ANT130L Series Single-Axis Linear Direct-Drive Nanopositioning Stage HARDWARE MANUAL Revision 2.00...
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ANT130L Hardware Manual Table of Contents Table of Contents ANT130L Series Single-Axis Linear Direct-Drive Nanopositioning Stage Table of Contents List of Figures List of Tables EU Declaration of Incorporation Safety Procedures and Warnings Installation and Operation Electrical Warnings Motor-Related Warnings...
EU Declaration of Incorporation ANT130L Hardware Manual EU Declaration of Incorporation Manufacturer Aerotech, Inc. 101 Zeta Drive Pittsburgh, PA 15238-2811 herewith declares that the product: ANT130L Linear Stage is intended to be incorporated into machinery to constitute machinery covered by the Directive 2006/42/EC as amended;...
To find the newest information about this product, refer to www.aerotech.com. If you do not understand the information in this manual, contact Aerotech Global Technical Support. IMPORTANT: This product has been designed for light industrial manufacturing or laboratory environments.
WARNING: Trip Hazard! Route, house, and secure all cables, duct work, air, or water lines. Failure to do so could introduce trip hazards around the system that could result in physical injury or could damage the equipment. www.aerotech.com...
It is the responsibility of the End User/System Integrator to make sure that stages are properly connected and grounded per Engineering Standards and applicable safety requirements. It is the responsibility of the End User/System Integrator to configure the system drive or controller within the Aerotech motor/stage electrical and mechanical specifications. www.aerotech.com...
Motor-Related Warnings ANT130L Hardware Manual Motor-Related Warnings Aerotech motors are capable of producing high forces and velocities. Obey all warnings and all applicable codes and standards when you use or operate a stage or system that incorporates Aerotech motors. DANGER: Hot Surface Hazard! The stage/motor frame temperature could exceed 70°C in some applications.
(during normal operation, for example). when the system is moved manually (during the installation process or when you do maintenance, for example). Motors are capable of very high speeds and acceleration rates. Figure 1: Typical Pinch Point Locations www.aerotech.com...
Loose items such as metallic tools, watches, or keys could get drawn into and dam- age the magnet track assembly. IMPORTANT: Use non-magnetic tools when you install or do service to the stage. Figure 2: Exposed Magnet Locations www.aerotech.com...
Before you operate the stage, let it stabilize at room temperature for at least 12 hours. This will ensure that all of the alignments, preloads, and tolerances are the same as they were when they were tested at Aerotech. www.aerotech.com...
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Store the stage in the original shipping container. If the original packaging included ESD protective packaging, make sure to store the stage in it. The storage location must be dry, free of dust, free of vibrations, and flat. Section 1.1. Environmental Specifications Refer to www.aerotech.com...
Aerotech logo and the introduction of additive (3D-printed) parts. Refer to Figure 1-1. Contact Aerotech if you need a first generation manual. Figure 1-1: GEN2 vs GEN1 Visual Comparison Table 1-1: Model Numbers and Ordering Options...
Indoor use only 1.2. Accuracy and Temperature Effects Aerotech products are designed for and built in a 20°C (68°F) environment. Extreme temperature changes could cause a decrease in performance or permanent damage to the stage. At a minimum, the environmental temperature must be controlled to within 0.25ºC per 24 hours to ensure the stage specifications are repeatable over an extended period of time.
6. -PL2 performance requires the use of an Aerotech controller. 7. To ensure the achievement and repeatability of specifications over an extended period of time, environmental temperature must be controlled to within 0.25°C per 24 hours. Consult the Aerotech factory for more information. www.aerotech.com...
6. To reduce outgassing during the initial pump-down to vacuum pressure, Aerotech recommends that you bake out vacuum systems when you first install them into the vacuum chamber. Bake the vacuum components at 60 °C for 24 to 48 hours to desorb water vapor from surfaces and...
IMPORTANT: The stage installation must be in accordance with the instructions provided by this manual and any accompanying documentation. Failure to follow these instructions could result in injury or damage to the equipment. 2.1. Dimensions Figure 2-1: ANT130L Dimensions www.aerotech.com...
Stage Mounting Surface Flatness Requirement Stage Travel Flatness Requirement All Travels 7.6 µm Access the mounting holes in the base of the stage by sliding the carriage all the way to either end of travel (shown in Figure 2-3). www.aerotech.com...
If you start the ANT130L without a payload, the servo gains provided by Aerotech with the shipment may not be appropriate and servo instability can occur. Refer to the controller help file for tuning assistance.
Aerotech motion control systems are adjusted at the factory for optimum performance. When the ANT130L is part of a complete Aerotech motion control system, setup should only require that you connect the stage to the appropriate drive chassis with the cables provided. Labels on the system components should indicate the appropriate connections.
