VAT 615 Series Installation, Operating, & Maintenance Instructions
  1. Manuals
  2. Brands
  3. VAT Manuals
  4. Control Unit
  5. 615 Series
  6. Installation, operating, & maintenance instructions

VAT 615 Series Installation, Operating, & Maintenance Instructions

Butterfly control & isolation valve with extended control range with rs232 interface
Hide thumbs Also See for 615 Series:
Table of Contents

Advertisement

Quick Links

Butterfly control & isolation valve
with extended control range
with RS232 interface
This manual is valid for the valve ordering number(s):
61532-KEHG-0004
configured with firmware 615P.1E.34
The fabrication number is indicated on each product as per the label
below (or similar):
ma de in Swit zerlan d
Fab rica tio n No .:
61 5 . . – . . . . – . . . . / . . . .
A – . . . . . .
Explanation of symbols:
Read declaration carefully before you start any other
action!
Attention!
Loaded springs and/or air cushions are potential
hazards!
Disconnect electrical power and compressed air
lines. Do not touch parts under voltage!
Read these «Installation, Operating & Maintenance Instructions» and the enclosed «General
Safety Instructions» carefully before you start any other action!
VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com
Installation, Operating & Maintenance Instructions
Series 615 DN 40 (I.D. 1.5"), RS232
Fabrication num ber
sample picture
Keep body parts and objects away from the valve
opening!
Hot surfaces; do not touch!
Wear gloves!
289112EA
2011-07-07
1/95

Advertisement

Table of Contents
loading
Need help?

Need help?

Do you have a question about the 615 Series and is the answer not in the manual?

Questions and answers

Subscribe to Our Youtube Channel

Related Manuals for VAT 615 Series

Summary of Contents for VAT 615 Series

  • Page 1 Do not touch parts under voltage! Read these «Installation, Operating & Maintenance Instructions» and the enclosed «General Safety Instructions» carefully before you start any other action! VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289112EA 1/95 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 2 VAT products. The VAT firmware contains a limited, time unlimited user license. The VAT firmware may not be used for purposes other than those intended nor is it permitted to make copies of the VAT firmware. In particular, it is strictly forbidden to give copies of the VAT firmware to other people.

  • Page 3: Table Of Contents

    Replacement of shaft feedtrough seals and plate o-ring ..............77 Option board ..............................86 5.2.1 Durability of power fail battery ......................86 VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289112EA 3/95 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 4 Seal kit ................................92 Accessories ..............................93 7.4.1 Centering ring with Viton o-ring ......................93 8 Warranty ................................. 94 VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289112EA 4/95 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2011-07-07...

  • Page 5: Use Of Product

    This product is a Butterfly control valve with isolation functionality for downstream pressure control in vacuum systems. Use product for clean and dry indoor vacuum applications under the conditions indicated in chapter «Technical data» only! Other applications are only allowed with the written permission of VAT. VAT Vakuumventile AG, CH-9469 Haag, Switzerland...

  • Page 6: Technical Data

    Refer to chapter «Sensor supply concepts» for details. Refer to chapter «Schematics» for details. PFO = Power Failure Option. Refer to «Behavior in case of power failure» for details. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289112EA 6/95 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 7 Weight about 3.3 kg Dimensions Refer to dimensional drawing of specific valve ordering number (available on request) VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289112EA 7/95 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2011-07-07...

  • Page 8: Installation

    Do not connect or disconnect sensor cable when device is under power. Connection overview Connectors at controller panel Ground connection VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289112EA 8/95 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2011-07-07...
  • Page 9 Note: To provide power to the valve motor pins 4 and 8 must be bridged, otherwise motor interlock is active and the valve enters the safety mode and is not operative. Refer also to «Safety mode». This valve may optionally be equipped with a heating device. Connect VAT heating device according to manual of respective heating device.

  • Page 10: Tightening Torque

    The stress has to be relieved by suitable means. The following forces are admissible: Axial tensile or Valve size Bending moment «M» compressive force «F » inch lbf. 1½ VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289112EA 10/95 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2011-07-07...

