Technical Data; Operating And Storage Conditions; Performance; General - Edwards RV3 Instruction Manual

2

Technical data

2.1

Operating and storage conditions

Parameter
Ambient temperature range (operation)
Ambient temperature range (storage)
Normal surface temperature of the pump-body *
Maximum humidity (operation)
Maximum altitude (operation)
Pollution degree
Installation category
Area of use
* At ultimate vacuum, with ambient temperature of 20°C.
2.2

Performance

2.2.1

General

Note: In Table 2 and Table
chamber without a cold trap, as specified by Pneurop Standard 6602 (1979).
Parameter
High Vacuum mode  performance

High Throughput mode
Suckback protection
Maximum initial pressure rise with no gas-ballast flow
Maximum displacement: m
50 Hz electrical supply
60 Hz electrical supply
Maximum pumping speed
3
(Pneurop 6602, 1979): m
50 Hz electrical supply
60 Hz electrical supply
Maximum permitted inlet pressure and gas-ballast inlet pressure
bar gauge
Pa
Maximum permitted outlet pressure
bar gauge
Pa
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Edwards and the Edwards logo are trade marks of Edwards Limited.
Table 1 - Operating and storage conditions
3, total pressures have been measured by a capacitance diaphragm gauge on a vacuum
Table 2 - General performance data
performance
3 -1
h
-1
h
Reference data
+12 to +40°C
–30 to +70°C
+50 to +70°C
90% RH
2000 m
2
II
Indoor use
Reference data
See Table 3
See Table 4
-5 -1
1 x 10 mbar l s , 1 x 10
-1
1 x 10 mbar, 10 Pa
RV3 RV5
3.7 5.8
4.5 5.0
3.3 5.1
3.9 6.2
0.5 0.5
5
1.5 x 10 1.5 x 10
0.2 0.2
5
0.2 x 10 0.2 x 10
A652–01–880 Issue Y
-3 -1
Pa l s
RV8 RV12
9.7 14.2
11.7 17.0
8.5 12.0
10.0 14.2
0.5 0.5
5 5 5
1.5 x 10 1.5 x 10
0.2 0.2
5 5 5
0.2 x 10 0.2 x 10
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