Stages equipped with standard motors and encoders come from the factory completely wired and assembled. IMPORTANT: Refer to the other documentation accompanying your Aerotech equipment. Call your Aerotech representative if there are any questions on system configuration. IMPORTANT: If using standard Aerotech motors and cables, motor and encoder connection adjustments are not required.
Hall Effect Sensor (Phase B) Frame Ground and Shield Connection Motor Phase A Motor Phase B Motor Phase C Table 3-2: 25-Pin Mating Connector Part Numbers Mating Connector Aerotech P/N Third Party P/N 25-Socket D-Connector ECK00300 FCI DB25S064TLF Backshell ECK00656 Amphenol 17E-1726-2...
-/CCW LMT (End-of travel limit signal that indicates maximum permitted stage travel in the “machine negative” or “machine counter-clockwise” direction.) Reserved Table 3-6: 25-Pin Feedback Mating Connector Part Numbers Mating Connector Aerotech P/N Third Party P/N 25-Socket D-Connector ECK00300 FCI DB25S064TLF Backshell...
3.2. Motor and Feedback Wiring ANT130L Hardware Manual 3.2. Motor and Feedback Wiring Shielded cables are required for the motor and feedback connections. Figure 3-1: ANT130L Motor and Feedback Wiring [-CN1 Option] www.aerotech.com...
Requires external pull-up to +5 V (10 kΩ recommended) Note: If the ANT130L is driven beyond the electrical limit, it will encounter a mechanical stop. Impacting the mechanical stop could cause damage to the stage even at low speeds. www.aerotech.com...
5. All performance and electrical specifications ±10%. 6. Maximum winding temperature is 125°C. 7. Ambient operating temperature range 0 °C - 25 °C; consult Aerotech for performance in elevated ambient temperatures. 8. All Aerotech amplifiers are rated Apk; use force constant in N·m/Apk when sizing.
ANT130L Hardware Manual 3.4. Limits, Marker, and Machine Direction Aerotech stages are configured to have positive and negative "machine" directions. The machine direction defines the phasing of the feedback and motor signals and is dictated by the stage wiring (refer to Section 3.2.).
ANT130L Hardware Manual 3.5. Motor and Feedback Phasing 3.5. Motor and Feedback Phasing Motor phase voltage is measured relative to the virtual wye common point. Figure 3-4: Hall Phasing Diagram www.aerotech.com...
Visually inspect the stage and cables. Re-tighten loose connectors. Replace or repair damaged cables. Clean the ANT130L and any components and cables as needed. Repair any damage before operating the ANT130L. Inspect and perform an operational check on all safeguards and protective devices. www.aerotech.com...
5. We recommend that you do not disassemble the stage beyond the instructions given in this manual. Proper assembly and calibration can only be done at the factory. Contact Aerotech for more information. Cleaning Use isopropyl alcohol on a lint-free cloth to clean any external metal surface of the ANT130L.
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4. Apply a thin, continuous film of lubricant to the exposed v-channels of the cross rollers on both ends of the stage. Aerotech recommends that you use a good quality, natural bristle artist's brush for the applicator. Do not use any applicator that could scratch or otherwise damage the v-channels.
Chapter 3: Electrical Installation and Controller documentation). Stage moves uncontrollably Motor Connections (refer to Chapter 3: Electrical Installation and the Controller documentation). Gains misadjusted (refer to the Controller documentation). Stage oscillates or squeals Encoder signals (refer to the Controller documentation). www.aerotech.com...
All Other Repairs - After Aerotech's evaluation, the buyer shall be notified of the repair cost. At such time the buyer must issue a valid purchase order to cover the cost of the repair and freight, or authorize the product(s) to be shipped back as is, at the buyer's expense.
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Aerotech's approval. On-site Warranty Repair If an Aerotech product cannot be made functional by telephone assistance or by sending and having the customer install replacement parts, and cannot be returned to the Aerotech service center for...
Added Environmental Specifications section 1.02 Added safety information and warnings Added note about current requirements of motor and ground wires Added information on ANT130-L-Z 1.01 Added stage limit travel dimension -H option is now -PLUS option 1.00 New manual www.aerotech.com...
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Appendix B: Revision History ANT130L Hardware Manual This page intentionally left blank. www.aerotech.com...
Moving Mass Dimensions multiaxis combinations Directive 2006/42/EC packing list Electrical Installation part number 13-14 Electrical Warnings Pitch EN 60204-1 2010 Possible Cause EN ISO 12100 2010 Protection Rating Encoder Specifications protective ground connection EU 2015/863 Repeatability Flatness Resolution Roll grease www.aerotech.com...
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Hall-Effect Sensors Limit Switch Thermistor Specifications Speed stabilizing stage stage distortion stabilizing Stage Mass Storage Straightness Symptom Table of Contents Temperature Effects Thermistor Specifications Travel Troubleshooting vacuum guidelines vacuum lubricant (Braycote 602EF) Vacuum Operation Vibration Warnings Warranty and Field Service www.aerotech.com...