1. Manuals
  2. Brands
  3. VAT Manuals
  4. Control Unit
  5. 612 Series
  6. Installation, operating, & maintenance instructions

VAT 612 Series Installation, Operating, & Maintenance Instructions

Butterfly pressure control valve with cc-link interface, dn 63-250 (i.d. 2.5" - 10")
Hide thumbs Also See for 612 Series:
Table of Contents

Advertisement

Quick Links

Butterfly Pressure Control Valve
with CC-Link interface
This manual is valid for the valve ordering number(s):
612 . . - . . GL - . . . .
(1 sensor input)
612 . . - . . GN - . . . .
(2 sensor inputs)
612 . . - . . AL - . . . .
(1 sensor input / 15V SPS)
612 . . - . . AN - . . . .
(2 sensor inputs / 15V SPS)
612 . . - . . HL - . . . .
(1 sensor input / PFO)
612 . . - . . HN - . . . .
(2 sensor inputs / PFO)
612 . . - . . CL - . . . .
(1 sensor input / 15V SPS / PFO)
612 . . - . . CN - . . . .
(2 sensor inputs / 15V SPS / PFO)
SPS = Sensor Power Supply
configured with firmware
612C.1E.08
The fabrication number is indicated on each product as per the label
below (or similar):
made in Switzerland
Fabrication No.:
612 . . – . . . . – . . . . / . . . .
A – . . . . . .
Explanation of symbols:
Read declaration carefully before you start any other
action!
Attention!
Loaded springs and/or air cushions are potential
hazards!
Disconnect electrical power and compressed air lines.
Do not touch parts under voltage!
Read these «Installation, Operating & Maintenance Instructions» and the enclosed «General
Safety Instructions» carefully before you start any other action!
VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com
Installation, Operating & Maintenance Instructions
Series 612 DN 63-250 (I.D. 2.5" - 10"), CC-Link
PFO = Power Failure Option
Fabrication number
sample picture
Keep body parts and objects away from the valve
opening!
Hot surfaces; do not touch!
Wear gloves!
289856EA
2011-07-06
1/85

Advertisement

Table of Contents
loading
Need help?

Need help?

Do you have a question about the 612 Series and is the answer not in the manual?

Questions and answers

Related Manuals for VAT 612 Series

Summary of Contents for VAT 612 Series

  • Page 1 Do not touch parts under voltage! Read these «Installation, Operating & Maintenance Instructions» and the enclosed «General Safety Instructions» carefully before you start any other action! VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289856EA 1/85 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 2 VAT products. The VAT firmware contains a limited, time unlimited user license. The VAT firmware may not be used for purposes other than those intended nor is it permitted to make copies of the VAT firmware. In particular, it is strictly forbidden to give copies of the VAT firmware to other people.

  • Page 3: Table Of Contents

    3.10.7 INPUT Buffer (Master PLC) ....................... 59 3.10.8 Communication and timing control between Master (PLC) and Station (Valve) ......... 64 3.10.9 PRESSURE and SENSOR READING allocation ................65 VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289856EA 3/85 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 4 ISO-F valve unit - aluminum blank, without heating ..................81 Accessories ..............................82 7.4.1 Centering ring with Viton o-ring ......................83 8 Warranty ................................. 84 VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289856EA 4/85 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2011-07-06...

  • Page 5: Use Of Product

    This product is a Butterfly control valve for downstream pressure control in vacuum systems. Use product for clean and dry indoor vacuum applications under the conditions indicated in chapter «Technical data» only! Other applications are only allowed with the written permission of VAT. Technical data Control and actuating unit (α)
  • Page 6 Refer to chapter «Sensor supply concepts» for details. Refer to chapter «Schematics» for details. PFO = Power Failure Option. Refer to «Behavior in case of power failure» for details. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289856EA 6/85 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 7: Valve Unit

    Seal materials are declared on dimensional drawing of specific valve ordering number. - Slide bearing for shaft iglidur® X VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289856EA 7/85 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 8 15000 l/s Dimensions Refer to dimensional drawing of specific valve ordering number (available on request) VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289856EA 8/85 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2011-07-06...

