The Pump Has Failed To Achieve The Specified Performance (Has Failed To Reach Ultimate Vacuum); The Pump Is Noisy; The Pump Surface Temperature Is Above 100°C; The Vacuum Is Not Fully Maintained After The Pump Is Switched Off - Edwards RV3 Instruction Manual

5.12.3 The pump has failed to achieve the specified performance (has failed to reach
ultimate vacuum)
The pressure measurement technique or gauge head is unsuitable or gives an incorrect indication of

pressure. For example, a contaminated Pirani gauge can indicate a pressure which is several times higher
than the actual pressure in the system.
The pump has been filled with the wrong type of oil.

There is a leak in the vacuum system.

The mode selector and gas-ballast control are set incorrectly.

The oil-level is below minimum level.

The oil is contaminated.

The vacuum fittings are dirty or damaged.

The inlet-filter is blocked.

The pump has not warmed up.

5.12.4

The pump is noisy

The motor fan-cover is damaged.

The motor bearings are worn.

The oil is contaminated with solid particles.

5.12.5 The pump surface temperature is above 100°C
Note: If the inlet pressure is continuously higher than 100 mbar (1 x 10
pump can reach 115°C when the ambient temperature is 40°C.
The ambient temperature is too high.

The cooling-air supply is insufficient or is too hot.

The electrical supply voltage is too high.

The outlet-filter or the outlet pipeline is blocked.

The oil-level is below minimum level.

The pump has been filled with the wrong type of oil.

The oil is contaminated.

The process gas is too hot or the throughput is too high.

5.12.6

The vacuum is not fully maintained after the pump is switched off

The gas-ballast control is open (in position 'I' or 'II').

The inlet valve-pad is damaged.

The inlet valve has not closed.

© Edwards Limited 2018. All rights reserved.
Edwards and the Edwards logo are trade marks of Edwards Limited.
A652–01–880 Issue Y
4
Pa), the surface temperature of the RV12
Page 37