Table 1-4: Ant130Lzs Series Specifications (-110 And -160) - Aerotech ANT130LZS Series Hardware Manual

Overview
Table 1-4: ANT130LZS Series Specifications (-110 and -160)
Travel
Base (-PL1)
(1)
Accuracy
PLUS
(-PL2)
Resolution (Minimum Incremental Motion)
Base (-PL1)
Bidirectional
PLUS
(1)
Repeatability
(-PL2)
Repeatability (Unidirectional)
(1)
Straightness
(1)
Flatness
Pitch
Roll
Yaw
(2)
Maximum Speed
Maximum Acceleration
(3)
In-Position Stability
Maximum Force (Continuous)
Load Capacity (Vertical)
Moving Mass
Stage Mass
Material
Mean Time Between Failure
1. Certified with each stage.
2. Requires the selection of an appropriate amplifier with sufficient voltage and current.
3. In-Position Jitter listing is 3 sigma value.
4. Axis orientation for on-axis loading is listed (refer to
5. Requires the use of an Aerotech controller.
12
(5)
(5)
(2)
(4)
Section 2.4.
Chapter 1
ANT130LZS Hardware Manual
-110
110 mm
±3 µm
±325 nm
2 nm
±100 nm
±75 nm
±35 nm
±1.5 µm
±1.5 µm
10 arc sec
10 arc sec
5 arc sec
200 mm/s
1 g (No Load)
<2 nm
23 N
14.0 kg
2.1 kg
3.9 kg
Aluminum Body/Black Hardcoat Finish
30,000 Hours
for offset loading behavior).
-160
160 mm
±4 µm
±325 nm
2 nm
±100 nm
±75 nm
±35 nm
±2 µm
±2 µm
10 arc sec
10 arc sec
5 arc sec
200 mm/s
1 g (No Load)
<2 nm
23 N
14.0 kg
2.5 kg
4.6 kg
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