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Keithley S530 Diagnostic Manual

Keithley S530 Diagnostic Manual

Integrated test system
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S530 Integrated Test System
Diagnostics Manual
S530-906-01 Rev. A / March 2011
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Summary of Contents for Keithley S530

  • Page 1 S530 Integrated Test System Diagnostics Manual S530-906-01 Rev. A / March 2011...
  • Page 2 Any unauthorized reproduction, photocopy, or use the information herein, in whole or in part, without the prior written approval of Keithley Instruments, Inc. is strictly prohibited. All Keithley Instruments product names are trademarks or registered trademarks of Keithley Instruments, Inc. Other brand names are trademarks or registered trademarks of their respective holders.
  • Page 3 Keithley Instruments products are designed for use with electrical signals that are rated Measurement Category I and Measurement Category II, as described in the International Electrotechnical Commission (IEC) Standard IEC 60664. Most measurement, control, and data I/O signals are Measurement Category I and must not be directly connected to mains voltage or to voltage sources with high transient over-voltages.
  • Page 4 (note that selected parts should be purchased only through Keithley Instruments to maintain accuracy and functionality of the product). If you are unsure about the applicability of a replacement component, call a Keithley Instruments office for information.

  • Page 5: Table Of Contents

    Detailed diagnostic results ...................... 1-14 Store diagnostic data ......................1-15 Upload To FTP PTM ....................... 1-15 FTP sever configuration ......................1-16 Non-Kelvin (2W) S530 system diagnostics ..........Appendix A Introduction .......................... 2-1 Non-Kelvin hardware connection ..................2-1 Non-Kelvin SMU diagnostic test flow ................... 2-1 SMU communication test ......................
  • Page 6 Short test flow ......................... 3-10 Kelvin continuity test ......................3-12 Continuity pin test........................3-12 Kelvin leakage test ......................3-16 S530 troubleshooting information ............. Appendix C Introduction .......................... 4-1 CVU confidence check testing ....................4-1 S530-906-01 Rev. A / March 2011...

  • Page 7: Introduction To S530 Diagnostics

    This manual contains diagnostic information for the S530 system only. It includes information about how to run the S530 system diagnostics and how to interpret the results. The appendices contain detailed information regarding the individual diagnostic tests. An understanding of the information in the appendices is not required in order to run the system diagnostics.

  • Page 8: Operating Modes

    ACS login account type. Engineer Engineer mode enables all of the S530 diagnostic features and options. In this mode you can enable or disable individual tests, for example, execute the SMU communications test, or the matrix test, or run the entire suite of diagnostic tests.
  • Page 9 Figure 1: ACS engineer GUI Operator Operator mode of the S530 diagnostics is limited in its functionality. Operators are limited to using diagnostics to load and run diagnostic tests that have been previously created and saved by an engineer user (see next Figure).

  • Page 10: Diagnostic Project

    The S530 diagnostic project in ACS includes multiple PTMs (see next Figure). Each module represents a specific diagnostic test for the supported S530 instruments. If you are in engineer mode, you can choose which modules and tests to run. If you are in operator mode, you can only run the tests that someone created and saved while in engineer mode.

  • Page 11: Hardware Configuration

    The diagnostic project can also be run using the last saved settings. Hardware configuration The diagnostic project in ACS supports S530 systems that consist of Series 2600A instruments, Model 2410 SMUs, and Model 7174 or 7072-HV matrix cards in the Models 707B or 708B switch matrix mainframe.
  • Page 12 Section 1: Introduction to S530 Diagnostics S530 Diagnostic Manual Figure 4: Load a Project 4. After the Diagnostic.xml project opens, the ACS window opens (see next Figure). Figure 5: Diagnostic.xml project To view (expand) the diagnostic tests that can be performed, click the double arrows in the test tree and the sublevel test information is viewable.
  • Page 13 UploadToFTP is not necessary. Components not connected The S530 diagnostics require that all DUT (device under test) pins are open and components are not connected. If you are using a wafer prober, lower the chuck (or raise the probe needles). Ensure that either a blank probe card or a probe card with needles, but free of extra components, is installed in your probe card adaptor.
  • Page 14 Section 1: Introduction to S530 Diagnostics S530 Diagnostic Manual Figure 7: Progress status fail Figure 8: Progress status pass S530-906-01 Rev. A / March 2011...

