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VAT 61532-KEGG-0004 Installation, Operating, & Maintenance Instructions

Butterfly control & isolation valve with extended control range
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Butterfly control & isolation valve
with extended control range
with RS232 interface
This manual is valid for the valve ordering number(s):
61532-KEGG-0004
configured with firmware 615P.1E.28
The fabrication number is indicated on each product as per the label
below (or similar):
ma de in Swit zerlan d
Fab rica tio n No .:
61 5 . . – . . . . – . . . . / . . . .
A – . . . . . .
Explanation of symbols:
Read declaration carefully before you start any other
action!
Attention!
Loaded springs and/or air cushions are potential
hazards!
Disconnect electrical power and compressed air
lines. Do not touch parts under voltage!
Read these «Installation, Operating & Maintenance Instructions» and the enclosed «General
Safety Instructions» carefully before you start any other action!
VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com
Installation, Operating & Maintenance Instructions
Series 615 DN 40 (I.D. 1.5"), RS232
Fabrication num ber
sample picture
Keep body parts and objects away from the valve
opening!
Hot surfaces; do not touch!
Wear gloves!
290389EA
2011-07-01
1/73

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Summary of Contents for VAT 61532-KEGG-0004

  • Page 1 Do not touch parts under voltage! Read these «Installation, Operating & Maintenance Instructions» and the enclosed «General Safety Instructions» carefully before you start any other action! VAT Vakuumventile AG, CH-9469 Haag, Switzerland 290389EA 1/73 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 2 VAT products. The VAT firmware contains a limited, time unlimited user license. The VAT firmware may not be used for purposes other than those intended nor is it permitted to make copies of the VAT firmware. In particular, it is strictly forbidden to give copies of the VAT firmware to other people.
  • Page 3 Installation, Operating & Maintenance Instructions Series 615 DN 40 (I.D. 1.5”), RS232 Contents: VAT Vakuumventile AG, CH-9469 Haag, Switzerland 290389EA 3/73 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2011-07-01...

  • Page 4: Use Of Product

    This product is a Butterfly control valve with isolation functionality for downstream pressure control in vacuum systems. Use product for clean and dry indoor vacuum applications under the conditions indicated in chapter «Technical data» only! Other applications are only allowed with the written permission of VAT. VAT Vakuumventile AG, CH-9469 Haag, Switzerland...

  • Page 5: Technical Data

    Refer to chapter «Sensor supply concepts» for details. Refer to chapter «Schematics» for details. PFO = Power Failure Option. Refer to «Behavior in case of power failure» for details. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 290389EA 5/73 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 6 Weight about 3.3 kg Dimensions Refer to dimensional drawing of specific valve ordering number (available on request) VAT Vakuumventile AG, CH-9469 Haag, Switzerland 290389EA 6/73 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2011-07-01...

  • Page 7: Installation Into The System

    Do not connect or disconnect sensor cable when device is under power. Connection overview Connectors at controller panel Ground connection VAT Vakuumventile AG, CH-9469 Haag, Switzerland 290389EA 7/73 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2011-07-01...

  • Page 8: Tightening Torque

    Note: To provide power to the valve motor pins 4 and 8 must be bridged, otherwise motor interlock is active and the valve enters the safety mode and is not operative. Refer also to «Safety mode». This valve may optionally be equipped with a heating device. Connect VAT heating device according to manual of respective heating device.
  • Page 9 The stress has to be relieved by suitable means. The following forces are admissible: Axial tensile or Valve size Bending moment «M» compressive force «F » inch lbf. 1½ VAT Vakuumventile AG, CH-9469 Haag, Switzerland 290389EA 9/73 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2011-07-01...
  • Page 10 Admissible force «F» a = middle of aluminium part of controller (b / 2) c = pedestal 400 N VAT Vakuumventile AG, CH-9469 Haag, Switzerland 290389EA 10/73 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 11 Dynamic stray magnetic fields may introduce noise to sensor output and should be avoided or shielded. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 290389EA 11/73 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 12: Electrical Connection

    It is also possible to connect the ground strap at system chamber if it is well connected to PE. Note: Avoid low chassis cross section to the system PE connection. (Min. same cross section as ground strap) VAT Vakuumventile AG, CH-9469 Haag, Switzerland 290389EA 12/73 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 13 615 . . - . . G . - ..and 615 . . - . . H . - ..SPS module not included Note: The SPS module can be retrofitted. Refer to chapter «Retrofit / replacement procedure» for instruction. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 290389EA 13/73 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 14 • Connector: Use only screws with 4-40UNC thread for fastening the connectors! VAT Vakuumventile AG, CH-9469 Haag, Switzerland 290389EA 14/73 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 15 • Connector: Use only screws with 4-40UNC thread for fastening the connectors! VAT Vakuumventile AG, CH-9469 Haag, Switzerland 290389EA 15/73 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 16 • Connector: Use only screws with 4-40UNC thread for fastening the connectors! VAT Vakuumventile AG, CH-9469 Haag, Switzerland 290389EA 16/73 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 17 • Connector: Use only screws with 4-40UNC thread for fastening the connectors! VAT Vakuumventile AG, CH-9469 Haag, Switzerland 290389EA 17/73 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 18: Operation

