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VAT 613 Series Installation, Operating, & Maintenance Instructions

Butterfly pressure control valve with ethercat interface dn 25-320 mm (i.d. 1" - 12")
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Installation, Operating &
Maintenance Instructions
Butterfly Pressure Control Valve
with EtherCAT interface
Series 613
DN 25-320 mm (I.D. 1" - 12")
This manual is valid for the valve ordering number(s):
613 . . - . .GX - . . . .
613 . . - . .AX - . . . .
613 . . - . .HX - . . . .
613 . . - . .CX - . . . .
SPS = Sensor Power Supply
configured with firmware : F01.0C.28.xx
Sample picture
951672EE.DOCX
(2 sensor inputs)
(2 sensor inputs / ±15V SPS)
(2 sensor inputs / PFO)
(2 sensor inputs / ±15V SPS / PFO)
PFO = Power Failure Option
Edition 2022-08-18

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Summary of Contents for VAT 613 Series

  • Page 1 Installation, Operating & Maintenance Instructions Butterfly Pressure Control Valve with EtherCAT interface Series 613 DN 25-320 mm (I.D. 1“ - 12") This manual is valid for the valve ordering number(s): 613 . . - . .GX - ..(2 sensor inputs) (2 sensor inputs / ±15V SPS) 613 .
  • Page 2 The VAT firmware may not be used for purposes other than those intended nor is it permitted to make copies of the VAT firmware. In particular, it is strictly forbidden to give copies of the VAT firmware to other people.
  • Page 3 Series 613 Contents Description of product ................ 6 Identification of product ....................6 Firmware ......................... 6 Use of product ......................... 6 Used abbreviations ......................6 Related documents......................6 Important information....................... 6 Technical data ......................... 7 Control and actuating unit ................. 7 Valve unit ......................
  • Page 4 Series 613 Homing ......................37 Cycle Counter....................38 Position Restriction ..................38 Position Adaption .................... 39 4.12 Interface EtherCAT ......................40 Connection ...................... 40 Device identification, Rotary switches ............. 41 LEDs ....................... 42 Connection Loss Reaction ................43 Position and Pressure Units ................44 ESI File ......................
  • Page 5 Series 613 Repairs ..................... 129 FPR Service ........................ 129 Dismounting and Storage ............... 130 Dismounting ........................ 130 Storage ........................131 Packaging and Transport ............... 132 10.1 Packaging ........................133 10.2 Transport ........................133 Disposal ................... 134 Spare parts ..................135 12.1 ISO-KF for DN 25 –...
  • Page 6 Use of product This product is a Butterfly control valve for downstream pressure control in vacuum systems. Use product for clean and dry vacuum applications only. Other applications are only allowed with the written permission of VAT. Used abbreviations Abbreviation...
  • Page 7 Series 613 DESCRIPTION OF PRODUCT Technical data Control and actuating unit See product data sheet. Valve unit See product data sheet. 951672EE.DOCX Edition 2022-08-18 7/141...
  • Page 8 SAFETY Series 613 Safety Compulsory reading material Read this chapter prior to performing any work with or on the product. It contains important information that is significant for your own personal safety. This chapter must have been read and understood by all persons who perform any kind of work with or on the product during any stage of its serviceable life.
  • Page 9 Series 613 SAFETY Personnel qualifications WARNING Unqualified personnel Inappropriate handling may cause serious injury or property damage. Only qualified personnel is allowed to carry out the described work. Safety labels Label Part No. Location on valve On protective foil covering of T-9001-156 valve opening 951672EE.DOCX...
  • Page 10 DESIGN AND FUNCTION Series 613 Design and Function Design Rotary feedthrough with double seal Integrated controller Double seal Coupling Plate Bearing Valve body Function The valve plate (5) acts as a throttling element and varies the conductance of the valve opening. The integrated controller (1) calculates the required plate position to achieve the setpoint pressure.
  • Page 11 Series 613 DESIGN AND FUNCTION Pressure control system overview and function Vacuum pressures are always absolute pressures unless explicitly specified as pressure differences. Valve Process chamber Gas inlet Pressure sensor(s) Sensor cable Controller and actuator Seff Cable to remote control unit Cable to power supply HV Pump Q / p...
  • Page 12 DESIGN AND FUNCTION Series 613 3.2.1.1 Way of operation The controller compares the actual pressure in the process chamber given by the pressure sensor with the preset pressure. The controller uses the difference between actual and set pressure to calculate the correct position of the control valve. The controller drives the control valve into the correct position and the actual pressure again equals the set pressure.
  • Page 13 Series 613 INSTALLATION Installation WARNING Unqualified personnel Inappropriate handling may cause serious injury or property damage. Only qualified personnel are allowed to carry out the described work. Initial procedure 951672EE.DOCX Edition 2022-08-18 13/141...
  • Page 14 Make sure that the supplied products are in accordance with your order. • Inspect the quality of the supplied products visually. If it does not meet your requirements, please contact VAT immediately. • Store the original packaging material. It may be useful if products must be returned to VAT.
  • Page 15 Series 613 INSTALLATION Installation into the system WARNING Valve opening Risk of serious injury. Human body parts must be kept out of the valve opening and away from moving parts. Do not connect the controller to power before the valve is installed complete into the system.
  • Page 16 INSTALLATION Series 613 Installation Hints Install valve into the vacuum system. Valve seat side shall face process chamber. • Do not tighten the flange screws stronger than indicated under chapter «Tightening torque». • Do not admit higher forces to the valve than indicated under chapter «Admissible forces».
  • Page 17 Series 613 INSTALLATION Admissible forces NOTICE Force at valve body Forces from the weight of other components can lead to deformation of the valve body and to malfunction of the valve. Do not higher force the valve body as specified. The following forces are admissible.
  • Page 18 INSTALLATION Series 613 Admissible forces at controller NOTICE Force at pedestal In case higher force is applied, the pedestal could be permanently damaged. – Do not pushing, shocking load, or stressing the valve controller – Do not deposit anything at valve controller The admissible force at valve controller in regards to the pedestal is shown in table below Overview...
