Table of Contents
Advertisement
Installation
Connecting supply gases
Auxiliary flow panels
For auxiliary flow panel(s), follow instructions included with the panel to
connect supply tubing between each pressure regulator and the
appropriate mass flow controller or flow manifold block, and to connect
gas supplies to the pressure regulators.
If no supply gas is to be connected directly to an inlet mass flow
controller or detector flow manifold block, proceed to Setting initial
supply pressures and leak testing in this section.
Auxiliary Flow Panel
After locating the appropriate panel, and before connecting the gas
supply tubes and fittings:
1. Make sure gas supplies to be connected are turned off at their
2. Remove the left side panel by removing two screws along its bottom
24
sources.
edge, then slide the panel toward the rear of the instrument and lift.
Advertisement
Table of Contents