  • Page 9: Installation

    Series 612 DN 63-250 (I.D. 2.5“ - 10”), CC-Link Installation Unpacking Valves DN63 / 2½" and larger must not be lifted solely by the actuator. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289856EA 9/85 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 10: Installation Into The System

    Do not connect or disconnect sensor cable when device is under power. Connection overview Connectors at controller panel Ground connection VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289856EA 10/85 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2011-07-06...
  • Page 11 Note: To provide power to the valve motor pins 4 and 8 must be bridged, otherwise motor interlock is active and the valve enters the safety mode and is not operative. Refer also to «Safety mode». This valve may optionally be equipped with a heating device. Connect VAT heating device according to manual of respective heating device.

  • Page 12: Tightening Torque

    30-35 48-52 59-67 Note: Make sure that screws in use are capable to withstand applied torques. 232530 VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289856EA 12/85 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2011-07-06...

  • Page 13: Admissible Forces

    Bending moment «M» size compressive force «F » mm inch lbf. 2½ 26.5 1000 1200 1200 1200 VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289856EA 13/85 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2011-07-06...

  • Page 14: Admissible Forces At Controller

    F = Force a = middle of aluminium part of controller (b / 2) pedestal 400 N pedestal VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289856EA 14/85 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2011-07-06...

  • Page 15: Requirements To Sensor Connection

    Dynamic stray magnetic fields may introduce noise to sensor output and should be avoided or shielded. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289856EA 15/85 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 16: Electrical Connection

    It is also possible to connect the ground strap at system chamber if it is well connected to PE. Note: Avoid low chassis cross section to the system PE connection. (Min. same cross section as ground strap) VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289856EA 16/85 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 17: Sensor Supply Concepts

    612 . . - . . A . - ../ 612 . . - . . C . - ..SPS module included Note: The SPS module can be retrofitted. Refer to chapter «Retrofit / replacement procedure» for instruction. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289856EA 17/85 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 18: Power And Sensor Connection (+24 Vdc Sensors)

    Connect the +24 VDC sensors at DB–15 female sensor connector exactly as shown in the drawing above. Do not connect other pins that may damage sensors, power supply or controller! Connector: Use only screws with 4-40UNC thread for fastening the connectors! VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289856EA 18/85 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 19 Connect the +24 VDC sensors at DB–15 female sensor connector exactly as shown in the drawing above. Do not connect other pins that may damage sensors, power supply or controller! Connector: Use only screws with 4-40UNC thread for fastening the connectors! VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289856EA 19/85 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 20: Power And Sensor Connection ( 15 Vdc Sensors) Without Optional Sps Module

    Connect the 15 VDC sensors at DB–15 female sensor connector exactly as shown in the drawing above. Do not connect other pins that may damage sensors, power supply or controller! Connector: Use only screws with 4-40UNC thread for fastening the connectors! VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289856EA 20/85 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 21 Connect the 15 VDC sensors at DB–15 female sensor connector exactly as shown in the drawing above. Do not connect other pins that may damage sensors, power supply or controller! Connector: Use only screws with 4-40UNC thread for fastening the connectors! VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289856EA 21/85 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 22: Power And Sensor Connection ( 15 Vdc Sensors) With Optional Sps Module

    Connect the 15 VDC sensors at DB–15 female sensor connector exactly as shown in the drawing above. Do not connect other pins that may damage sensors, power supply or controller! Connector: Use only screws with 4-40UNC thread for fastening the connectors! VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289856EA 22/85 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 23: Cc-Link Interface Connection

    Note: The valve can be defined as «first station», «…stations…» between first and last, or «last station». If the valve at first or last station, «TR» must be installed between 1 (DA) and 2 (DB). Note: The station type for VAT valves are: Version 2 Remote Device Station. VAT Vakuumventile AG, CH-9469 Haag, Switzerland...
  • Page 24 COMBICON Strain-relief screw for shield mesh and cable CC-Link wires Connector housing VAT Shield mesh CC-Link cable VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289856EA 24/85 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2011-07-06...
  • Page 25 Cut off the shield wires about 15mm Side-cutting pliers Separate the shield wires in two equal quantum and place them 180° opposite VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289856EA 25/85 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 26 11. Fasten the strain-relief screw until the cable Screw driver can not pulled out by manual force size 4 VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289856EA 26/85 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 27 15. Push the cover down to controller and Pozidriv screw driver fasten the cover screws (sample picture) size 2 VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289856EA 27/85 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 28 Installation, Operating & Maintenance Instructions Series 612 DN 63-250 (I.D. 2.5“ - 10”), CC-Link Connector type: COMBICON 2.5 / 5 - ST – 5, 08 with special VAT housing PIN interface Signal Color of isolator (CC-Link wires) Comment connector Blue...