    The service port (connector: SERVICE) allows to connect the valve to a RS232 port of a computer. This requires a service cable and software from VAT. You can either use our freeware 'Control View', which can be downloaded from www.vatvalve.com or purchase our 'Control Performance Analyzer'.
  • Page 19 Local operation means that the valve is operated via the service port using a computer or the Service Box 2. When using a computer, a service cable and a software from VAT are required. You can either download our freeware 'Control View' from or purchase our 'Control Performance Analyzer'.
  • Page 20 Valve position after power up is closed Valve position after power up is open Refer also to chapter «Display information». VAT Vakuumventile AG, CH-9469 Haag, Switzerland 290389EA 20/73 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 21: Behavior In Case Of Power Failure

    1) SPS = optional ±15 VDC Sensor Power Supply module 2) PFO = Power Failure Option VAT Vakuumventile AG, CH-9469 Haag, Switzerland 290389EA 21/73 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 22: Fatal Error

    Digit 2 Digit 3 Digit 4 Fatal error occurred Error code. Refer to «Trouble shooting» for details VAT Vakuumventile AG, CH-9469 Haag, Switzerland 290389EA 22/73 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2011-07-01...

  • Page 23: Setup Procedure

    (Refer to chapter «setup commands» for details) ‘Service Box 2‘) Send INTERFACE CONFIGURATION Do configuration in menu ‘Setup / Interface’. Send RANGE CONFIGURATION VAT Vakuumventile AG, CH-9469 Haag, Switzerland 290389EA 23/73 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2011-07-01...
  • Page 24 Note: Do not perform ZERO, if the base pressure of your vacuum system is higher than 1‰ of sensor full scale. We recommend disabling ZERO function in this case; refer to «Valve and sensor configuration» of the setup procedure. Otherwise incorrect pressure reading is the result. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 290389EA 24/73 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 25 Note: Learn may take several minutes. Do not interrupt the routine as a single full run is required to ensure fast and accurate pressure control. The PID controller covers 5% to 5000% of the gas flow which was used for learn. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 290389EA 25/73 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 26 [sccm] = 39.4 • p • C max. pressure to control [Torr] required lower conductance [l/s] VAT Vakuumventile AG, CH-9469 Haag, Switzerland 290389EA 26/73 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2011-07-01...
  • Page 27 (Refer to chapter «RS232 control commands» for ‘Service Box 2‘) details) Select or enter pressure setpoint Send PRESSURE CONTROL VAT Vakuumventile AG, CH-9469 Haag, Switzerland 290389EA 27/73 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2011-07-01...
  • Page 28 Pumping speed (l/s) and pump type (e.g. turbo pump) • System description • Problem description Send diagnostic file with and all required information to tuning-support@vat.ch VAT Vakuumventile AG, CH-9469 Haag, Switzerland 290389EA 28/73 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2011-07-01...
  • Page 29 ‘Service Box 2‘) Go to ‘Setup / Control Parameter’ menu. Send Select sensor delay. PID CONTROLLER CONFIGURATION VAT Vakuumventile AG, CH-9469 Haag, Switzerland 290389EA 29/73 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2011-07-01...
  • Page 30 ‘Service Box 2‘) Go to ‘Setup / Control Parameter’ menu. Send Select setpoint ramp. PID CONTROLLER CONFIGURATION VAT Vakuumventile AG, CH-9469 Haag, Switzerland 290389EA 30/73 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2011-07-01...
  • Page 31 Data bits Stop bit Parity Digital input OPEN Digital input CLOSE 9600 even not inverted not inverted VAT Vakuumventile AG, CH-9469 Haag, Switzerland 290389EA 31/73 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2011-07-01...
  • Page 32 Configuration with switches for digital inputs: Note: Do not connect other pins than indicated in the schematics above! Connector: Use only screws with 4-40UNC thread for fastening the DB-25 connector! VAT Vakuumventile AG, CH-9469 Haag, Switzerland 290389EA 32/73 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 33 Configuration with voltage source for digital inputs: Note: Do not connect other pins than indicated in the schematics above! Connector: Use only screws with 4-40UNC thread for fastening the DB-25 connector! VAT Vakuumventile AG, CH-9469 Haag, Switzerland 290389EA 33/73 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 34: Open Valve

