Optional Accessories - Keithley S535 Administrative Manual

Wafer acceptance test system
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Section 1: S535 system
The S535 systems have flexible hardware configurations that allow you to customize them to your
specific needs. See the following table for a description of the main system configuration options.
S535 system configuration options
DC source-measure units (SMUs)
6-slot switching matrix
Optional capacitance-voltage (C-V)
Optional instruments
Included with each system
Other options

Optional accessories

Optional items and accessories that may accompany the S535 system:
Cables to connect to the test fixture or the probe card adapter
9139A-PCA (probe card adapter)
9139B-PCA (probe card adapter)
Advanced seismic securement kit
1-2
S535 Wafer Acceptance Test System Administrative Guide
Two to 16 SMU channels
Maximum number of SMUs depends on other items in
the system rack
Model 2461-SYS System SourceMeter
(quantity: 0 to 12)
Model 2636B System SourceMeter
(quantity: 2 to 8)
Model 2450 System SourceMeter
®
TSP
master controller only; quantity: 1)
One Model 707B Switch Matrix Mainframe with Model 7530
switch cards (quantity: 2 to 6)
One channel of C-V (using one Model 4200A-SCS with one
Model 4210-CVU card)
Model DMM7510 7-1/2 Digit Graphical Sampling Multimeter
(quantity: 0 to 2)
Computer inside cabinet
External 24-inch flat-panel monitor and keyboard tray
mounted on exterior of cabinet
Keithley Test Environment (KTE) system software
LO patch panel
Safety interlock system
Adjustable cable support arm
Advanced seismic securement kit for additional
resistance to seismic forces
®
instruments
®
instruments
®
instrument (for use as
S535-924-01 Rev. B / January 2019

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