) environment. Extreme temperature changes could cause a decrease in performance or permanent damage to the stage. At a minimum, the environmental temperature must be controlled to within 0.25ºC per 24 hours to ensure the stage specifications are repeatable over an extended period of time.
7. To ensure the achievement and repeatability of specifications over an extended period of time, environmental temperature must be controlled to within 0.25°C per 24 hours. Consult the Aerotech factory for more information. 8. The air supply for the pneumatic counterbalance must be clean, dry to 0°F dewpoint, and filtered to 0.25 µm or better.
If compressed air is used, it must be filtered to 0.25 microns, dry to 0º F dew point, and oil free. The maximum allowable input pressure specification is 0.6 MPa (87 psi). The low friction air cylinder consumes air as described in Figure 1-2. Figure 1-2: Counterbalance Air Flow vs. Counterbalance Pressure Figure 1-3: Air Inlet Location www.aerotech.com...
IMPORTANT: The stage installation must be in accordance with the instructions provided by this manual and any accompanying documentation. Failure to follow these instructions could result in injury or damage to the equipment. 2.1. Dimensions Figure 2-1: ANT130LZS Dimensions www.aerotech.com...
5. Two Person Step: Lift the carriage by hand, and hold it up to expose the bottom mounting holes. Insert the remaining mounting screws. Align the stage per your application, and then tighten the mounting screws. Refer to Table 2-2 for screw torque specifications. www.aerotech.com...
) / 1x10 {MPa} where Pc = Required counterbalance pressure in MPa (maximum 0.6 MPa allowed) mp = mass of external payload in kg. This relationship is shown graphically in Figure 2-4. Figure 2-4: Counterbalance Pressure vs. External Payload www.aerotech.com...
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2. Gently push the carriage down to the bottom of travel until the mechanical shock engages. 3. Turn off the counterbalance pressure. Once the counterbalance pressure has completely bled out, release the hand pressure on the carriage. To change the payload on the stage (add or remove mass), refer to Section 2.3. www.aerotech.com...
If you start the ANT130LZS without a payload, the servo gains provided by Aerotech with the shipment may not be appropriate and servo instability can occur. Refer to the controller help file for tuning assistance.
This will allow the tabletop to fall a small amount. 8. Adjust the air supply pressure until the tabletop reaches equilibrium. 9. Completely remove the shipping clamp, and verify the stage is at equilibrium. Make adjustments as necessary. 10. Reconnect the electrical power. Figure 2-5: Load Orientations www.aerotech.com...
Aerotech motion control systems are adjusted at the factory for optimum performance. When the ANT130LZS is part of a complete Aerotech motion control system, setup should only require that you connect the stage to the appropriate drive chassis with the cables provided. Labels on the system components should indicate the appropriate connections.
Stages equipped with standard motors and encoders come from the factory completely wired and assembled. IMPORTANT: Refer to the other documentation accompanying your Aerotech equipment. Call your Aerotech representative if there are any questions on system configuration. IMPORTANT: If using standard Aerotech motors and cables, motor and encoder connection adjustments are not required.
Hall Effect Sensor (Phase B) Frame Ground and Shield Connection Motor Phase A Motor Phase B Motor Phase C Table 3-2: 25-Pin Mating Connector Part Numbers Mating Connector Aerotech P/N Third Party P/N 25-Socket D-Connector ECK00300 FCI DB25S064TLF Backshell ECK00656 Amphenol 17E-1726-2...
-/CCW LMT (End-of travel limit signal that indicates maximum permitted stage travel in the “machine negative” or “machine counter-clockwise” direction.) Reserved Table 3-6: 25-Pin Feedback Mating Connector Part Numbers Mating Connector Aerotech P/N Third Party P/N 25-Socket D-Connector ECK00300 FCI DB25S064TLF Backshell...
3.2. Motor and Feedback Wiring ANT130LZS Hardware Manual 3.2. Motor and Feedback Wiring Shielded cables are required for the motor and feedback connections. Figure 3-1: ANT130LZS Motor and Feedback Wiring [-CN1 Option] www.aerotech.com...