    Highest priority is 1. Functions with lower priorities will not be effective as long as higher priority functions are active. These digital inputs have higher priority than all RS232 commands. RS232 commands will not be accepted while digital inputs are active. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 290389EA 34/73 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 35: Position Control

    SETPOINT. Note: Reading returns pressure setpoint only in case pressure control is selected, otherwise position setpoint is returned. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 290389EA 35/73 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 36 «RS232 setup commands, RANGE CONFIGURATION» for details This function returns the actual pressure. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 290389EA 36/73 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 37: Device Status

    Note: In simulation mode the valve can demonstrate pressure control capability independent of other equipment such as vacuum chamber, flow controller and gauge. Normal operation is not possible when simulation is running. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 290389EA 37/73 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 38: Sensor Offset

    2 (-1400000 ... 01400000 = -1.400000V ... +1.400000V) This function returns the sensor 2 offset voltage (adjusted by ZERO). VAT Vakuumventile AG, CH-9469 Haag, Switzerland 290389EA 38/73 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 39: Error Status

    STATUS See in chapter «Trouble shooting» for details. This function returns an error code in case of any malfunction of the device. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 290389EA 39/73 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 40: Hardware Configuration

    This function returns firmware version of the device. [i:83][CR][LF] [i:83][xxxxxxxxxxxxxxxxxxxx][CR][LF] data length 20 characters xxx...xxx identification code, e.g. 61532-KEGG-0004/0001/, unused digits are filled up IDENTIFICATION with spaces (20 hexadecimal) This function returns an identification code. This code is unique for each valve and allows tracing.

  • Page 41: Access Mode

    0 (reserved, do not change) 0 (reserved, do not change) 0 (reserved, do not change) This function does the valve configuration. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 290389EA 41/73 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 42: Sensor Configuration

    High range / Low range sensor full scale ratio * 1’000 (1000 … 100000). In case of a 1 sensor valve use any value within the valid range. This function does the sensor configuration for pressure control. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 290389EA 42/73 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 43: Range Configuration

    Above picture shows a 2 sensor system. In this configuration sensor 2 covers low range (100 mTorr) and sensor 1 covers high range (1 Torr). RANGE CONFIGURATION for PRESSURE resp. SENSOR READING is set to 10’000. Switchover between sensors is done automatically. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 290389EA 43/73 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 44 104 data sets. Each data set consists of 8 data bytes and needs to be uploaded separately. Note: Make sure that all 104 data sets will be uploaded. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 290389EA 44/73 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 45 00 = reset service request bit from WARNINGS RESET 01 = reset FATAL ERROR (restart control unit) This function resets warnings and errors. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 290389EA 45/73 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 46 Command not accepted due to synchronization, CLOSED or OPEN by digital input, [E:][000082][CR][LF] safety mode or fatal error Hardware Command not applicable for hardware configuration [E:][000041][CR][LF] VAT Vakuumventile AG, CH-9469 Haag, Switzerland 290389EA 46/73 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2011-07-01...

  • Page 47: Troubleshooting

    - Provide power to motor to allow for operation. Motor Interlock is open - Refer to «Electrical connection» for details. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 290389EA 47/73 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2011-07-01...
  • Page 48 ZERO. - Enable ZERO. Refer to «Valve - ZERO disabled? configuration» for details. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 290389EA 48/73 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2011-07-01...
  • Page 49 If you need any further information, please contact one of our service centers. You can find the addresses on our website: http://www.vat.ch VAT Vakuumventile AG, CH-9469 Haag, Switzerland 290389EA 49/73 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 50: Maintenance And Repairs

