Basic Specifications; Table 1-3: Ant130Lzs Series Specifications (-035 And -060) - Aerotech ANT130LZS Series Hardware Manual

ANT130LZS Hardware Manual

1.3. Basic Specifications

N O T E : Aerotech continually improves its product offerings; listed options may be superseded at any
time. All drawings and illustrations are for reference only and were complete and accurate as of this
manual's release. Refer to www.aerotech.com for the most up-to-date information.
Resolution is dependent on encoder resolution and controller interpolation.
Table 1-3: ANT130LZS Series Specifications (-035 and -060)
Travel
Base (-PL1)
(1)
Accuracy
PLUS
(-PL2)
Resolution (Minimum Incremental Motion)
Base (-PL1)
Bidirectional
PLUS
(1)
Repeatability
(-PL2)
Unidirectional Repeatability
(1)
Straightness
(1)
Flatness
Pitch
Roll
Yaw
Maximum Speed
Maximum Acceleration (No Load)
(2)
In-Position Stability
Maximum Force (continuous)
Load Capacity (Vertical)
Moving Mass
Stage Mass
Material
Mean Time Between Failure
1. Certified with each stage.
2. Requires the selection of an appropriate amplifier with sufficient voltage and current.
3. In-Position Jitter listing is 3 sigma value.
4. Axis orientation for on-axis loading is listed (refer to
5. Requires the use of an Aerotech controller.
www.aerotech.com
(5)
(5)
(4)
Section 2.4.
Chapter 1
-035
35 mm
±2.5 µm
±275 nm
2 nm
±100 nm
±75 nm
±35 nm
±1.5 µm
±1.5 µm
10 arc sec
10 arc sec
5 arc sec
200 mm/s
1 g
<2 nm
23 N
14.0 kg
1.3 kg
2.5 kg
Aluminum Body/Black Hardcoat Finish
30,000 Hours
for offset loading behavior).
Overview
-060
60 mm
±2.5 µm
±275 nm
2 nm
±100 nm
±75 nm
±35 nm
±1.5 µm
±1.5 µm
10 arc sec
10 arc sec
5 arc sec
200 mm/s
1 g
<2 nm
23 N
14.0 kg
1.5 kg
2.9 kg
11