Operating Environment Conditions; Triaxial Connector Handling And Avoiding Contamination - Keithley S535 Administrative Manual

Wafer acceptance test system
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S535 Wafer Acceptance Test System Administrative Guide
When a Series 2600B or 2461-SYS instrument detects an excessive heat condition, the instrument
turns the output off to minimize power dissipation. This safeguard prevents damage to individual
Series 2600B and 2461-SYS instruments, but may result in test instability. For instance, if you
continuously source more than 1 A from all the source-measure units (SMUs) for more than
100 seconds, it may trigger a temperature error in one or more of the Series 2600B or 2461-SYS
instruments. However, an average output of less than 1 A for an indefinite period will not cause a
temperature error.
For additional information about the Keithley Instruments Series 2600B and 2461-SYS SourceMeter
instruments, refer to the documentation at tek.com/keithley.

Operating environment conditions

To ensure operation within specifications, the S535 must be operated inside of the following
environmental conditions.
Temperature: 23 °C ±5 °C
Operating humidity: 30% to 60% relative humidity, noncondensing, after a two-hour warm up time
Vibration: High ambient vibration levels may require isolation pads or the repositioning of equipment
Air quality: The S535 system is compatible for use in a Class 10 clean room
Audible system noise: Decibel level is 65 dBA in optimal environmental conditions
Airflow: The S535 system is configured for top to bottom airflow
Altitude: Less than 2000 m (6,561 feet) above sea level
Noise interference: To prevent electrical noise from interfering with measurements, the ambient AC
magnetic field must not exceed 2 × 10
Avoid locating the S535 next to plasma etchers, large motors, magnets, RF transmitters,
equipment with flash lamps, and other potential sources of interference
Position equipment to avoid routing signal and power cables near sources of electrical noise

Triaxial connector handling and avoiding contamination

Keep source-measure triaxial cable connectors (if applicable) clean and free of any foreign
contaminants. Do not touch the connector pins of the triaxial connectors. Contamination can cause
current leakage in the source-measure signal paths to the device under test (DUT), which can
significantly degrade the test results.
Do not touch any connector pins or the areas adjacent to the electrical contacts of the triaxial
connectors; contamination will degrade the performance of the test system.
S535-924-01 Rev. B / January 2019
Section 2: S535 site preparation and installation
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G (2 × 10
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T):
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2-21

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