Related Manuals for Aerotech ANT130XY Series
Summary of Contents for Aerotech ANT130XY Series
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Page 1: Ant130Xy Series Two-Axis Direct-Drive Nanopositioning Stage
ANT130XY Series Two-Axis Direct-Drive Nanopositioning Stage HARDWARE MANUAL Revision 2.00... - Page 2 Global Technical Support Portal for information and support about your Aerotech, Inc. products. The website supplies software, product manuals, Help files, training schedules, and PC-to-PC remote technical support. If necessary, you can complete Product Return (RMA) forms and get information about repairs and spare or replacement parts.
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Page 3: Table Of Contents
ANT130XY Hardware Manual Table of Contents Table of Contents ANT130XY Series Two-Axis Direct-Drive Nanopositioning Stage Table of Contents List of Figures List of Tables EU Declaration of Incorporation Safety Procedures and Warnings Installation and Operation Electrical Warnings Motor-Related Warnings Pinch Points... -
Page 4: List Of Figures
ANT130XY Motor and Feedback Wiring [-CN1 Option] Figure 3-2: ANT130XY Motor and Feedback Wiring [-CN2 Option] Figure 3-3: Machine Direction Figure 3-4: Hall Phasing Diagram Figure 3-5: Encoder Phasing Reference Diagram (Standard/Square Wave) Figure 3-6: Encoder Phasing Reference Diagram (Analog/Sine Wave) www.aerotech.com... -
Page 5: List Of Tables
25-Pin Feedback Connector Pinout (-CN2 Option) Table 3-6: 25-Pin Feedback Mating Connector Part Numbers Table 3-7: Hall-Effect Sensor Specifications Table 3-8: Thermistor Specifications Table 3-9: Encoder Specifications Table 3-10: Limit Switch Specifications Table 3-11: ANT130XY Motor Specifications Table 3-12: Encoder Resolution www.aerotech.com... -
Page 6: Eu Declaration Of Incorporation
EU Declaration of Incorporation ANT130XY Hardware Manual EU Declaration of Incorporation Manufacturer Aerotech, Inc. 101 Zeta Drive Pittsburgh, PA 15238-2811 herewith declares that the product: ANT130XY Linear Stage is intended to be incorporated into machinery to constitute machinery covered by the Directive 2006/42/EC as amended;... -
Page 7: Safety Procedures And Warnings
To find the newest information about this product, refer to www.aerotech.com. If you do not understand the information in this manual, contact Aerotech Global Technical Support. IMPORTANT: This product has been designed for light industrial manufacturing or laboratory environments. -
Page 8: Installation And Operation
WARNING: Trip Hazard! Route, house, and secure all cables, duct work, air, or water lines. Failure to do so could introduce trip hazards around the system that could result in physical injury or could damage the equipment. www.aerotech.com... -
Page 9: Electrical Warnings
It is the responsibility of the End User/System Integrator to make sure that stages are properly connected and grounded per Engineering Standards and applicable safety requirements. It is the responsibility of the End User/System Integrator to configure the system drive or controller within the Aerotech motor/stage electrical and mechanical specifications. www.aerotech.com... -
Page 10: Motor-Related Warnings
Motor-Related Warnings ANT130XY Hardware Manual Motor-Related Warnings Aerotech motors are capable of producing high forces and velocities. Obey all warnings and all applicable codes and standards when you use or operate a stage or system that incorporates Aerotech motors. DANGER: Hot Surface Hazard! The stage/motor frame temperature could exceed 70°C in some applications. -
Page 11: Pinch Points
(during the installation process or when you do maintenance, for example). Motors are capable of very high speeds and acceleration rates. Figure 1: Typical Pinch Point Locations NOTE: Pinch points exist at both ends of each axis. www.aerotech.com... -
Page 12: Magnetic Hazards
Loose items such as metallic tools, watches, or keys could get drawn into and dam- age the magnet track assembly. IMPORTANT: Use non-magnetic tools when you install or do service to the stage. Figure 2: Exposed Magnet Locations www.aerotech.com... -
Page 13: Handling And Storage
Before you operate the stage, let it stabilize at room temperature for at least 12 hours. This will ensure that all of the alignments, preloads, and tolerances are the same as they were when they were tested at Aerotech. www.aerotech.com... - Page 14 Retain the brackets and hardware for future use. DANGER: Mechanical Hazard! The product can move manually without electrical power connected. When the shipping brackets are removed, the operator could be exposed to pinch points. Figure 3: Shipping Brackets Figure 4: Shipping Bracket Removal Procedure (Step 1) www.aerotech.com...
- Page 15 Store the stage in the original shipping container. If the original packaging included ESD protective packaging, make sure to store the stage in it. The storage location must be dry, free of dust, free of vibrations, and flat. Section 1.1. Environmental Specifications Refer to www.aerotech.com...