  • Page 11: Admissible Forces At Controller

    Admissible force «F» a = middle of aluminium part of controller (b / 2) c = pedestal 400 N VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289112EA 11/95 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 12: Requirements To Sensor Connection

    Dynamic stray magnetic fields may introduce noise to sensor output and should be avoided or shielded. Electrical connection VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289112EA 12/95 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 13: Ground Connection

    It is also possible to connect the ground strap at system chamber if it is well connected to PE. Note: Avoid low chassis cross section to the system PE connection. (Min. same cross section as ground strap) VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289112EA 13/95 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 14: Sensor Supply Concepts

    615 . . - . . G . - ..and 615 . . - . . H . - ..SPS module not included Note: The SPS module can be retrofitted. Refer to chapter «Retrofit / replacement procedure» for instruction. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289112EA 14/95 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 15: Power And Sensor Connection (+24 Vdc Sensors)

    • Connector: Use only screws with 4-40UNC thread for fastening the connectors! VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289112EA 15/95 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 16 • Connector: Use only screws with 4-40UNC thread for fastening the connectors! VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289112EA 16/95 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 17: Power And Sensor Connection (±15 Vdc Sensors) Without Optional Sps Module

    • Connector: Use only screws with 4-40UNC thread for fastening the connectors! VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289112EA 17/95 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 18 • Connector: Use only screws with 4-40UNC thread for fastening the connectors! VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289112EA 18/95 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 19: Rs232 Interface Connection

    The service port (connector: SERVICE) allows to connect the valve to a RS232 port of a computer. This requires a service cable and software from VAT. You can either use our freeware 'Control View', which can be downloaded from www.vatvalve.com or purchase our 'Control Performance Analyzer'.

  • Page 20: Operation

    This valve is designed for downstream pressure control in vacuum chambers. It can be employed in a pressure control mode or a position control mode. In both cases local or remote operation is possible. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289112EA 20/95 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 21: Local Operation

    Local operation means that the valve is operated via the service port using a computer or the Service Box 2. When using a computer, a service cable and a software from VAT are required. You can either download our freeware 'Control View' from or purchase our 'Control Performance Analyzer'.

  • Page 22: Safety Mode

    Valve position after power up is closed Valve position after power up is open Refer also to chapter «Display information». VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289112EA 22/95 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 23: Behavior In Case Of Power Failure

    Default is close. Display indicates F. *) Provided that battery pack of the VAT controller is charged. Charging time after power up is 2 minutes max.. All parameters are stored in a power fail save memory. Technical data of Power Failure Option (PFO): Charging time 2 minutes max.

  • Page 24: Display Information

    1) SPS = optional ±15 VDC Sensor Power Supply module 2) PFO = Power Failure Option VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289112EA 24/95 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 25: Setup Procedure

    Basic configurations of the valve must be adapted according to application needs. Refer to chapter «Valve configuration» for details. CONFIGURATION VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289112EA 25/95 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 26: Interface Configuration

    (Refer to chapter «setup commands» for details) ‘Service Box 2‘) Send INTERFACE CONFIGURATION Do configuration in menu ‘Setup / Interface’. Send RANGE CONFIGURATION VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289112EA 26/95 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2011-07-07...

  • Page 27: Valve And Sensor Configuration

    Note: Do not perform ZERO, if the base pressure of your vacuum system is higher than 1‰ of sensor full scale. We recommend disabling ZERO function in this case; refer to «Valve and sensor configuration» of the setup procedure. Otherwise incorrect pressure reading is the result. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289112EA 27/95 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 28: Pressure Control Configuration

    A = 5.0, B = 5.5, C = 6.0, D = 6.5, E = 7.0, F = 7.5, G = 8.0, H = 8.5, I = 9.0, J =9.5, K = 10.0 e, f, g, h are not used. Set 0000 VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289112EA 28/95 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 29 Set 00 and 00 Note: To optimize P-Gain, I-Gain and soft pump of the pressure controller refer to chapter «Tuning of control performance». VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289112EA 29/95 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 30: Control Algorithms

    To use the P control algorithm the P values must be calculated according to the process condition. Refer to chapter: 3.6.5.3 Soft pump. Prior to pressure control operation the control type must be selcted and the valve must be prepared accordingly. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289112EA 30/95 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 31 Note: Learn may take several minutes. Do not interrupt the routine as a single full run is required to ensure fast and accurate pressure control. The PID controller covers 5% to 5000% of the gas flow which was used for learn. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289112EA 31/95 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 32 [sccm] = 39.4 • p • C max. pressure to control [Torr] required lower conductance [l/s] VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289112EA 32/95 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2011-07-07...
  • Page 33 The PI parameters can be calculated approximately with the formulas below. On request VAT can provide a parameter calculation tool . Note: In downstream control mode valve will move towards open when current pressure is higher then setpoint.