  • Page 19 Series 613 INSTALLATION Tightening torque DNs 40 – 50mm Tightening torques for ISO-KF flange connections depend on the type of seal which is used. Follow recommendations of seal manufacturer. 4.3.5.1 ISO-KF Clamping connections Clamping chain (example) ISO-KF ISO-KF recommended recommended Valve size tightening torque tightening torque...
  • Page 20 INSTALLATION Series 613 Tightening torque DNs 63 – 100mm Tighten mounting screws of the flanges uniformly in crosswise order. Observe the maximum torque levels in the following table. Higher tightening torques deforms the valve body and may lead to malfunction of the valve. 4.3.6.1 Mounting of CF-F flanges Tightening torques for CF-F flange connections depend on the type of seal which is used.
  • Page 21 Series 613 INSTALLATION Connection overview Controller IC2-H3: Ground (FE) connection System: Valve Process chamber Gas inlet Pressure sensor(s) Sensor cable(s) Controller and actuator Cable to remote control unit Cable to power supply Pump 951672EE.DOCX Edition 2022-08-18 21/141...
  • Page 22 Do not plug or unplug connectors under power. Connection cable recommendations For Power Supply connection cables, VAT recommends: Class (min.) (Length max.) (diameter) AWG18 (shielded) 0.823 mm For Sensor & Signal connection cables, VAT recommends: Class (min.) (Length max.) (diameter) AWG22 (shielded) 20 m 0.326 mm 22/141 Edition 11.08.2022...
  • Page 23 Series 613 INSTALLATION Ground connection Recommendation for ground connection between controller and system chassis with cable or with ground strap. Recommended torque: 1,3…1,7Nm Chassis (FE) (Functional Earth) Controller bottom side, (sample picture) • Recommendation for ground connection cable: AWG 12 (4 mm •...
  • Page 24 INSTALLATION Series 613 Power and Sensor supply concepts This valve offers 3 alternative concepts to supply the sensor(s) with power. This depends on the sensor type and valve version that is used. Concepts: 24 VDC sensors: • External +24 VDC supplied to POWER connector is feedthrough to SENSOR connector. Refer to chapter «Power and sensor connection (+24 VDC sensors) ».
  • Page 25 Low range sensor may be con- nected to sensor 1 or sensor 2 input. Do configuration accordingly • VAT fuse recommendation: (a) 3 AF • Use shielded sensor cable(s). Keep cable as short as possible, but locate it away from noise sources.
  • Page 26 Low range sensor may be connected to sensor 1 or sensor 2 input. Do configuration accordingly. • VAT fuse recommendation: (a) 3 AF • Use shielded sensor cable(s). Keep cable as short as possible, but locate it away from noise sources. •...
  • Page 27 Low range sensor may be connected to sensor 1 or sensor 2 input. Do configuration accordingly. • VAT fuse recommendation: (a) 3 AF • Use shielded sensor cable(s). Keep cable as short as possible, but locate it away from noise sources. •...
  • Page 28 INSTALLATION Series 613 Drive Power Enabled Switch, Safety Mode • By means of an external switch the motor power supply can be interrupted. • In this case the valve enters the ‘safety mode’. • This motor interlock prevents the valve from moving (e.g. maintenance work). •...
  • Page 29 Series 613 INSTALLATION Power Up After power up or possibly after a reset of the valve homing is necessary to determine the plate position. Refer to chapter Homing «4.11.2 » Power Down, Power Failure Option Power down behavior in case of power failure Valve position before power failure: Reaction of valve: Closed (isolated)
  • Page 30 INSTALLATION Series 613 Service Port, CPA software The ‘Service port is designed for ‘Local operation’ with the software CPA - Control Performance Analyzer. Note: Detailed help on the CPA is available in the help of the CPA itself. How to start 1.
  • Page 31 This may result in an immediate movement of the valve depending on remote control. Update It is easy to update to the latest version of the CPA which can be found on the VAT homepage: https://www.vatvalve.com/downloads/software 951672EE.DOCX...
  • Page 32 INSTALLATION Series 613 Display Information There is a 4 digit display located on the controller. It displays configuration, status and position information. For details refer to following tables. Power up Description Digit 1 Digit 2 Digit 3 Digit 4 ● 1 Power On: All dots are illuminated ●...
  • Page 33 Series 613 INSTALLATION Operation Description / Mode Digit 1 Digit 2 Digit 3 Digit 4 INIT (start up) INIT (start up, leak tight) CLOSE OPEN C, 0…100 PRESSURE control valve position = closed, leak tight POSITION control = minimal conductance = maximum opened INTERLOCK Valve closed or open by digital input...
  • Page 34 4.10.1.2 Configuration Location: CPA/Parameters: System.Identifiaction.Configuration Parameter Description Valve Series 3-digit value representing the VAT valve series Valve Variant For some vale there exists different variants Nominal Diameter DN in mm. E.g DN250 Drive Parameter ID ID of the last drive file loaded on the valve.
  • Page 35 Series 613 INSTALLATION 4.10.1.4 Hardware Location: CPA/Parameters: System.Identification.Hardware Parameter Description Controller Type Identification of the use controller IC2H1, IC2H2, IC2H3 … Interface Type RS232/RS485 EtherCAT DeviceNet Logic Profibus CCLink EtherNet Option Type none Cluster SPS & PFO SPS & Cluster PFO &...
  • Page 36 INSTALLATION Series 613 Warning/Error Location: CPA/Parameters: System.Warning/Error Parameter Description Warning Bitmap Description No Learn Data Isolation valve does not work No Sensor Active PFO Not Ready Cluster Slave Offline Fieldbus Data Not Valid Compressed Air Not Falling when valve close Compressed Air Too Low 1024 Compressed Air Too High...
  • Page 37 Series 613 INSTALLATION 4.11 Valve Settings and States States Location: CPA/Navigation/Parameters: Valve Parameter Description Actual Position Show position of the valve plate Position State Intermediate Closed Open Isolation State Not Isolated Isolated Homing After power up or possibly after a reset of the valve homing is necessary to determine the plate position.
