Recovering From An Emergency Shutdown; Safety Interlocks - Keithley S535 Administrative Manual

Section 3: Equipment startup

Recovering from an emergency shutdown

To recover after an emergency shutdown:
1. Verify that the hazardous condition or emergency situation is no longer present.
2. Rotate the EMERGENCY OFF button to release it.
3. Toggle the power switch from ON to OFF, and then back to ON again. All of the system
instruments should power up.
4. Open the front cabinet door and press the power/standby switch on the host computer.
Call run_ic.pl to reinitialize the instrumentation.

Safety interlocks

Failure to make sure that the safety interlock and safety shields and guards are properly
installed and arranged as indicated will put personnel in severe danger. Severe personal
injury or death due to electric shock or electrocution may result.
For the safety interlock to function properly, the device under test (DUT) interlock sensor
must be installed near the DUT connections and the interlock magnet must be installed on
the safety shield. It must be set up so that when the magnet is near the switch (interlock
closed) the operator cannot touch voltage-carrying conductors. If not properly installed, it will
render the interlock inoperative and place personnel at severe risk.
For operator safety, the S535 has interlocks on both the front and back cabinet doors and at the DUT.
Also, the optional probe card adapter (PCA) has interlocks that provide protection for connections to a
prober.
If you open a cabinet door or open the DUT interlock while instruments are sourcing, the interlock
activates and disconnects the hazardous voltage from the source-measure instruments, stopping any
tests in progress.
An indicator on the front door of the S535 cabinet illuminates, and the KTE software immediately
notifies you of the interlock activation.
3-6
Figure 39: S535 controls and indicators on front of cabinet
S535 Wafer Acceptance Test System Administrative Guide
S535-924-01 Rev. B / January 2019