  • Page 15: Loop The Testing

    S530 Diagnostic Manual Section 1: Introduction to S530 Diagnostics Report files There are two types of report files. A separate report is generated for each diagnostic test that you run: 1. .csv format 2. .log format If you are logged in to ACS in engineer mode, you will generate a detailed advanced report (in .csv format) and a log report.

  • Page 16: S530 Diagnostic Execution Flow

    If a leakage test or matrix test fails, you may be able to narrow the problem down by disconnecting the probe card from the switch and rerun diagnostics. If the S530 system is a non-Kelvin type, you can disconnect all of the probe card adaptor wiring from the switch matrix before rerunning. If the S530 system is a four-wire (4W;...

  • Page 17: Smu Diagnostic Testing

    S530 Diagnostic Manual Section 1: Introduction to S530 Diagnostics Figure 9: Blank probe card: Keithley 9139-type SMU diagnostic testing The first test that will execute is the Diag_SMU test, which identifies and then runs all the tests ® required for the Series 2600A instruments and Model 2410 System SourceMeter instruments.

  • Page 18: Matrix Diagnostic Testing

    Section 1: Introduction to S530 Diagnostics S530 Diagnostic Manual Figure 10: SMU diagnostics After your test selections are made, click the Save icon. If you want to run the SMU tests, select the Diag_SMU PTM in the project tree and click the Run icon on the ACS toolbar to start the test. All of the selected SMU diagnostic tests will now execute.

  • Page 19: Cvu Diagnostic Testing

    CVU diagnostic testing NOTE For more information on how to conduct further testing of the S530 system, specifically for the Model 4200-SCS CV unit, refer to the following section: S530 troubleshooting information.

  • Page 20: Detailed Diagnostic Results

    Section 1: Introduction to S530 Diagnostics S530 Diagnostic Manual Figure 12: CVU diagnostics Detailed diagnostic results In addition to the ACS GUI log window, separate diagnostics reports (*.csv) and log (*.log) files are saved in the following default directory (see next Figure):...

  • Page 21: Store Diagnostic Data

    S530 Diagnostic Manual Section 1: Introduction to S530 Diagnostics Store diagnostic data Upload To FTP PTM To store your test results where they are accessible to other personnel, you can use the Upload to FTP PTM. ACS will provide the FTP client and the data destination (for example a network drive) will act as the corresponding FTP server.

  • Page 22: Ftp Sever Configuration

    Section 1: Introduction to S530 Diagnostics S530 Diagnostic Manual Figure 15: Upload To FTP Setup GUI FTP sever configuration The FTP Server IP, Server Port, User Name, Password, and FTP Root are the conditions needed to specify an FTP server.
  • Page 23 S530 Diagnostic Manual Section 1: Introduction to S530 Diagnostics 3. Specify the diagnostic data folder to upload by browsing and selecting the folder that you want to upload. 4. Run your diagnostic test and when it’s complete the reports will upload to the location specified.
  • Page 24 Section 1: Introduction to S530 Diagnostics S530 Diagnostic Manual This page intentionally blank. 1-18 S530-906-01 Rev. A / March 2011...

  • Page 25: Non-Kelvin (2W) S530 System Diagnostics

    Appendix A Non-Kelvin (2W) S530 system diagnostics In this section: Introduction ..............2-1 Non-Kelvin hardware connection ....... 2-1 Non-Kelvin SMU diagnostic test flow ......2-1 Non-Kelvin SMU voltage and current test ....2-3 Non-Kelvin Voltage communication test..... 2-5 Non-Kelvin basic short test and continuity test... 2-5 Non-Kelvin short test..........

  • Page 26: Smu Communication Test

    Appendix A: Non-Kelvin (2W) S530 system diagnostics S530 Diagnostic Manual 1. The loop number is configured on the Diag_SMU GUI. It determines the total number of times the selected diagnostic tests will run. 2. The communication test must run successfully before the SMU voltage and current tests will run.