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Page 17: Chapter 1: Overview
Aerotech logo and the introduction of additive (3D-printed) parts. Refer to Figure 1-1. Contact Aerotech if you need a first generation manual. Figure 1-1: GEN2 vs GEN1 Visual Comparison Table 1-1: Model Numbers and Ordering Options... -
Page 18: Environmental Specifications
Indoor use only 1.2. Accuracy and Temperature Effects Aerotech products are designed for and built in a 20°C (68°F) environment. Extreme temperature changes could cause a decrease in performance or permanent damage to the stage. At a minimum, the environmental temperature must be controlled to within 0.25ºC per 24 hours to ensure the stage specifications are repeatable over an extended period of time. -
Page 19: Basic Specifications
1. Specifications for -PL1 and -PL2 options are per-axis, measured 25 mm above the tabletop. Specifications for the -PL3 option are XY, measured 25 mm above the tabletop. -PL2 and -PL3 performance options require the use of an Aerotech controller. -
Page 20: Vacuum Operation
6. To reduce outgassing during the initial pump-down to vacuum pressure, Aerotech recommends that you bake out vacuum systems when you first install them into the vacuum chamber. Bake the vacuum components at 60 °C for 24 to 48 hours to desorb water vapor from surfaces and... -
Page 21: Chapter 2: Installation
IMPORTANT: The stage installation must be in accordance with the instructions provided by this manual and any accompanying documentation. Failure to follow these instructions could result in injury or damage to the equipment. 2.1. Dimensions Figure 2-1: ANT130XY Dimensions www.aerotech.com... -
Page 22: Figure 2-2: Mounting Plate (Mp) Dimensions
2.1. Dimensions ANT130XY Hardware Manual Figure 2-2: Mounting Plate (MP) Dimensions www.aerotech.com... -
Page 23: Figure 2-3: Cable Management Post (Cms) Dimensions
ANT130XY Hardware Manual 2.1. Dimensions Figure 2-3: Cable Management Post (CMS) Dimensions www.aerotech.com... -
Page 24: Securing The Stage To The Mounting Surface
Stage Mounting Surface Flatness Requirement Stage Travel Flatness Requirement All Travels 7.6 µm Access the mounting holes in the base of the stage by sliding the carriage all the way to either end of travel (shown in Figure 2-4). www.aerotech.com... -
Page 25: Figure 2-4: Mounting Hole Pattern
Refer to Section 2.1. for mounting locations and dimensions. Table 2-2: Stage to Mounting Surface Hardware Typical Screw Torque Mounting Hardware M6 x 18 mm (1/4 x 3/4 in) SHCS 7.0 N·m [61 lb·in] Figure 2-4: Mounting Hole Pattern www.aerotech.com... -
Page 26: Attaching The Payload To The Stage
If you start the ANT130XY without a payload, the servo gains provided by Aerotech with the shipment may not be appropriate and servo instability can occur. Refer to the controller help file for tuning assistance. -
Page 27: Figure 2-5: Load Orientations
ANT130XY Hardware Manual 2.3. Attaching the Payload to the Stage Figure 2-5: Load Orientations Figure 2-6: Cantilevered Load Capabilities www.aerotech.com... - Page 28 2.3. Attaching the Payload to the Stage ANT130XY Hardware Manual This page intentionally left blank. www.aerotech.com...
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Page 29: Chapter 3: Electrical Installation
Aerotech motion control systems are adjusted at the factory for optimum performance. When the ANT130XY is part of a complete Aerotech motion control system, setup should only require that you connect the stage to the appropriate drive chassis with the cables provided. Labels on the system components should indicate the appropriate connections. -
Page 30: Motor And Feedback Connectors
Stages equipped with standard motors and encoders come from the factory completely wired and assembled. IMPORTANT: Refer to the other documentation accompanying your Aerotech equipment. Call your Aerotech representative if there are any questions on system configuration. IMPORTANT: If using standard Aerotech motors and cables, motor and encoder connection adjustments are not required. -
Page 31: Table 3-1: 25-Pin Motor And Feedback Connector Pinout (-Cn1)
Hall Effect Sensor (Phase B) Frame Ground and Shield Connection Motor Phase A Motor Phase B Motor Phase C Table 3-2: 25-Pin Mating Connector Part Numbers Mating Connector Aerotech P/N Third Party P/N 25-Socket D-Connector ECK00300 FCI DB25S064TLF Backshell ECK00656 Amphenol 17E-1726-2... -
Page 32: Table 3-3: 4-Pin Motor Connector Pinout (-Cn2 Option)
Motor Phase C Reserved Reserved Reserved Reserved Reserved Frame Ground (motor protective ground) Table 3-4: 4-Pin Motor Mating Connector Part Numbers Mating Connector Aerotech P/N Third Party P/N Backshell ECK00656 Amphenol #17E-1726-2 Sockets [QTY. 4] ECK00659 ITT Cannon #DM53744-6 Connector ECK00657 ITT Cannon #DBM9W4SA197 www.aerotech.com... -
Page 33: Table 3-5: 25-Pin Feedback Connector Pinout (-Cn2 Option)
-/CCW LMT (End-of travel limit signal that indicates maximum permitted stage travel in the “machine negative” or “machine counter-clockwise” direction.) Reserved Table 3-6: 25-Pin Feedback Mating Connector Part Numbers Mating Connector Aerotech P/N Third Party P/N 25-Socket D-Connector ECK00300 FCI DB25S064TLF Backshell... -