    Contamination from the process may influence the function and requires more frequent maintenance. Before carrying out any maintenance or repairs, please contact VAT. It has to be individually decided whether the maintenance/repair can be performed by the customer or has to be carried out by VAT. The fabrication number on the valve made in Switzerland Fabrication No.:...
  • Page 51 In this case grease will separate to PTFE and oil. The oil may flow and contaminate the valve parts. VAT can give the following recommendations for preventive maintenance with FKM seals under clean and unheated condition: Seals...
  • Page 52 6. Remove the plate on the other side of shaft 7. Remove the plate o-ring Soft tool 8. Replace the plate if necessary VAT Vakuumventile AG, CH-9469 Haag, Switzerland 290389EA 52/73 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2011-07-01...
  • Page 53 12. Place the new o-ring at o-ring groove at one side 13. Move the o-ring in the o-ring groove on the other side VAT Vakuumventile AG, CH-9469 Haag, Switzerland 290389EA 53/73 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 54 (close position). 20. Disconnect electrical POWER connection Keep fingers out of the valve opening during plate movement! VAT Vakuumventile AG, CH-9469 Haag, Switzerland 290389EA 54/73 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 55 Pay attention: Take care to the sealing surface! Allen Wrench 4. Loosen clamp coupling screw VAT Vakuumventile AG, CH-9469 Haag, Switzerland 290389EA 55/73 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2011-07-01...
  • Page 56 7. Unfasten and remove the 2 fastening Allen Wrench screws VAT Vakuumventile AG, CH-9469 Haag, Switzerland 290389EA 56/73 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2011-07-01...
  • Page 57 13. Lubricate the new o-ring with 0.0125 ml vacuum grease Vacuum grease For new o-ring refer to chapter spare parts. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 290389EA 57/73 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2011-07-01...
  • Page 58 17. Push in the o-ring around the plate into o- ring groove equally 18. Plate with equal mounted o-ring 19. Deposit the plate on a clean surface VAT Vakuumventile AG, CH-9469 Haag, Switzerland 290389EA 58/73 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 59 21. Remove mechanical unit from valve body Cleanroom wipes soaked 22. Clean shaft with isopropyl alcohol 23. Remove both o-rings Soft tool VAT Vakuumventile AG, CH-9469 Haag, Switzerland 290389EA 59/73 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2011-07-01...
  • Page 60 28. Lubricate each o-ring with a slight film of 0.0125 ml vacuum grease. Vacuum grease Pay attention: If required use new o-rings VAT Vakuumventile AG, CH-9469 Haag, Switzerland 290389EA 60/73 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 61 Allen torque wrench with 2.5 Nm 34. Place the plate on the shaft in the valve body VAT Vakuumventile AG, CH-9469 Haag, Switzerland 290389EA 61/73 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2011-07-01...
  • Page 62 Cleanroom wipes 41. Assemble valve unit with control and actuating. Push axis (C) into clamp coupling VAT Vakuumventile AG, CH-9469 Haag, Switzerland 290389EA 62/73 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2011-07-01...
  • Page 63 43. Tighten clamp coupling screw with 1.1 Nm 44. Reinstall valve into vacuum system according to chapter «Installation». VAT Vakuumventile AG, CH-9469 Haag, Switzerland 290389EA 63/73 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 64: Option Board

    Ambient temperature [°C] Note: This graph shows estimated life of UltraCap PFO for reference and not as guaranteed value. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 290389EA 64/73 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 65 Note: All boards have a fixed position into control and actuating unit. It is not possible to fit a board in other position as shown in picture above. Do not try out other positions, that may be destroy the socket of boards! VAT Vakuumventile AG, CH-9469 Haag, Switzerland 290389EA 65/73 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 66 Open end wrench 4.5 mm SENSOR and INTERFACE connectors. Lift the panel carefully. Disconnect fan cable from board. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 290389EA 66/73 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 67 12. Tighten female screw locks from POWER, SENSOR and INTERFACE connectors with Open end wrench 4.5 mm 1.1 Nm (see step 1). VAT Vakuumventile AG, CH-9469 Haag, Switzerland 290389EA 67/73 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 68 Body with mechanism Lever complete Body complete Adapter flange, rod with bearing Plate Rotary feedtrough seals Plate o-ring VAT Vakuumventile AG, CH-9469 Haag, Switzerland 290389EA 68/73 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2011-07-01...

  • Page 69: Spare Parts

    Vacuum N-5100-204 (FKM e.g. Viton®) Plate o-ring (FKM e.g. Viton®) 365576 Vacuum grease 206792 (2ml), 206793 (5ml) VAT Vakuumventile AG, CH-9469 Haag, Switzerland 290389EA 69/73 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2011-07-01...
  • Page 70 Option board with PFO module 378002 (power failure option) Option board 376837 with SPS and PFO module VAT Vakuumventile AG, CH-9469 Haag, Switzerland 290389EA 70/73 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2011-07-01...
  • Page 71 61532 - ..Centering ring Aluminum 31032-KAZV with Viton o-ring (for ISO-KF and ISO-F installation Stainless steel 31032-KEZV only) VAT Vakuumventile AG, CH-9469 Haag, Switzerland 290389EA 71/73 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2011-07-01...

  • Page 72: Warranty

    (including any delay in or failure to deliver), packaging, storage or use of any product sold or delivered by VAT shall fail to conform to the...
  • Page 73 Installation, Operating & Maintenance Instructions Series 615 DN 40 (I.D. 1.5”), RS232 VAT Vakuumventile AG, CH-9469 Haag, Switzerland 290389EA 73/73 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2011-07-01...

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615 series

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