  • Page 27: Non-Kelvin Smu Voltage And Current Test

    3. The ranges for the SMU under test are obtained from the diagSpec file in the following directory: C:\ACS\library\pyLibrary\ptmlpt folder 4. The M in the flow chart (see next Figure) represents the number of Model 2410 SMUs. For the S530 high-voltage system, there is one Model 2410. S530-906-01 Rev. A / March 2011...
  • Page 28 Figure 21: Test flow chart NOTE For the Model 2410 SMU in the S530 high-voltage system, the 1000V is tested using voltages that are less than 200V since the Series 2600A SMUs are used as test support SMUs. The Model 2410 is tested in a manner that is similar to the Series 2600A SMUs.

  • Page 29: Non-Kelvin Voltage Communication Test

    S530 Diagnostic Manual Appendix A: Non-Kelvin (2W) S530 system diagnostics Figure 22: Connections Non-Kelvin Voltage communication test The voltage communication test is essentially the same as the communications test for the SMU. An instrument ID query is sent to the switch matrix and its response is read. This test is repeated three times and if the correct response is read all three times and no timeouts occur, the communication test will pass.

  • Page 30: Basic Continuity Test

    Appendix A: Non-Kelvin (2W) S530 system diagnostics S530 Diagnostic Manual NOTE A loop is used to check between the two SMUs, but only row k and row k+1 (n = 1, 3, 5*) will be arranged as a group and tested. The pair of rows will be tested in reverse order once to test the paths opposite direction.

  • Page 31: Non-Kelvin Short Test

    S530 Diagnostic Manual Appendix A: Non-Kelvin (2W) S530 system diagnostics 6. For example, when SMU2 is the current instrument under test and the total number is seven, the test support SMU loop should be SMU3~SMU7 and GNDU. Figure 25: Continuity test...

  • Page 32: Short Test Flow

    Appendix A: Non-Kelvin (2W) S530 system diagnostics S530 Diagnostic Manual Short test flow The short test uses SMU1 and SMU2 using the Series 2600A instruments. Each pair of adjacent pins will be tested with groups of rows. Each group of rows consists of row n and row n+1 (n = 1, 3, 5*)(see next Figure).

  • Page 33: Non-Kelvin Continuity Test

    S530 Diagnostic Manual Appendix A: Non-Kelvin (2W) S530 system diagnostics Figure 28: Test connections, pins 2 and 3, rows C and D Non-Kelvin continuity test The purpose of the continuity test is to determine if the relays of the matrix path under test have properly closed.

  • Page 34: Smu Matrix Test

    Appendix A: Non-Kelvin (2W) S530 system diagnostics S530 Diagnostic Manual Continuity test connections When the current pin is pin 3, the row pair is C and D (the following Figure shows the connections): Figure 30: Test connections, pin 3, rows C and D SMU matrix test The SMU matrix test uses the first matrix pin of the Series 2600A instrument that is under test.

  • Page 35: Non-Kelvin Leakage Test

    S530 Diagnostic Manual Appendix A: Non-Kelvin (2W) S530 system diagnostics Figure 32: Test connections, rows C and D Non-Kelvin leakage test The purpose of the leakage test is to check different paths of the matrix. The test consists of pin and SMU connections.
  • Page 36 Appendix A: Non-Kelvin (2W) S530 system diagnostics S530 Diagnostic Manual Figure 33: Pin test Leakage test connections For example, if the current pin pair is pin 2 and pin 3 and the row pair is C and row D, the connections...
  • Page 37 S530 Diagnostic Manual Appendix A: Non-Kelvin (2W) S530 system diagnostics Figure 35: Model 2410 test flow Leakage connection during test For example, if SMU3 is the support SMU, the current row pair is C and row D (see next Figure): Figure 36: Test connections, rows C and D S530-906-01 Rev.
  • Page 38 Appendix A: Non-Kelvin (2W) S530 system diagnostics S530 Diagnostic Manual This page intentionally blank. 2-14 S530-906-01 Rev. A / March 2011...

  • Page 39: Kelvin (4W) S530 System Diagnostics

    NOTE In a Kelvin S530 system, force and sense cards must be installed in pairs. Force cards must be installed in slots 1, 2, or 3. Sense cards must be installed in slots 4, 5, or 6. For example, if there are force cards in slots 1 and 2 of the 707 matrix mainframe, there must be corresponding sense cards in slots 4 and 5.