  • Page 34: Close Valve

    Based on the P controller configuration, the valve is able to run fast and accurate pressure control cycles. The P parameters can be calculated approximately with the formulas below. On request VAT can provide a parameter calculation tool .

  • Page 35: Position Control

    PI control Tuning of control pressure performance with Soft pump , refer to chapter: 3.11.3 Tuning of pressure control (soft pump) VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289112EA 35/95 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 36: Tuning Of Pressure Control (Adaptive)

    Pressure Pressure Pressure Pressure control control control control ok ? ok ? ok ? ok ? Contact VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289112EA 36/95 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2011-07-07...
  • Page 37 (‘Control View’, ‘Control Performance Analyzer’ or ‘Service Box 2‘) Send Set gain factor in menu ‘Setup / Control Parameter’ PID CONTROLLER CONFIGURATION VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289112EA 37/95 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2011-07-07...
  • Page 38 (‘Control View’, ‘Control Performance Analyzer’ or ‘Service Box 2‘) Go to ‘Setup / Controller’ menu. Send Select sensor delay. PID CONTROLLER CONFIGURATION VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289112EA 38/95 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2011-07-07...
  • Page 39 ‘Service Box 2‘) Go to ‘Setup / Control Parameter’ menu. Send Select setpoint ramp. PID CONTROLLER CONFIGURATION VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289112EA 39/95 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2011-07-07...
  • Page 40 Pumping speed (l/s) and pump type (e.g. turbo pump) • System description • Problem description Send diagnostic file with and all required information to tuning-support@vat.ch VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289112EA 40/95 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2011-07-07...

  • Page 41: Tuning Of Pressure Control Performance With Fixed Pi Control

    P-Gain to I-Gain to Valve speed adjustment adjustment adjustment Pressure Pressure control control ok ? ok ? Contact VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289112EA 41/95 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2011-07-07...
  • Page 42 Refer to « Pressure Note: It’s not possible to change I-Gain via RS232. controller configuration» for command details. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289112EA 42/95 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 43 2 – 4 slm Pressure set points and gas flow for optimization: 7 Torr 6 Torr Gas flow 4slm VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289112EA 43/95 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2011-07-07...
  • Page 44 S61.2 DN50, Chamber = 200l, Flow = 4slm P gain too high Time [sec] Pressure Valve position Time [sec] VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289112EA 44/95 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2011-07-07...
  • Page 45 Pressure Valve position Time [sec] Note: Check control performance over the whole control range with parameters above. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289112EA 45/95 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2011-07-07...
  • Page 46 Pumping speed (l/s) and pump type (e.g. turbo pump) • System description • Problem description Send diagnostic file with and all required information to tuning-support@vat.ch VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289112EA 46/95 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2011-07-07...

  • Page 47: Tuning Of Pressure Control (Soft Pump)

    ? P-Gain to Valve speed adjustment adjustment Pressure Pressure control control ok ? ok ? Contact VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289112EA 47/95 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2011-07-07...
  • Page 48 Go to ‘Tools / Terminal’ menu and send configuration Send command for adjustment. Refer to « Pressure PID CONTROLLER CONFIGURATION controller configuration» for command details. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289112EA 48/95 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2011-07-07...
  • Page 49 The VAT soft pump controller requires a pump down time shorter than 10 sec. for good control results. If the required pump down time is longer than 10 sec., the pump down curve has to be partitioned into sections shorter than 10 sec. with corresponding end pressure.
  • Page 50 1000 Time [sec] Pressure P gain too high Ideal straight pump down line Valve position Time [sec] VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289112EA 50/95 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2011-07-07...

  • Page 51: Rs232 Interface

    Data bits Stop bit Parity Digital input OPEN Digital input CLOSE 9600 even not inverted not inverted VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289112EA 51/95 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2011-07-07...

