VAT 615 Series Installation, Operating, & Maintenance Instructions page 85

8. Push the plate a little down
9. Remove the plate on the other side of shaft
10. Remove the plate o-ring
11. Replace the plate if necessary
12. Clean the plate and o-ring groove
13. Lubricate the new o-ring with 0.0125 ml
vacuum grease
For new o-ring refer to chapter spare
parts.
VAT Vakuumventile AG, CH-9469 Haag, Switzerland
Tel +41 81 771 61 61 Fax +41 81 771 48 30 CH@vatvalve.com www.vatvalve.com
Installation, Operating & Maintenance Instructions
Series 615 DN 40 (I.D. 1½"), DeviceNet
Description
Required tool
Soft tool
Cleanroom wipes soaked
with isopropyl alcohol
Vacuum grease
603476EA
85/102
2013-07-25