  • Page 38 INSTALLATION Series 613 Cycle Counter 4.11.3.1 Control Cycle A control cycle is a complete movement of the valve, from closing to opening and back to closing, or in percentage of movement it is 200%. Each movement is added up until 200% of the movement is reached, and then the cycle counter is incremented by 1.
  • Page 39 Series 613 INSTALLATION Position Adaption 4.11.5.1 Usage Chamber Matching Adjustment of the conductance curve of different valves to obtain the same position at the same process points in different systems. Cluster Balance Adjusting the Position of individual valves in a valve cluster can be used to compensate certain Side- effects, e.g.
  • Page 40 Neither valve display information nor CONTROL MODE values or any other fieldbus cyclic/acyclic data are related to any fieldbus states/notation Connection The EtherCAT interface is galvanic isolated from control unit. 4.12.1.1 Installation (example) Slave X Master (Slave X) VAT Valve optional RJ45 RJ45 RJ45 RJ45 Cable Cable...
  • Page 41 Series 613 INSTALLATION Device identification, Rotary switches Three hexadecimal rotary switches set the Device Identification value (ID). That means the supported address range is 0-0xFFF in hexadecimal or 0-4095 in decimal. The Device Identification value is read once after power on. Example: 5 951672EE.DOCX Edition 2022-08-18...
  • Page 42 INSTALLATION Series 613 LEDs RUN LED Error LED EtherCAT (port 1) IN EtherCAT (port 2) OUT Link/Activity (port 1) IN Link/Activity (port 2) OUT The flash sequences for these LEDs are defined in DR303-3 (CiA) 4.12.3.1 Run LED (1) This LED reflects the status of the CoE (CANopen over EtherCAT) communication. LED State Indication Description...
  • Page 43 Series 613 INSTALLATION Connection Loss Reaction Connection Loss reaction defines what the valve is doing in case the EtherCAT connection get lost. Location: CPA/Navigation/Parameters: Interface EtherCAT.Connection Loss Reaction Parameter Description Enable ‘True’ enables the connection loss reaction, in case of ‘False’ there is no reaction on a connection loss State Current connection loss state:...
  • Page 44 INSTALLATION Series 613 Position and Pressure Units Location: CPA/Navigation/Parameters: Interface EtherCAT.Scaling Parameter Description Position Position Unit 1,10,90, 100,1000,10000, user specific Used for all position Value Closest Position Used if Position Unit is user specific values Value Open Position Pressure Pressure Unit Pa, kPa, bar, mbar, Torr, mTorr, psi, user specific Used for all pressure Value Pressure 0...
  • Page 45 ESI files can be downloaded from www.vatvalve.com/downloads Select the ‘Software & Updates’ tab and enter ‘ESI’ in the search field. All available ESI files will be listed. If the appropriate ESI file is not available, please contact VAT: www.vatvalve.com/contact Communication failure...
  • Page 46 INSTALLATION Series 613 PDO Process data objects – cyclic communication 4.12.8.1 RxPDO Output mappings The EtherCAT process data mapping is done automatically corresponding to the following list and respectively to the sync manager information. Mapping object Mapping content Name Byte Range Description 0x1600...
  • Page 47 Series 613 INSTALLATION GENERAL CONTROL SETPOINT bitmap table: Description ZERO ADJUST Starts the zeroing of the sensors NOT USED (reserved) Handshake mechanism PING PONG TX BIT Valve sends the inverted value of this bit in INPUT BUFFER  GENERAL STATUS  PING PONG RX BIT NOT USED (reserved) Defines which interface, remote (EtherCAT) or service (CPA), can control the valve.
  • Page 48 INSTALLATION Series 613 4.12.8.2 TxPDO Input mappings The EtherCAT process data mapping is done automatically corresponding to the following list and respectively to the sync manager information. Mapping Mapping Name Byte Range Description object content Value in mBar 0x1A00 SINT32 Actual Pressure ACTUAL PRESSURE adjustable...
  • Page 49 Series 613 INSTALLATION GENERAL STATUS bitmap table: Description 0 = Valve is not in the EtherCAT state OPERATIONAL or the process data output watchdog. (SyncManager2) is disabled FIELDBUS DATA VALID 1 = Valve is in the EtherCAT state OPERATIONAL and the process data output watchdog (SyncManager2) is enabled ZERO ADJUST EXECUTED ZERO ADJUST successful executed, active for 2 seconds...
  • Page 50 INSTALLATION Series 613 EXTENDED WARNING bitmap table: Description Remote control not possible, access mode local is active, change to access mode remote or access REMOTE CONTROL NOT POSSIBLE mode locked Not possible to switch the actual control mode to CONTROL MODE SETPOINT •...
  • Page 51 Series 613 INSTALLATION 4.12.8.3 Ping Pong With the Ping-pong mechanism the master can verify that the slave has read the PDO buffer content sent by the master. Principle: Master sets the Ping-pong bit in the object “General Control Setpoint”. When the slave receives the value of “General Control Setpoint”, the slave will invert this Ping-pong bit and put it into Ping-pong of “General Status”...
  • Page 52 INSTALLATION Series 613 SDO Service data objects – acyclic communication VAT uses for acyclic parameter data handling a standard EtherCAT mailbox transfer. The mailbox protocol is CoE (CANopen over EtherCAT), compliant to DS301 (CiA Draft Standard 301 v4.02). 4.12.9.1 List of abbreviations:...
  • Page 53 Series 613 INSTALLATION Index SI Name Data Type Unit Description 16FF RxPDO Mapping Outputs User UINT8 User mapping 1A00 TxPDO Mapping Inputs Integer 1 UINT8 See ESI file for content 1A01 TxPDO Mapping Inputs Float 1 UINT8 See ESI file for content 1A02 TxPDO Mapping Inputs Integer 2 UINT8...