  • Page 29: Logic I/O

    Note: Do not connect other pins than indicated in the schematics above! Example for connector: Type «Binder M8 male, 4-pole, shielded (recommended)» (99-3363-00-04). VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289856EA 29/85 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 30: Digital Input

    The service port (connector: SERVICE) allows to connect the valve to a RS232 port of a computer. This requires a service cable and software from VAT. You can either use our freeware 'Control View', which can be downloaded from www.vatvalve.com or purchase our 'Control Performance Analyzer'.

  • Page 31: Operation

    This valve is designed for downstream pressure control in vacuum chambers. It can be employed in a pressure control mode or a position control mode. In both cases local or remote operation is possible. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289856EA 31/85 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 32: Local Operation

    Local operation means that the valve is operated via the service port using a computer or the Service Box 2. When using a computer, a service cable and a software from VAT are required. You can either download our freeware 'Control View' from or purchase our 'Control Performance Analyzer'.

  • Page 33: Safety Mode

    Refer also to chapter «Display information». Valve position after power up is closed Valve position after power up is open VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289856EA 33/85 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 34: Behavior In Case Of Power Failure

    *). Default is not defined. Display indicates F. *) Provided that battery pack of the VAT controller is charged. Charging time after power up is 2 minutes max.. All parameters are stored in a power fail save memory. Display information...
  • Page 35 Digit 2 Digit 3 Digit 4 Fatal error occurred Error code. Refer to «Trouble shooting» for details VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289856EA 35/85 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2011-07-06...

  • Page 36: Cc-Link Leds

    Red, flickering CRC error (temporary flickering) Red, flashing Station Number or Baud rate has changed since startup (flashing) VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289856EA 36/85 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 37: Setup Procedure

    Refer to chapter «LEARN» for details. LEARN Note: Without LEARN the valve is not able to run pressure control VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289856EA 37/85 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 38: Cc-Link Interface Configuration

    Series 612 DN 63-250 (I.D. 2.5“ - 10”), CC-Link 3.6.1 CC-Link interface configuration Note: The station type for VAT valves are: Version 2 Remote Device Station. Station Number The «station number» is used to distinguish between stations on the CC-Link network. Unique station numbers in consecutive order without duplication must be used, when assigning stations to the CC-Link network.
  • Page 39 Extended cyclic settings: In the extended cyclic transmission (only Ver.2), the extended cyclic points can be set as 2 times, 4 times or 8 times of the normal cyclic transmission points. The VAT slave supports two combinations of the CC-Link parameter settings. Value Operational settings CC-Link Ver.2 / Occupies 1 station / Octuple expanded cyclic...

  • Page 40: Fieldbus Configuration (Optional)

    Note: If at start up the data type value in the memory is out of range the default value is taken. In this case the data type is set to default value (0 = singed integer) and the get command i:23 add a string “False”: VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289856EA 40/85 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 41 The format of y and z has following syntax: _ _ _ _ _ _ _ _._ _ _ _ _ Examples: i:2400-0012345.12345to00123456.12345 i:2401-0001000.00000to00001000.00000 i:240200001000.00000to00001500.00000 Example «get-command» with Terminal: Get the range of Pressure Sensor 1: VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289856EA 41/85 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2011-07-06...

  • Page 42: Logic I/O Configuration

    Note: The internal accuracy of valve is for all positions 100’000 steps and for all pressures 1’000’000 steps. If the range of pressure and position values is rising, the accuracy of pressure and position will not rise. There is only the gain factor between the VAT valve and the CC-Link Master which will be adapted. Note: (upper scale value - lower scale value) Note: If at startup the scale values in the memory are out of range or the rule above is broken the default values are taken.

  • Page 43: Valve And Sensor Configuration

    0 = valve will close 1 = valve will open 2 = valve no change reserved; do not change VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289856EA 43/85 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 44: Zero

    Note: Do not perform ZERO, if the base pressure of your vacuum system is higher than 1‰ of sensor full scale. We recommend disabling ZERO function in this case; refer to «Valve and sensor configuration» of the setup procedure. Otherwise incorrect pressure reading is the result. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289856EA 44/85 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 45: Learn

    Note: Learn may take several minutes. Do not interrupt the routine as a single full run is required to ensure fast and accurate pressure control. The PID controller covers 5% to 5000% of the gas flow which was used for learn. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289856EA 45/85 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 46 [l/s] gasflow for learn [sccm] = 39.4 p max. pressure to control [Torr] required lower conductance [l/s] VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289856EA 46/85 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2011-07-06...