Requires external pull-up to +5 V (10 kΩ recommended) Note: If the ANT130LZS is driven beyond the electrical limit, it will encounter a mechanical stop. Impacting the mechanical stop could cause damage to the stage even at low speeds. www.aerotech.com...
5. All performance and electrical specifications ±10%. 6. Maximum winding temperature is 125°C. 7. Ambient operating temperature range 0 °C - 25 °C; consult Aerotech for performance in elevated ambient temperatures. 8. All Aerotech amplifiers are rated Apk; use force constant in N·m/Apk when sizing.
ANT130LZS Hardware Manual 3.4. Limits, Marker, and Machine Direction Aerotech stages are configured to have positive and negative "machine" directions. The machine direction defines the phasing of the feedback and motor signals and is dictated by the stage wiring (refer to Section 3.2.).
ANT130LZS Hardware Manual 3.5. Motor and Feedback Phasing 3.5. Motor and Feedback Phasing Motor phase voltage is measured relative to the virtual wye common point. Figure 3-4: Hall Phasing Diagram www.aerotech.com...
Visually inspect the stage and cables. Re-tighten loose connectors. Replace or repair damaged cables. Clean the ANT130LZS and any components and cables as needed. Repair any damage before operating the ANT130LZS. Inspect and perform an operational check on all safeguards and protective devices. www.aerotech.com...
5. We recommend that you do not disassemble the stage beyond the instructions given in this manual. Proper assembly and calibration can only be done at the factory. Contact Aerotech for more information. Cleaning Use isopropyl alcohol on a lint-free cloth to clean any external metal surface of the ANT130LZS.
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4. Apply a thin, continuous film of lubricant to the exposed v-channels of the cross rollers on both ends of the stage. Aerotech recommends that you use a good quality, natural bristle artist's brush for the applicator. Do not use any applicator that could scratch or otherwise damage the v-channels.
Pneumatic Counterbalance The mechanical components are aligned at the factory during assembly and are not intended to be user-adjustable. The only adjustable component is the integrated pressure regulator. www.aerotech.com...
Chapter 3: Electrical Installation and Controller documentation). Stage moves uncontrollably Motor Connections (refer to Chapter 3: Electrical Installation and the Controller documentation). Gains misadjusted (refer to the Controller documentation). Stage oscillates or squeals Encoder signals (refer to the Controller documentation). www.aerotech.com...
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4.4. Troubleshooting ANT130LZS Hardware Manual This page intentionally left blank. www.aerotech.com...
All Other Repairs - After Aerotech's evaluation, the buyer shall be notified of the repair cost. At such time the buyer must issue a valid purchase order to cover the cost of the repair and freight, or authorize the product(s) to be shipped back as is, at the buyer's expense.
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Aerotech's approval. On-site Warranty Repair If an Aerotech product cannot be made functional by telephone assistance or by sending and having the customer install replacement parts, and cannot be returned to the Aerotech service center for...
ANT130LZS Hardware Manual Appendix B: Revision History Appendix B: Revision History Revision Description Declaration of Conformity updated 2.00 Product update to Gen 2 version Safety information updated. 1.01 General product update 1.00 New Manual www.aerotech.com...
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Appendix B: Revision History ANT130LZS Hardware Manual This page intentionally left blank. www.aerotech.com...
Directive 2006/42/EC Pitch Possible Cause Protection Rating Electrical Installation protective ground connection Electrical Warnings EN 60204-1 2010 EN ISO 12100 2010 Repeatability Encoder Specifications Resolution EU 2015/863 Roll Flatness serial number 13-14 shimming Solution Hall-Effect Sensors Specifications solvents Handling www.aerotech.com...
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Index ANT130LZS Hardware Manual Specifications Encoder Hall-Effect Sensors Limit Switch Thermistor Specifications Speed stabilizing stage stage distortion stabilizing Stage Mass Storage Straightness Symptom Table of Contents Temperature Effects Thermistor Specifications Travel Troubleshooting Vibration Warnings Warranty and Field Service www.aerotech.com...