  • Page 54 INSTALLATION Series 613 4.12.9.3 Manufacturer specific object entries Index SI Name Data Type Acc Mapping NV Unit Description 2002 Control Mode SINT8 TX/RX 0:Init 5:Pressure Control 12:Power Failure 1:Homing 6:Hold 13:Safety 2:Position 7:Learn 14:Error 3:Close 8:Interlock Open 4:Open 9:Interlock Close 200B Access Mode SINT8...
  • Page 55 Series 613 INSTALLATION Index SI Name Data Type Acc Mapping NV Unit Description 2020 Statistics 1 Start Up Counter UINT32 2 Total Time Powered UINT32 Stored every 15 minutes 3 Time Since Power On UINT32 2030 Warning/Error 1 Warning Bitmap UINT32 Description No Learn Data...
  • Page 56 INSTALLATION Series 613 Index SI Name Data Type Acc Mapping NV Unit Description 1 Start Condition UINT8 0: Standard Do homing after restart if valve is not in isolated state 1: Open Command, Do homing on an open command 2: Move Command, Do homing on any move command 3: At Startup, Do homing after restart 4: Homing Command, Do homing on homing command 5: Move Command Without Close...
  • Page 57 Series 613 INSTALLATION Index SI Name Data Type Acc Mapping NV Unit Description 2 Plate Position Isolated FLOAT pos* 0.0* 100.0* 25.0* Only active if Follow Valve is true. Valve position when the Control Mode is set to close. To avoid a hollow space between valve and external isolation valve.
  • Page 58 INSTALLATION Series 613 Index SI Name Data Type Acc Mapping NV Unit Description 2310 Pressure Controller Selector UINT8 TX/RX NV Active Controller in Control Mode = Pressure 1:Controller 1 2:Controller 2 3:Controller 3 4:Controller 4 2311 Pressure Controller 1 2312 Pressure Controller 2 Pressure Controller 3 2313...
  • Page 59 Series 613 INSTALLATION Index SI Name Data Type Acc Mapping NV Unit Description 14 P-Gain Limit FLOAT TX/RX NV 1000 Used for Control Algorithm Adaptive (advanced optimization) 15 Flow Factor Filter Time FLOAT TX/RX NV Used for Control Algorithm Adaptive (advanced optimization) 16 Flow Factor Filter Order UINT8 TX/RX NV...
  • Page 60 INSTALLATION Series 613 Index SI Name Data Type Acc Mapping NV Unit Description 2 Threshold Mode UINT8 TX/RX NV Defines which pressure the threshold refers to 0: Actual Pressure 1: Target Pressure Used 3 Ramp Type UINT8 TX/RX NV 0: Linear 1: Logarithmic 2: Exponential 4 Actual Slope...
  • Page 61 Series 613 INSTALLATION Index SI Name Data Type Acc Mapping NV Unit Description 2350 Adaptive Learn 2 Type SINT8 0:Standard 3 Bank Selection SINT8 Select a learn bank to safe the data for the following learn procedure 0:Bank 1 1:Bank 2 2:Bank 3 3:Bank 4 4 Pressure Limit [SFS]...
  • Page 62 INSTALLATION Series 613 Index SI Name Data Type Acc Mapping NV Unit Description Sub Index 1 UINT32 To copy learn data copy this content to another bank (or valve) ⁞ ⁞ Sub Index 124 2362 Learn Bank 1 Position Table ARRAY 2372 Learn Bank 2 Position Table...
  • Page 63 Series 613 INSTALLATION Index SI Name Data Type Acc Mapping NV Unit Description 0:Linear 8 Scale SINT8 1:Logarithmic (not supported yet) 9 Voltage Per Decade FLOAT volt A Zero Adjust Enable BOOL B Zero Adjust Offset Value [SFS] FLOAT Value 1.0 means sensor full scale. For example for a 0-10 Volt gauge the value 0.1 means 1 Volt F Filter Enable BOOL...
  • Page 64 INSTALLATION Series 613 Index SI Name Data Type Acc Mapping NV Unit Description 2 Address UINT16 4095 Defined by the address switches on the valve controller 3 Connection Loss Reaction BOOL Enable 4 Connection Loss Reaction SINT8 0:Open Functionality 1:Close 64/141 Edition 11.08.2022 951672EE...
  • Page 65 Series 613 INSTALLATION Index SI Name Data Type Acc Mapping NV Unit Description 2610 Scaling 0: 0 - 1 1 Position Unit SINT16 1: 0 - 10 2: 0 - 90 3: 0 - 100 4: 0 - 1000 5: 0 - 10000 6: 0 - 100000 7: User specific User specific (Range is defined by Value Closest Position and Value Open Position)
  • Page 66 INSTALLATION Series 613 Index SI Name Data Type Acc Mapping NV Unit Description D Digital Sensor 2 Input Pressure SINT16 0: Pa Unit 1: kPa 2: Bar 3: mBar 4: Torr 5: mTorr 6: psi 7: User specific Range is defined by Value Pressure 0 and Value Pressure Sensor Full Scale E Value Sensor 2 Lower Limit FLOAT Only used if Pressure Unit is set to User specific.
  • Page 67 Series 613 INSTALLATION Index SI Name Data Type Acc Mapping NV Unit Description 2F00 VAT Profile Objects 1 Target Pressure SINT32 TX/RX mbar* 2 Target Position SINT32 TX/RX pos* 0.0* 100.0* 3 Pressure Input Digital Sensor 1 SINT32 TX/RX mbar*...
  • Page 68 INSTALLATION Series 613 Scaling: Position: Use object Scaling 2610h (SI 01h, 02h and 03h) to adjust the value range of all position objects Note: In case of an isolation functionality is available the minimum position does not mean the isolation state Pressure: Use object Scaling 2610h (SI 05h, 06h and 07h) to adjust the value range of all pressure objects Digital Pressure Sensor 1:...
  • Page 69 Series 613 INSTALLATION 4.12.9.4 Manufacturer specific IC compatible object entries Index SI Name Data Type Acc Mapping NV Unit Def Description Sensor operation mode 0:no sensor 20E6 UINT8 1:sensor 1 3:sensor 2 2:sensor 1 high, sensor 2 low, Crossover Mode Soft Switch 4:sensor 2 high, sensor 1 low, Crossover Mode Soft Switch 7:sensor 1 high, sensor 2 low, Crossover Mode Target Pressure 8:sensor 2 high, sensor 1 low, Crossover Mode Target Pressure...