  • Page 47: Close Valve

    Select or enter position setpoint In «OUTPUT Buffer» > «CONTROL MODE SETPOINT» Select [Position] (value = 2) VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289856EA 47/85 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2011-07-06...

  • Page 48: Pressure Control

    PRESSURE output in this range is a blend between both sensors. Note: Make sure that both sensors are calibrated. Note: Do not close optional gauge isolation valves during the transition phase between the sensors. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289856EA 48/85 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 49: Tuning Of Control Performance

    Pumping speed (l/s) and pump type (e.g. turbo pump) System description Problem description Send diagnostic file with and all required information to tuning-support@vat.ch VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289856EA 49/85 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2011-07-06...
  • Page 50 Go to ‘Setup / Control Parameter’ menu. Note: It’s not possible to do ‘Sensor delay adjustment‘ Select sensor delay. via CC-Link. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289856EA 50/85 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 51 Go to ‘Setup / Control Parameter’ menu. Note: It’s not possible to do ‘Setpoint ramp adjustment‘ via CC-Link. Select setpoint ramp. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289856EA 51/85 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 52 Go to ‘Setup / Control Parameter’ menu. Select valve Note: It’s not possible to do ‘Valve speed adjustment‘ speed. via CC-Link. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289856EA 52/85 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 53: Cc-Link Handshaking

    Series 612 DN 63-250 (I.D. 2.5“ - 10”), CC-Link 3.10.3 CC-Link Handshaking Before the CC-Link slave station (VAT valve) can be operated by the CC-Link Master (PLC), handshaking is necessary. If the handshake is not done, no data from the master will be transmitted to station.

  • Page 54: Location Of The Handshaking Bits

    : Address assigned to the master module by the station number setting. This means that the address range for this slave begins at address m of the master. n : Dependent on the VAT Operational settings mode (number of occupied stations and number of extension cycles) ...

  • Page 55: Example Of The Handshaking By A Plc-Program

    3.10.5 Example of the handshaking by a PLC-program The following program sends an answer to the VAT CC-Link station which return a “Remote READY” flag. It is important to correct register address is used. In this example the address for this slave station (valve) starts at 1000 (hex). So m = 100 (see capture Location of the handshaking bits).

  • Page 56: Output Buffer (Master Plc)

    Not used – reserved Not used – reserved Note: For data consistency make sure your master PLC is supporting “block guarantee of cyclic data per station”. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289856EA 56/85 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 57 NOT USED (reserved) Signal NOT USED (reserved) To adjust range refer to chapter: «Range of pressure and position values» VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289856EA 57/85 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 58 1st step : set bit (01) 4. from locked to remote 1st step : reset bit (10) NOT USED (reserved) VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289856EA 58/85 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 59: Input Buffer (Master Plc)

    Not used – reserved Not used – reserved Not used – reserved Not used – reserved Not used – reserved VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289856EA 59/85 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2011-07-06...
  • Page 60 10 = maintenance open 11 = maintenance close 12 = power failure 13 = safety 14 = fatal error VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289856EA 60/85 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2011-07-06...
  • Page 61 1 = At least one WARNING of the warning bitmaps is active (GENERAL WARNING bitmap and EXTENDED WARNING bitmap) 10-15 NOT USED (reserved) VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289856EA 61/85 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 62 AD-converter of Sensor input 1 and/or 2 (optional, only in case of 2 sensor version) on the master MEASUREMENT UNIT board is faulty. FAULTY NOT USED (reserved) 11-15 VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289856EA 62/85 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2011-07-06...
  • Page 63 PROCESS DATA SETTING(S) NOT VALID (DATA TYPE or RANGE of pressure and position signals) 13-15 NOT USED (reserved) VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289856EA 63/85 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2011-07-06...

  • Page 64: Communication And Timing Control Between Master (Plc) And Station (Valve)

    = Valve CC-Link buffer Ping PongTx-bit Ping Pong Rx-bit Microcontroller Ping Pong Rx = Ping Pong Tx inverted VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289856EA 64/85 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2011-07-06...