  • Page 52: Schematics

    Configuration with switches for digital inputs: Note: Do not connect other pins than indicated in the schematics above! Connector: Use only screws with 4-40UNC thread for fastening the DB-25 connector! VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289112EA 52/95 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 53 Configuration with voltage source for digital inputs: Note: Do not connect other pins than indicated in the schematics above! Connector: Use only screws with 4-40UNC thread for fastening the DB-25 connector! VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289112EA 53/95 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 54: Digital Inputs

    Highest priority is 1. Functions with lower priorities will not be effective as long as higher priority functions are active. These digital inputs have higher priority than all RS232 commands. RS232 commands will not be accepted while digital inputs are active. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289112EA 54/95 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 55: Rs232 Command Syntax

    SETPOINT. Note: Reading returns pressure setpoint only in case pressure control is selected, otherwise position setpoint is returned. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289112EA 55/95 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 56: Inquiry Commands

    «RS232 setup commands, RANGE CONFIGURATION» for details This function returns the actual pressure. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289112EA 56/95 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 57 Note: In simulation mode the valve can demonstrate pressure control capability independent of other equipment such as vacuum chamber, flow controller and gauge. Normal operation is not possible when simulation is running. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289112EA 57/95 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 58 2 (-1400000 ... 01400000 = -1.400000V ... +1.400000V) This function returns the sensor 2 offset voltage (adjusted by ZERO). VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289112EA 58/95 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 59 STATUS See in chapter «Trouble shooting» for details. This function returns an error code in case of any malfunction of the device. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289112EA 59/95 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 60 (20 hexadecimal) This function returns an identification code. This code is unique for each valve and allows tracing. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289112EA 60/95 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 61: Setup Commands

    0 (reserved, do not change) 0 (reserved, do not change) 0 (reserved, do not change) This function does the valve configuration. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289112EA 61/95 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 62 High range / Low range sensor full scale ratio * 1’000 (1000 … 100000). In case of a 1 sensor valve use any value within the valid range. This function does the sensor configuration for pressure control. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289112EA 62/95 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 63 Above picture shows a 2 sensor system. In this configuration sensor 2 covers low range (100 mTorr) and sensor 1 covers high range (1 Torr). RANGE CONFIGURATION for PRESSURE resp. SENSOR READING is set to 10’000. Switchover between sensors is done automatically. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289112EA 63/95 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 64 104 data sets. Each data set consists of 8 data bytes and needs to be uploaded separately. Note: Make sure that all 104 data sets will be uploaded. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289112EA 64/95 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 65 Command Setup function (within 10ms after reception of command) Description PID CONTROLLER [s:02][abcdefgh][CR][LF] [s:02][CR][LF] CONFIGURATION [i:02][CR][LF] [i:02][abcdefgh][CR][LF] VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289112EA 65/95 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2011-07-07...
  • Page 66 This command selects gain factor, sensor response time and setpoint ramp for the PID controller. Note: Refer to «Tuning of control performance» for details. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289112EA 66/95 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 67 00 = reset service request bit from WARNINGS RESET 01 = reset FATAL ERROR (restart control unit) This function resets warnings and errors. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289112EA 67/95 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 68: Error Messages

    Command not accepted due to synchronization, CLOSED or OPEN by digital input, [E:][000082][CR][LF] safety mode or fatal error Hardware Command not applicable for hardware configuration [E:][000041][CR][LF] VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289112EA 68/95 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2011-07-07...

  • Page 69: Trouble Shooting

    - Provide power to motor to allow for operation. Motor Interlock is open - Refer to «Electrical connection» for details. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289112EA 69/95 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2011-07-07...
  • Page 70 ZERO. - Enable ZERO. Refer to «Valve - ZERO disabled? configuration» for details. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289112EA 70/95 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2011-07-07...
  • Page 71 If you need any further information, please contact one of our service centers. You can find the addresses on our website: http://www.vat.ch VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289112EA 71/95 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 72: Maintenance & Repairs

    Contamination from the process may influence the function and requires more frequent maintenance. Before carrying out any maintenance or repairs, please contact VAT. It has to be individually decided whether the maintenance/repair can be performed by the customer or has to be carried out by VAT. The fabrication number on the valve made in Switzerland Fabrication No.:...
  • Page 73 In this case grease will separate to PTFE and oil. The oil may flow and contaminate the valve parts. VAT can give the following recommendations for preventive maintenance with FKM seals under clean and unheated condition: Seals...

