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ANT130LZS Series
Hardware manual
Aerotech ANT130LZS Series Hardware Manual page 46
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Hardware manual
(52 pages)
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Contents
Table of Contents
Troubleshooting
Bookmarks
Table of Contents
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Index
stage distortion
Stage Mass
Straightness
Support
Technical Support
Thermistor Specifications
Travel
Vibration
Warranty and Field Service
Yaw
46
17
11
11-12
2
T
2
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11-12
V
10
W
41
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11-12
Index
ANT130LZS Hardware Manual
www.aerotech.com
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This manual is also suitable for:
Ant130lzs-060
Ant130lzs-035
Ant130lzs-160
Ant130lzs-110
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