Page 34: Motor And Feedback Wiring
3.2. Motor and Feedback Wiring ANT130XY Hardware Manual 3.2. Motor and Feedback Wiring Shielded cables are required for the motor and feedback connections. Figure 3-1: ANT130XY Motor and Feedback Wiring [-CN1 Option] www.aerotech.com... -
Page 35: Figure 3-2: Ant130Xy Motor And Feedback Wiring [-Cn2 Option]
ANT130XY Hardware Manual 3.2. Motor and Feedback Wiring Figure 3-2: ANT130XY Motor and Feedback Wiring [-CN2 Option] www.aerotech.com... -
Page 36: Motor And Feedback Specifications
Requires external pull-up to +5 V (10 kΩ recommended) Note: If the ANT130XY is driven beyond the electrical limit, it will encounter a mechanical stop. Impacting the mechanical stop could cause damage to the stage even at low speeds. www.aerotech.com... -
Page 37: Table 3-11: Ant130Xy Motor Specifications
5. All performance and electrical specifications ±10%. 6. Maximum winding temperature is 125°C. 7. Ambient operating temperature range 0 °C - 25 °C; consult Aerotech for performance in elevated ambient temperatures. 8. All Aerotech amplifiers are rated Apk; use force constant in N·m/Apk when sizing. -
Page 38: Limits, Marker, And Machine Direction
ANT130XY Hardware Manual 3.4. Limits, Marker, and Machine Direction Aerotech stages are configured to have positive and negative "machine" directions. The machine direction defines the phasing of the feedback and motor signals and is dictated by the stage wiring (refer to Section 3.2.). -
Page 39: Motor And Feedback Phasing
ANT130XY Hardware Manual 3.5. Motor and Feedback Phasing 3.5. Motor and Feedback Phasing Motor phase voltage is measured relative to the virtual wye common point. Figure 3-4: Hall Phasing Diagram www.aerotech.com... - Page 40 3.5. Motor and Feedback Phasing ANT130XY Hardware Manual Figure 3-5: Encoder Phasing Reference Diagram (Standard/Square Wave) Figure 3-6: Encoder Phasing Reference Diagram (Analog/Sine Wave) www.aerotech.com...
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Page 41: Chapter 4: Maintenance
Visually inspect the stage and cables. Re-tighten loose connectors. Replace or repair damaged cables. Clean the ANT130XY and any components and cables as needed. Repair any damage before operating the ANT130XY. Inspect and perform an operational check on all safeguards and protective devices. www.aerotech.com... -
Page 42: Cleaning And Lubrication
5. We recommend that you do not disassemble the stage beyond the instructions given in this manual. Proper assembly and calibration can only be done at the factory. Contact Aerotech for more information. Cleaning Use isopropyl alcohol on a lint-free cloth to clean any external metal surface of the ANT130XY. - Page 43 4. Apply a thin, continuous film of lubricant to the exposed v-channels of the cross rollers on both ends of the stage. Aerotech recommends that you use a good quality, natural bristle artist's brush for the applicator. Do not use any applicator that could scratch or otherwise damage the v-channels.
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Page 44: Troubleshooting
Chapter 3: Electrical Installation and Controller documentation). Stage moves uncontrollably Motor Connections (refer to Chapter 3: Electrical Installation and the Controller documentation). Gains misadjusted (refer to the Controller documentation). Stage oscillates or squeals Encoder signals (refer to the Controller documentation). www.aerotech.com... -
Page 45: Appendix A: Warranty And Field Service
All Other Repairs - After Aerotech's evaluation, the buyer shall be notified of the repair cost. At such time the buyer must issue a valid purchase order to cover the cost of the repair and freight, or authorize the product(s) to be shipped back as is, at the buyer's expense. - Page 46 Aerotech's approval. On-site Warranty Repair If an Aerotech product cannot be made functional by telephone assistance or by sending and having the customer install replacement parts, and cannot be returned to the Aerotech service center for...
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Page 47: Appendix B: Revision History
ANT130XY Hardware Manual Appendix B: Revision History Appendix B: Revision History Revision Description Declaration of Conformity updated 2.00 Product update to Gen 2 version Safety information updated. 1.00 New manual www.aerotech.com... - Page 48 Appendix B: Revision History ANT130XY Hardware Manual This page intentionally left blank. www.aerotech.com...
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Page 49: Index
Moving Mass Dimensions multiaxis combinations Directive 2006/42/EC Orthogonality Electrical Installation Electrical Warnings EN 60204-1 2010 packing list EN ISO 12100 2010 part number 13-14 Encoder Specifications Pitch EU 2015/863 Possible Cause Protection Rating protective ground connection Flatness www.aerotech.com... - Page 50 Hall-Effect Sensors Limit Switch Thermistor Specifications Speed stabilizing stage stage distortion stabilizing Stage Mass Storage Straightness Symptom Table of Contents Temperature Effects Thermistor Specifications Travel Troubleshooting vacuum guidelines vacuum lubricant (Braycote 602EF) Vacuum Operation Vibration Warnings Warranty and Field Service www.aerotech.com...