  • Page 70 INSTALLATION Series 613 4.13 Pressure Sensor Mechanical connection requirements Fast and accurate pressure control requires a fast sensor response. Sensor response time: < 50ms. The sensor is usually connected to the chamber by a pipe. The line must be short enough and the conductance must not be reduced by a too small line diameter or a low conductance shut-off valve, To maintain that the response time is not degraded by this connection it needs to meet the following requirements:...
  • Page 71 Series 613 INSTALLATION Configuration The CPA window shows a good overview of the sensor settings: The valve supports 2 sensors. Zero Adjust is for offset compensation of linear sensors Crossover is automatic switch over between 2 linear sensors 951672EE Edition 11.08.2022 71/141...
  • Page 72 INSTALLATION Series 613 Location: CPA/Navigation/Parameters: Pressure Sensor.Sensor 1, Pressure Sensor.Sensor 2 Parameter Description Available Set to ‘True’ if a sensor is connected Enable Set to ‘True’ if the sensor signal is used for pressure control Input Source ‘Analog’ Sensor has an analog voltage interface and is direct connected to the valve.
  • Page 73 Series 613 INSTALLATION Crossover (2 sensor operation mode) If two sensors are connected to the controller uses both for pressure control and pressure feedback. The controller selects each sensor or blends both sensor signals to the “Actual Pressure” used for control and feedback.
  • Page 74 INSTALLATION Series 613 Zero Adjust Zero Adjust allows for the compensation of the sensor offset voltage. Note: A maximum offset voltage of +/- 1.4 V can be compensated. Location: CPA/Navigation/Parameters: Pressure Sensor.Zero Adjust Parameter Description Zero Adjust.Sensor Selection Select the sensor for the zero adjust: •...
  • Page 75 Series 613 INSTALLATION Logarithmic Pressure To control wide pressure ranges, it is advantageous to control with a logarithmic signal. Note: Only the PI and the Softpump controller can control with a logarithmic signal. Adaptive controller needs a linear signal. Location: CPA/Parameters: Pressure Sensor.General Settings.Logarithmic Pressure Parameter Description Upper Limit Value...
  • Page 76 INSTALLATION Series 613 4.14 Power Connector Digital IO Do not connect other pins than indicated in the schematics! Use only screws with 4-40UNC thread for fastening the DA-15 connector! Digital Input 4.14.1.1 Connection Default Function Interlock Open INPUT 1 INPUT 2 Interlock Close COMMON 4.14.1.2...
  • Page 77 Series 613 INSTALLATION Digital Output 4.14.2.1 Connection Default Function Open OUTPUT 1 OUTPUT 2 Closed COMMON 4.14.2.2 Parameter, Configuration Location: CPA/Navigation/Parameters: Power Connector IO.Digital Output Parameter Description Enable 1 enables the output State 0 Not active 1 Active Functionality 0 OPEN valve is fully open 1 CLOSE valve is fully closed (isolated if valve has an isolation function)
  • Page 78 OPERATION Series 613 Operation WARNING Unqualified personnel Inappropriate handling may cause serious injury or property damage. Only qualified personnel are allowed to carry out the described work. WARNING Valve opening Risk of serious injury. Human body parts must be kept out of the valve opening and away from moving parts. Do not connect the controller to power before the valve is installed complete into the system.
  • Page 79 Series 613 OPERATION Access Mode Overview Defines whether the interface or the CPA via the service port has the rights to control the valve Location: CPA/Parameters System Access Mode Control Permission Comment Local Remote INTERFACE Master CPA can switch to Local Locked INTERFACE Master CPA can’t switch to Local...
  • Page 80 OPERATION Series 613 Control Mode The Control Mode represents the state machine of the valve. Writing to Control Mode requests a change in the state while reading Control Mode returns the actual state of the state machine. Init State after power up. Remains if Homing is not started or no Exception occurs Homing The valve performs the homing procedure to initialize the position.
  • Page 81 Series 613 OPERATION CPA/Parameter: System.Control Mode Location: View First digit on display Init Homing Close Open Pressure Control Position Interlock Open or Close Hold Learn Safety Mode Power Failure Error 951672EE Edition 11.08.2022 81/141...
  • Page 82 OPERATION Series 613 Pressure Control Controller units The valve has four identical pressure controller units. Controller Selector defines which unit is used for the pressure control. Controller Selector Controller 1 Controller 2 Controller 3 Controller 4 Most applications do not need more than one controller unit. But if the result of the pressure control does not meet the expectations, different controller units can be an option for optimization: With the four controller units it is possible to use a certain controller unit for a specific pressure set point.
  • Page 83 Series 613 OPERATION Control algorithm 5.3.2.1 Overview Adaptive This is the most dynamic control algorithm. Before using adaptive control algorithm, a special procedure called “learn” must be executed first (see chapter below). The valve will observe the behavior of the vacuum system by moving the valve to different positions. During the learn procedure the valve performs an internal parameter estimation correspondent to the vacuum system.
  • Page 84 OPERATION Series 613 5.3.2.2 Choose correct control algorithm Constant gas flow available Constant gas flow System Configuration not available Tv*<= 500 sec Tv* > 500 sec Downstream Process chamber Adaptive Control valve Pump Upstream Control valve Process chamber Pump Soft Pump Soft Pump * Use the formula below to define the applicable pressure control algorithm.
  • Page 85 Series 613 OPERATION Adaptive algorithm This control algorithm may be used for downstream pressure control. Before using adaptive control algorithm, a special procedure called “learn” must be executed first (see chapter below). 5.3.3.1 Control Parameter Location: CPA/Navigation/Parameters: Pressure Control.Controller x.Control Settings Parameter Description Gain Factor...