  • Page 40: Kelvin Smu Diagnostic Test Flow

    Appendix B: Kelvin (4W) S530 system diagnostics S530 Diagnostic Manual Kelvin SMU diagnostic test flow The following gives a quick description of the flow for SMU diagnostic testing (see next Figure): 1. The loop number is configured on Diag_SMU GUI. It determines the total number of times the selected diagnostic tests will be run.

  • Page 41: Kelvin Smu Voltage And Current Test

    3. The ranges for the SMU under test are obtained from the diagSpec file in the following directory: C:\ACS\library\pyLibrary\ptmlpt folder 4. The M in the flow chart (see next Figure) represents the number of Model 2410 SMUs. For the S530 high-voltage system, there is one Model 2410. S530-906-01 Rev. A / March 2011...
  • Page 42 Figure 39: Test flow chart NOTE For the Model 2410 SMU in S530 High Voltage systems, the 1000V range will be tested using voltages less than 200V since 2600A-series SMUs are used as the test support SMUs. The Model 2410 is tested in a manner similar to that used for the 2600A-series SMUs.
  • Page 43 S530 Diagnostic Manual Appendix B: Kelvin (4W) S530 system diagnostics Figure 40: Force test Sense test During the sense test, the SMUs are used in four-wire (4W) mode and both the force and sense parts of the matrix are used.

  • Page 44: Kelvin Voltage Communication Test

    If this is the case, then a blank probe card should be installed. In the case of high-voltage system which uses the Keithley Model 7072-HV matrix cards, only rows G and H are used during the CVU diagnostic. The CVU diagnostics for non-high-voltage systems will use all of the matrix rows.
  • Page 45 S530 Diagnostic Manual Appendix B: Kelvin (4W) S530 system diagnostics NOTE The basic short test is looped until all SMUs are tested. Adjacent pairs of rows (for example, row k and row k+1 where k = 1, 3, 5*) will be used during this test. The pair of rows will be tested in reverse order once to test the paths opposite direction.
  • Page 46 Appendix B: Kelvin (4W) S530 system diagnostics S530 Diagnostic Manual Figure 43: SMU sense test connection example Basic continuity test Execute the basic continuity test by connecting two SMUs to the same row, forcing 1mA from the first SMU, forcing 0V from the second, and then measuring the voltage and current with the first SMU. If...
  • Page 47 S530 Diagnostic Manual Appendix B: Kelvin (4W) S530 system diagnostics 1. If the current row is A and B:  Use pin 1 to connect the force and sense terminals of the current SMU under test to row A. ...

  • Page 48: Kelvin Short Test

    Appendix B: Kelvin (4W) S530 system diagnostics S530 Diagnostic Manual 3. If the current row is E.  Use pin 1 to connect the force and sense terminals of the current SMU under test to row C.  Use pin 2 to connect the force and sense terminals of the support SMU (except GNDU) to row D.
  • Page 49 S530 Diagnostic Manual Appendix B: Kelvin (4W) S530 system diagnostics Figure 48: Current Pin Loop short test Force test During the short test, SMUs are used in the 2W mode. The test flow is the same as the instrument card 2W tests.

  • Page 50: Kelvin Continuity Test

    Appendix B: Kelvin (4W) S530 system diagnostics S530 Diagnostic Manual Figure 50: Model 2410, row C or H, pins 1 or 3 connected to GNDU Kelvin continuity test The purpose of the continuity test is to determine if the relays under test have properly closed and to measure the resistance of the path.
  • Page 51 S530 Diagnostic Manual Appendix B: Kelvin (4W) S530 system diagnostics Figure 51: Current pin test Force test During the continuity test, SMUs are used in the 2W mode. The test flow is the same as the instrument card 2W tests.
  • Page 52 Appendix B: Kelvin (4W) S530 system diagnostics S530 Diagnostic Manual  Use pin 3 to connect the force and sense terminals of the common lo (GNDU) with row E.  Use the current row (C, D, E, or F) on the sense card to connect the SMU under test and the test support SMU together.
  • Page 53 S530 Diagnostic Manual Appendix B: Kelvin (4W) S530 system diagnostics NOTE When the SMU in the Diag_SMU module test has passed, the remaining SMUs will loop to test the first SMU. The test is identical to the pin test and the test results will display in the ACS GUI test log...

