MSA Ultima X Series Installation & Maintenance Instructions Manual page 61

ND = No Data
INTER- CONCEN- ClO 2
FERANT TRATION
(PPM)
Acetone 1000 0
Acetylene 12000 0
Ammonia 25 0
Arsine 1 0
Benzene 20 0
Bromine 2 1
Carbon
Dioxide 5000 0
Carbon
Disulfide 15 0
Carbon
Monoxide 100 0
Chlorine 5 2.5
Diborane 20 0
Ethylene 50 0
Ethyl
Alcohol 100 0
Ethylene
Oxide 10 0
Ether 400 0
Fluorine 5 1
Freon 12 1000 0
Germane 1 0
Hexane 500 0
Hydrogen 500 0
Hydrogen
Chloride 50 0
Hydrogen
Cyanide 10 0
Hydrogen
Fluoride 10 0
Hydrogen
Sulfide 10 0
MEK 200 0
Mercaptan
(Methyl) 5 0
Methane 5000 0
Nitric Oxide 100 0
Nitrogen
Dioxide 5 0.2
Phosphine 0.5 0
Silane 5 0
Sulfur
Dioxide 10 0
Tichloro-
ethylene 1000 0
3-6
HF PH 3 ASH 4
0 ND ND
0.1 ND ND
0 ND ND
ND 0.7 1
ND ND ND
ND ND ND
0 ND ND
ND 0 0
0 0 1
5 ND ND
ND 3.5 5
0 0.5 1
0 ND ND
ND ND ND
0 ND ND ND
ND ND ND
0 0 0
ND 0.7 1
0 ND ND
0 0 0
30 ND ND
0 ND ND
10 ND ND
3 ND ND
ND ND ND
ND ND ND
0 ND ND
2 ND ND
2.5 ND ND
0 0.5 1
ND 0.1 0.2
8 ND 1
0 ND ND
SiH 4 GeH 3 B 2 H 6 Br 2
ND ND ND 0
ND ND ND 0
ND ND ND 0
1 1 5 0
ND ND ND 0
ND ND ND 2
ND ND ND 0
0 0 0 0
0 0 0 0
ND ND ND 4
4 5 20 0
1 1 2 0
ND ND ND 0
ND ND ND ND
ND ND 0
ND ND ND 2
0 0 0 0
1 1 5 0
ND ND ND 0
0 0 0 0
ND ND ND 0
ND ND ND 0
ND ND ND 0
ND ND ND 0
ND ND ND 0
ND ND ND 0
ND ND ND 0
ND ND ND 0
ND 0.5 ND 0.4
0.7 1 3 0
5 0.2 15 0
2 3 6 0
ND ND ND 0