  • Page 86 OPERATION Series 613 5.3.3.2 Learn LEARN adapts the PID controller of the valve to the vacuum system and its operating conditions. LEARN must be executed only once during system setup. The LEARN routine determines the characteristic of the vacuum system. Based on this, the PID controller is able to run fast and accurate pressure control cycles.
  • Page 87 Series 613 OPERATION Parameters Executing Location: CPA/Navigation/Parameters: Pressure Control.Adaptive Learn Parameter Description Start Learn Starts the learn Type Standard A positioning sequence is executed and various measured values are recorded in the process. Short Opens the valve and measures the pumping speed. Information about flow and volume is required.
  • Page 88 OPERATION Series 613 Parameters Learn Bank Location: CPA/Navigation/Parameters: Pressure Control.Adaptive Learn.Learn Bank x Parameter Description Status Not Used Empty learn bank Available Data available. Evaluation possible with the pressure position curve in the CPA/Navigation/Adaptive Learn Data Available with The data may still be suitable for pressure control. warnings Evaluation possible with the pressure position curve in the CPA/Navigation/Adaptive Learn Datas...
  • Page 89 Series 613 OPERATION Execute a learn procedure Set specific gas flow according to calculation below or the calculation in the CPA  ‘Adaptive Learn’ window: Learn does not need to be performed with the process gas. Instead N or Ar may be used. Set parameter Bank Selection, if only one learn is used take Bank 1.
  • Page 90 OPERATION Series 613 Gasflow calculation for Learn Do not apply a different gasflow for learn than determined below. Otherwise pressure control performance may be insufficient. Required pressure / flow regime must be known to calculate the most suitable learn gas flow for a specific application.
  • Page 91 Series 613 OPERATION Evaluation and exchange of learn data Location: CPA/Navigation/Adaptive Learn Data The window shows the pressure position curve of the stored data in the learning banks With the menu buttons it is possible to exchange data between learn banks and between valves. 951672EE Edition 11.08.2022 91/141...
  • Page 92 OPERATION Series 613 5.3.3.3 Tuning Normally the default settings will result in good pressure control performance. For some applications tuning may be required to improve performance. The tuning procedures for each parameter (grey boxes) and its default values are described separately below. Strictly keep the procedure order. 92/141 Edition 11.08.2022 951672EE...
  • Page 93 Series 613 OPERATION Gain Factor adjustment The Gain Factor effects: Stability, Response time Adjustment range is from 0.0001 to 100.0 - Higher gain results in: faster response, higher over- undershoot of pressure - Lower gain results in: slower response, lower over- undershoot of pressure Adjustment procedure: 1.
  • Page 94 OPERATION Series 613 Setpoint Ramp adjustment Setpoint Ramp effects: Undershoot of pressure, Response time Note: The ramp is described in detail in capital Pressure Ramp. This parameter defines the time that is used to decrease / raise pressure between 2 setpoints. Especially in pressure decrease situations at low flows pressure response can be improved much by adapting setpoint ramp time.
  • Page 95 Pressure / flow / gas conditions to be controlled • Chamber volume • Pumping speed (l/s) and pump type (e.g. turbo pump) • System description • Problem description Send diagnostic file with and all required information to tuning-support@vat.ch 951672EE Edition 11.08.2022 95/141...
  • Page 96 OPERATION Series 613 PI algorithm This control algorithm may be used for downstream or upstream pressure control depending on configuration. 5.3.4.1 Control Parameter Location: CPA/Navigation/Parameters: Pressure Control.Controller x,Control Settings Parameter Description P-Gain The P-Gain is the proportional factor of the fixed control algorithm. A higher P-Gain results in faster response, higher over- / undershoot of pressure.
  • Page 97 Series 613 OPERATION 5.3.4.2 Tuning The PI parameters of the pressure controller require correct adjustment. These parameters must be set once during system setup and are stored in the device memory which is power fail save. Based on the PI controller configuration, the valve is able to run fast and accurate pressure control cycles. The PI parameters can be evaluated using below instruction.
  • Page 98 OPERATION Series 613 Optimizing P-Gain While optimizing P-Gain, the gas flow determined above has to be constant all the time. Start optimization with P-Gain set to 1.0 and I-Gain set to 0.0. Set chamber pressure to SP2, wait until the pressure is stable. Set pressure to SP1. If the transition from SP2 to SP1 results in a significant pressure over shoot or even does not stabilize at all, the P- Gain is too high.
  • Page 99 Pressure / flow / gas conditions to be controlled • Chamber volume • Pumping speed (l/s) and pump type (e.g. turbo pump) • System description • Problem description Send diagnostic file with and all required information to tuning-support@vat.ch 951672EE Edition 11.08.2022 99/141...
  • Page 100 OPERATION Series 613 5.3.4.3 Soft Pump/Vent algorithm This control algorithm may be used to control pressure ramps during pump down or venting the chamber. This is a modified PI controller that has been optimized to start up very gently when the valve is opened.
  • Page 101 Pressure / flow / gas conditions to be controlled • Chamber volume • Pumping speed (l/s) and pump type (e.g. turbo pump) • System description • Problem description Send diagnostic file with and all required information to tuning-support@vat.ch 951672EE Edition 11.08.2022 101/141...
  • Page 102 OPERATION Series 613 Pressure Ramp Basically, the pressure ramp is used to limit the rate of pressure change. Actual Pressure Pressure Controller Target Pressure Target Pressure Used Pressure Used Ramp 5.3.5.1 Configuration Location: CPA/Navigation/Parameters: Pressure Control.Controller x.Ramp Parameter Description Enable Activate / Deactivate pressure target ramp Mode 0:Use Ramp Time...
  • Page 103 Series 613 OPERATION 5.3.5.2 Mode Time Slope Unit: seconds Unit: Pressure / seconds Time is constant, slope varies Slope is constant, time varies Example: 2 sec Example: 10mTorr/second 5.3.5.3 Type Linear Logarithmic Exponential 951672EE Edition 11.08.2022 103/141...