  • Page 54: Kelvin Leakage Test

    Appendix B: Kelvin (4W) S530 system diagnostics S530 Diagnostic Manual Figure 56: Model 7072 HV card, rows C, D, and E 2. If rows A and B or E and F are under test, then row C will be used with pin 2 to connect the force and sense to GNDU (see next Figure).
  • Page 55 S530 Diagnostic Manual Appendix B: Kelvin (4W) S530 system diagnostics The SMU test uses the first SMU using the Series 2600A instruments. The remaining SMUs will be looped to test with the first SMU. The test path is made by separately connecting two SMUs to group of rows without a pin connection.
  • Page 56 Appendix B: Kelvin (4W) S530 system diagnostics S530 Diagnostic Manual 1. If the current row is A and B:  Use pin 1 to connect the force and sense terminals of the current SMU under test to row A. ...
  • Page 57 S530 Diagnostic Manual Appendix B: Kelvin (4W) S530 system diagnostics SMU Kelvin leakage test When a Model 2410 SMU is in your system (high-voltage systems only), only row pair A and B will be tested by the 2410. The remaining rows will be tested using the Series 2600A instruments. Systems without a Model 2410 will test rows A through H using the Series 2600A instruments.
  • Page 58 Appendix B: Kelvin (4W) S530 system diagnostics S530 Diagnostic Manual This page intentionally blank. 3-20 S530-906-01 Rev. A / March 2011...

  • Page 59: S530 Troubleshooting Information

    In this section: Introduction ..............4-1 CVU confidence check testing ........4-1 Introduction This section is intended to provide information on how to conduct further testing of the S530 system, specifically for the Model 4200-SCS CV unit. CVU confidence check testing NOTE It is recommended that you run CVU confidence check in order to test for opens and shorts on the CVU.
  • Page 60 ‘kiadmin’ and password ‘kiadmin1’ (see next Figure). Figure 65: Log On to Windows 5. When the Model 4200-SCS first opens, the Keithley eXternal Control Interface (KXCI) is running. You must click Quit in order to continue (see next Figure).
  • Page 61 S530 Diagnostic Manual Appendix C: S530 troubleshooting information Figure 66: Keithley eXternal Control Interface (KXCI) 6. On the Model 4200-SCS desktop, click the KITE icon (see next Figure). Figure 67: Model 4200-SCS desktop KITE icon 7. Once you have KITE open, click on Tools in the toolbar and select CVU Confidence Check in the drop-down list of options (see next Figure).
  • Page 62 (typically in slot 5) 8. Make sure that the Parameters drop-down menu is set to Cp-Gp (see next Figure) NOTE You must first run the Open Check before running the Short Check. S530-906-01 Rev. A / March 2011...
  • Page 63 Figure 69: CVU Confidence Check dialog box 9. Click the Settings function and make sure the settings for the CVU match the parameters in the next Figure, before continuing. Figure 70: CVU Confidence Check Settings S530-906-01 Rev. A / March 2011...
  • Page 64 1, 4, 5 G11, H12 4-wire Kelvin Short Check G11, G12, H12 NOTE Note that the cards identified in Table 3 are for a typical system. The cards in your system may be different. S530-906-01 Rev. A / March 2011...
  • Page 65 If any permanent cables were removed for this testing, make sure that they are reconnected at this time. Next, close KITE and open KXCI on the Model 4200-SCS and then close your Remote Desktop Connection. S530-906-01 Rev. A / March 2011...
  • Page 66 Appendix C: S530 troubleshooting information S530 Diagnostic Manual This page intentionally blank. S530-906-01 Rev. A / March 2011...
  • Page 67 M E A S U R E C O N F I D E N C E Keithley Instruments, Inc. Corporate Headquarters • 28775 Aurora Road • Cleveland, Ohio 44139 • 440-248-0400 • Fax: 440-248-6168 • 1-888-KEITHLEY • www.keithley.com 12/06...