  • Page 74: Replacement Of Plate O-Ring

    6. Remove the plate on the other side of shaft 7. Remove the plate o-ring Soft tool 8. Replace the plate if necessary VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289112EA 74/95 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2011-07-07...
  • Page 75 12. Place the new o-ring at o-ring groove at one side 13. Move the o-ring in the o-ring groove on the other side VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289112EA 75/95 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 76 (close position). 20. Disconnect electrical POWER connection Keep fingers out of the valve opening during plate movement! VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289112EA 76/95 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 77: Replacement Of Shaft Feedtrough Seals And Plate O-Ring

    Pay attention: Take care to the sealing surface! Allen Wrench 4. Loosen clamp coupling screw VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289112EA 77/95 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2011-07-07...
  • Page 78 7. Unfasten and remove the 2 fastening Allen Wrench screws VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289112EA 78/95 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2011-07-07...
  • Page 79 13. Lubricate the new o-ring with 0.0125 ml vacuum grease Vacuum grease For new o-ring refer to chapter spare parts. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289112EA 79/95 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2011-07-07...
  • Page 80 17. Push in the o-ring around the plate into o- ring groove equally 18. Plate with equal mounted o-ring 19. Deposit the plate on a clean surface VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289112EA 80/95 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 81 21. Remove mechanical unit from valve body Cleanroom wipes soaked 22. Clean shaft with isopropyl alcohol 23. Remove both o-rings Soft tool VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289112EA 81/95 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2011-07-07...
  • Page 82 28. Lubricate each o-ring with a slight film of 0.0125 ml vacuum grease. Vacuum grease Pay attention: If required use new o-rings VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289112EA 82/95 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 83 Allen torque wrench with 2.5 Nm 34. Place the plate on the shaft in the valve body VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289112EA 83/95 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2011-07-07...
  • Page 84 Cleanroom wipes 41. Assemble valve unit with control and actuating. Push axis (C) into clamp coupling VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289112EA 84/95 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2011-07-07...
  • Page 85 43. Tighten clamp coupling screw with 1.1 Nm 44. Reinstall valve into vacuum system according to chapter «Installation». VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289112EA 85/95 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 86: Option Board

    Ambient temperature [°C] Note: This graph shows estimated life of UltraCap PFO for reference and not as guaranteed value. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289112EA 86/95 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 87: Retrofit / Replacement Procedure

    Note: All boards have a fixed position into control and actuating unit. It is not possible to fit a board in other position as shown in picture above. Do not try out other positions, that may be destroy the socket of boards! VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289112EA 87/95 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 88 Open end wrench 4.5 mm SENSOR and INTERFACE connectors. Lift the panel carefully. Disconnect fan cable from board. VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289112EA 88/95 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...
  • Page 89 12. Tighten female screw locks from POWER, SENSOR and INTERFACE connectors with Open end wrench 4.5 mm 1.1 Nm (see step 1). VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289112EA 89/95 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com...

  • Page 90: Drawing

    Body with mechanism Lever complete Body complete Adapter flange, rod with bearing Plate Rotary feedtrough seals Plate o-ring VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289112EA 90/95 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2011-07-07...

  • Page 91: Spare Parts

    Option board with PFO module 378002 (power failure option) Option board 376837 with SPS and PFO module VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289112EA 91/95 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2011-07-07...

  • Page 92: Valve Unit

    (FKM (e.g. N-5100-204 Viton®)) Plate o-ring (FKM (e.g. Viton®)) 365576 Vacuum grease 206792 (2ml), 206793 (5ml) VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289112EA 92/95 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2011-07-07...

  • Page 93: Accessories

    61532 - ..Centering ring Aluminum 31032-KAZV with Viton o-ring (for ISO-KF and ISO-F installation Stainless steel 31032-KEZV only) VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289112EA 93/95 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2011-07-07...

  • Page 94: Warranty

    (including any delay in or failure to deliver), packaging, storage or use of any product sold or delivered by VAT shall fail to conform to the...
  • Page 95 Installation, Operating & Maintenance Instructions Series 615 DN 40 (I.D. 1.5”), RS232 This Page Intentionally Left Blank VAT Vakuumventile AG, CH-9469 Haag, Switzerland 289112EA 95/95 Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com 2011-07-07...

This manual is also suitable for:

61532-kehg-0004

Table of Contents