  • Page 104 OPERATION Series 613 5.3.5.4 Applications Examples Soft pump Ramp Mode = Time Ramp Time = 100 sec Ramp Type = Linear Target Pressure = 0 Minimize pressure over- or undershoots New Target Pressure without pressure ramp New Target Pressure with pressure ramp Smoothing a staircase Pressure ramp with new target pressure to the valve every second is smoothed by a 1 sec internal ramp Ramp Time = 1sec...
  • Page 105 Series 613 OPERATION Profile Ramp Profile Ramp is a Target Pressure ramp that depends on pressure ranges (segments). It is mainly used to create soft pumping or soft venting profiles. To design a profile, the segments (pressure ranges) must be defined. A segment is defined by the pressure Threshold and the Slope.
  • Page 106 OPERATION Series 613 Parameters: Location: CPA/Navigation/Parameters: Pressure Control.General Settings.Profile Ramp Parameter Description Enable Switches on/off the function Threshold Mode Defines which pressure the threshold refers to Actual Pressure Change happens if Actual Pressure reaches the Threshold Target Pressure Used Change happens if Target Pressure Used reaches the Threshold Ramp Type Defines the shape of the ramp Linear...
  • Page 107 Series 613 OPERATION Segment x This is the upper limit of the segment. The lower limit is defined by the next lower Threshold, or Threshold the lower limit is 0 if there is no lower Threshold. If the value exceeds the top threshold, the slope value of the top segment is used (Segment 1 in below example) Segment x Slope Defines the slope (mBar*/sec) in the segment...
  • Page 108 OPERATION Series 613 Automated Controller Selector With the 4 Controllers it is possible to define different pressure control settings. The Automated Controller Selector can select one of the 4 Controllers depending on Target Pressure (Mode: Threshold) or Up-Down Control (Mode: Pressure Direction) Mode:...
  • Page 109 Series 613 OPERATION Parameter: Location: CPA/Navigation/Parameters: Pressure Control.General Settings.Automated Controller Selector Parameter Description Enable Switches on/off the function Mode Threshold Pressure Direction Controller Selector Bitmap Used if Mode = Threshold Defines which controllers are automatically selected Used if Mode = Threshold Threshold Condition Lower or Equal...
  • Page 110 OPERATION Series 613 Position Control Parameter Location: CPA/Navigation/Parameters: Position Control Parameter Description Actual Position Position of the valve plate Range depends on Position Scaling setting (on Interface and CPA) Target Position Desired position of the valve plate Range depends on Position Scaling setting (on Interface and CPA) Position Control Speed Speed of the valve in Control Mode Position 0.001 ..
  • Page 111 Series 613 OPERATION 5.4.2.2 Mode Time Slope Unit: seconds Unit: %* / seconds Time is constant, slope varies Slope is constant, time varies Example: 2 sec Example: 10% / sec Target Position Target Position Valve Position Valve Position * Unit adjustable 5.4.2.3 Type Linear...
  • Page 112 TROUBLE SHOOTING Series 613 Trouble shooting Warnings A warning does not lead to an interruption of valve operation. Location: CPA/Parameters: System.Services Parameter Description Warning Bitmap Description No learn data available for adaptive control Position indicator signal of the external isolation valve incorrect. No Sensor Active PFO Not Ready Cluster Slave Offline...
  • Page 113 Series 613 TROUBLE SHOOTING Failure Check Action Display does not light up - 24 V power supply - Connect valve to power supply according to ‘Power, ground and sensor connection’ and make sure that power supply is working. Remote operation does not work - Local operation via service port - Switch to remote or locked operation active...
  • Page 114 Emulates a power cycle of the valve Error Recovery Attempts to reset the Control Mode Error without restarting the valves Create a diagnostic file before recovery or restart if the error is to be analyzed by VAT Error Bitmap Parameter...
  • Page 115 • Plate not mounted Motion controller: Internal voltage error Check power supply Motion controller: Internal error temperature Check for a heat accumulation Contact vat support • Axis inverted Motion controller: Unexpected behavior • Encoder not connected • Break not released •...
  • Page 116 TROUBLE SHOOTING Series 613 Code Description Solution SFV: Motion controller failure in master-slave Contact vat support communication Compressed air error Check compressed air Check if power supply is ok and is able to deliver needed Power supply, low voltage detected power •...
  • Page 117 Series 613 TROUBLE SHOOTING Troubleshooting List Failure Check Action Display does not light up - 24 V power supply - Connect valve to power supply according to ‘Power, ground and sensor connection’ and make sure that power supply is working. Remote operation does not work - Local operation via service port - Switch to remote or locked operation...
  • Page 118 Before carrying out any maintenance, please contact VAT. It has to be individually decided whether the maintenance can be performed by the customer or has to be carried out by VAT. Please write down the fabrication number of the valve before contact VAT. Refer to chapter «Identification of product»...
  • Page 119 Replacement of Option board. Refer to chapter: «Replacement of Option board» Required frequency of cleaning and replacement of seals is depending on process conditions. VAT can give the following recommendations for preventive maintenance: heated ≤ 80 °C Replacement of unheated heated >...
  • Page 120 MAINTENANCE Series 613 Replacement of shaft feedthrough seals and valve cleaning 7.2.1.1 Required tools • • Allen Wrench 2 mm / 2.5mm Clean room wipes, isopropyl alcohol • • Allen Wrench 3 mm Vacuum grease • Feeler gauge Description Required tool Vent vacuum system on both sides of the valve.
  • Page 121 Series 613 MAINTENANCE Description Required tool Unfasten screws and remove plate from shaft. Allen Wrench 3 mm Unfasten alternately the 2 mounting screws little by little. Allen Wrench If only one screw is fasten / unfasten, 3 mm the mechanical unit will be damaged. Max.
  • Page 122 MAINTENANCE Series 613 Description Required tool 11. Lubricate seal contact surface of valve body with a slight film of vacuum grease (0.025 ml). 12. Lubricate each O-ring with a slight film of vacuum grease (0.0125 ml). 13. Lubricate seal contact surface of shaft with a slight film of vacuum grease (0.0125 ml).
