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Chapter 5 Resist (Resistivity) Measurement
This section describes the procedures to set the conditions of Resist measurement.
5.1 Resist Measurement Setting
5.2 Resist Measurement Unit Setting
The measurement units (•m or •cm) of the Resist measurement values are reflecting
the setting units (S/m or S/cm) of COND measurement setting ("3.2.2 COND
Measurement Unit Setting" (P.40)).
5.3 Temperature Setting
The settings of temperature compensation and temperature conversion in COND
measurement apply for Resist measurement (refer to "3.2.3 Temperature Setting" (P.41)
and "3.2.4 Temperature Conversion Function Setting" (P.42)).
1.
Tap the channel setting and the measurement
item in the MEAS screen to set "CH2" and
"Resist".
2.
Tap
and tap "CH2 MEAS SET".
The Resist measurement setting items are
displayed.
3.
Select items and set the conditions.
The setting procedures for each item are
explained below.
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