  • Page 65: Pressure And Sensor Reading Allocation

    Above picture shows a 2 sensor system. In this configuration sensor 2 covers low range (100 mTorr) and sensor 1 covers high range (1 Torr). Switchover between sensors is done automatically according to «Pressure control operation with 2 sensors». VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289856EA 65/85 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 66: Trouble Shooting

    1) Priority of pin 14 is higher than pin 13. If pin 14 is connected to ground after pin 13 the valve will close. Ground of service connector is at pin 4 and 8. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289856EA 66/85 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 67 >3% and < 98% of sensor full scale). - Noise on sensor signal? - Make sure a shielded sensor cable is used. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289856EA 67/85 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 68: Additional Cc-Link Warning

    (warning 8) If you need any further information, please contact one of our service centers. You can find the addresses on our website: http://www.vat.ch VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289856EA 68/85 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 69: Maintenance & Repairs

    Contamination from the process may influence the function and requires more frequent maintenance. Before carrying out any maintenance or repairs, please contact VAT. It has to be individually decided whether the maintenance/repair can be performed by the customer or has to be carried out by VAT. The fabrication number on the valve made in Switzerland Fabrication No.:...

  • Page 70: Maintenance Procedures

    A critical factor influencing the maintenance period is the lifetime of the vacuum grease, being limited under increased temperature. In this case grease will separate to PTFE and oil. The oil may flow and contaminate the valve parts. VAT can give the following recommendations for preventive maintenance: unheated *) heated > 80°C *) heated 80°C *)
  • Page 71 Max. difference should be less than 1 turn or 0.5 turn of the screws. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289856EA 71/85 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 72 14. Deposit 0.0375 ml vacuum grease between the o-rings 15. Clean shaft from vacuum grease. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289856EA 72/85 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2011-07-06...
  • Page 73 (steps 7 to 6). 17. Align pedestal parallel to valve body and tighten the 2 mounting screws with 2 Nm. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289856EA 73/85 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 74 Allen Wrench 22. Tighten clamp coupling with 1.1 Nm. 23. Reinstall valve into vacuum system according to chapter «Installation». VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289856EA 74/85 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 75: Option Board

    Ambient temperature [°C] Note: This graph shows estimated life of UltraCap PFO for reference and not as guaranteed value. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289856EA 75/85 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 76: Retrofit / Replacement Procedure

    Note: All boards have a fixed position into control and actuating unit. It is not possible to fit a board in other position as shown in picture above. Do not try out other positions, that may be destroy the socket of boards! VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289856EA 76/85 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 77 Loosen and remove the LOGIC connector screw Open end wrench 10mm Disconnect fan cable from motor driver board VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289856EA 77/85 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 78 (see step 2) 12. Tighten panel screws with 1.1 Nm Pozidriv screw driver (see step 1) size 1 VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289856EA 78/85 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2011-07-06...

  • Page 79: Drawing

    Installation, Operating & Maintenance Instructions Series 612 DN 63-250 (I.D. 2.5“ - 10”), CC-Link Drawing Example picture VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289856EA 79/85 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2011-07-06...

  • Page 80: Spare Parts

    Option board with PFO module 378002 (power failure option) Option board 376837 with SPS and PFO module *) Too many to list. Depends on configuration, please contact VAT. Seals and grease Item Description Valve size All sizes Product ordering number 612 .

  • Page 81: Iso-F Valve Unit - Aluminum Blank, Without Heating

    JIS, ASA or CF-F flanges spare part ordering numbers are available on request. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289856EA 81/85 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 82: Accessories

    Special Allen wrench (SW3) 257820 Allen wrench (SW2) Feeler gauges: 0.04, 0.06 and 0.08mm each 6 pcs. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289856EA 82/85 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2011-07-06...

  • Page 83: Centering Ring With Viton O-Ring

    61248 - ..Aluminum 32048-QAZV Centering ring with Viton o-ring (for ISO-F installation only) Stainless steel 32048-QEZV VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289856EA 83/85 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2011-07-06...

  • Page 84: Warranty

    (including any delay in or failure to deliver), packaging, storage or use of any product sold or delivered by VAT shall fail to conform to the foregoing warranty or to the...
  • Page 85 Installation, Operating & Maintenance Instructions Series 612 DN 63-250 (I.D. 2.5“ - 10”), CC-Link VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289856EA 85/85 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2011-07-06...

This manual is also suitable for:

612 gl series612 gn series612 al series612 an series612 hl series612 hn series ... Show all

Table of Contents