  • Page 123 Series 613 MAINTENANCE Description Required tool >=50 21. Assemble control and actuating unit to valve unit. Tighten mounting screws adequately. Allen Wrench 22. Tighten clamp coupling: • with steel coupling 2.2 Nm Allen Wrench: steel coupling 2.5 mm 23. Reinstall valve into vacuum system according to chapter «Installation».
  • Page 124 MAINTENANCE Series 613 Replacement of Option board NOTICE Electrostatic discharge Electronic components could be damage. All work on the control and actuating unit has to be done under ESD protected environment to prevent electronic components from damage. NOTICE Burned connector pins (spark) Connector pins or electronic parts could damage, if plugged and unplugged under power.
  • Page 125 Series 613 MAINTENANCE 7.2.2.1 Durability of power fail battery The curves in the graph show the estimated life of Ultra Cap PFO in the worst condition (max. sensor load = 1 A, valve heating temperature = 150 °C). If the SPS is not fully loaded (< 1 A) or heating temperature of valve body is lower than 150 °C, the corresponding life time curve will be somewhere in between the upper and the lower curve.
  • Page 126 MAINTENANCE Series 613 7.2.2.2 Retrofit / replacement procedure View on control and actuating unit: Master board Interface board Option board All boards have a fixed position into control and actuating unit. It is not possible to fit a board in other position as shown in picture above! Do not try out other positions, which maybe destroy the socket of boards! 126/141 Edition 11.08.2022...
  • Page 127 Series 613 MAINTENANCE 7.2.2.3 Required tools • Allen Wrench 2 mm / 2.5mm • Allen Wrench 3 mm If you need any further information, please contact one of our service centers. You can find the addresses on our website: www.vatvalve.com. Description Required tool Make sure that the valve is in closed position...
  • Page 128 MAINTENANCE Series 613 Description Required tool Replacement of the option board / whole controller Unfasten the two bolts from bottom side and and dismount the controller from the actuator unit. The SPS/PFO option board has to be mounted/ dismounted from bottom side of the controller. The Controller and Interface board are fix connected and shall not be dismounted.
  • Page 129 REPAIRS Repairs Repairs may only be carried out by the VAT service staff. In exceptional cases, the customer is allowed to carry out the repairs, but only with the prior consent of VAT. Please contact one of our service centers. You will find the addresses on our website www.vatvalve.com.
  • Page 130 DISMOUNTING AND STORAGE Series 613 Dismounting and Storage WARNING Unqualified personnel Inappropriate handling may cause serious injury or property damage. Only qualified personnel are allowed to carry out the described work. Dismounting NOTICE Contamination Gate and other parts of the valve must be protected from contamination. Always wear clean room gloves when handling the valve.
  • Page 131 Series 613 DISMOUNTING AND STORAGE Storage NOTICE Wrong storage Inappropriate temperatures and humidity may cause damage to the product. Valve must be stored at: – relative humidity between 10% and 70% – temperature between +10 °C and +50 °C – non-condensing environment NOTICE Inappropriate packaging Product may get damaged if inappropriate packaging material is used.
  • Page 132 If products are radioactively contaminated, the VAT form «Contamination and Radiation Report» must be filled out. Please contact VAT in advance. • If products are sent to VAT in contaminated condition, VAT will carry out the decontaminating procedure at the customer's expense. 132/141 Edition 11.08.2022...
  • Page 133 Valve mechanism may get damaged if valve is in open position. Make sure that the valve is closed. Cover all valve openings with a protective foil. Pack valve appropriately, by using the original packaging material. VAT disclaims any liability for damages resulting from inappropriate packaging. 10.2 Transport NOTICE Inappropriate packaging Product may get damaged if inappropriate packaging material is used.
  • Page 134 DISPOSAL Series 613 Disposal Observe the local regulations for disposal WARNING Harmful substances Environmental pollution. Discard products and parts according to the local regulations. WARNING Unqualified personnel Inappropriate handling may cause serious injury or property damage. Only qualified personnel are allowed to carry out the disposal. CAUTION Risk of damage Indicates a hazardous situation which, if not avoided, may result in minor or moderate...
  • Page 135 «Identification of product». This is to ensure that the appropriate spare parts are supplied. • VAT makes a difference between spare parts that may be replaced by the customer and those that need to be replaced by the VAT service staff. •...
  • Page 136 FEHLER! VERWEISQUELLE KONNTE NICHT GEFUNDEN WERDEN. Series 613 12.1 ISO-KF for DN 25 – 50 mm Drawing ISO-KF Body with mechanism Shaft kit Valve body Plate kit Shaft feedthrough seals All “Items in below table“ refer to this chapter «Drawing ISO-KF» 136/141 Edition 11.08.2022 951672EE...
  • Page 137 FEHLER! VERWEISQUELLE KONNTE NICHT GEFUNDEN WERDEN. Series 613 ISO-KF valve unit - aluminum blank, without heating Item Description DN 25 / 1” DN 40 / 1½” DN 50 / 2” Valve size 61328 - KA . . 61332 - KA . . 61334 - KA .
  • Page 138 FEHLER! VERWEISQUELLE KONNTE NICHT GEFUNDEN WERDEN. Series 613 12.2 ISO-F for DN 63 – 320 mm Drawing ISO-F Body with mechanism Shaft kit Valve body Plate kit Shaft feedthrough seals All “Items in below table“ refer to this chapter «Drawing ISO-F» 138/141 Edition 11.08.2022 951672EE...
  • Page 139 FEHLER! VERWEISQUELLE KONNTE NICHT GEFUNDEN WERDEN. Series 613 ISO-F valve unit - aluminum blank, without heating Item Description DN 63 / 2½” DN 80 / 3” DN 100 / 4” DN 160 / 6” DN 200 / 8” DN 250 / 10” DN 320 / 12”...
  • Page 140 12.3 Control unit and Accessories Control and actuating unit Description Part number Control and actuating unit Too many to list. Please contact VAT. Option board with SPS module 858530 (±15 VDC Sensor Power Supply) Option board with PFO module 858529...
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