Table Of Contents - Keithley S535 Administrative Manual

Wafer acceptance test system

Table of Contents

S535 system ............................................................................................................. 1-1

Introduction .......................................................................................................................... 1-1

Systems documentation ....................................................................................................... 1-1

System description ............................................................................................................... 1-1

Optional accessories ................................................................................................................. 1-2

S535 site preparation and installation .................................................................... 2-1

Site preparation checklist ..................................................................................................... 2-1

Unpacking the S535 system ................................................................................................ 2-2

Unpacking system components ................................................................................................ 2-3

Unpacking the S535 system accessories ................................................................................ 2-12

Keithley field service engineer installation tasks ..................................................................... 2-15

Power and operating conditions ......................................................................................... 2-19

Supplied power cords .............................................................................................................. 2-19

Line power requirements ......................................................................................................... 2-20

System power dissipation........................................................................................................ 2-20

Operating environment conditions ........................................................................................... 2-21

Triaxial connector handling and avoiding contamination ................................................... 2-21

Lockout and tagout ............................................................................................................. 2-22

Installation and connections ............................................................................................... 2-24

Position the system cabinet..................................................................................................... 2-24

Cable harness routing ............................................................................................................. 2-25

Floor plan ........................................................................................................................... 2-25

System cabinet size and weight ......................................................................................... 2-27

Physically securing the system .......................................................................................... 2-28

Optional advanced seismic securement ............................................................................ 2-29

Equipment startup ................................................................................................... 3-1

Introduction .......................................................................................................................... 3-1

Initial equipment startup ....................................................................................................... 3-1

System startup ..................................................................................................................... 3-2

Before starting system software ........................................................................................... 3-3

Using Telnet .............................................................................................................................. 3-3

Start the KTE software ......................................................................................................... 3-4

IC process log messages .......................................................................................................... 3-4

Stopping the IC process ............................................................................................................ 3-4

Shut down using KTE ........................................................................................................... 3-5

Emergency OFF button ........................................................................................................ 3-5

Emergency shutdown procedure ............................................................................................... 3-5

Recovering from an emergency shutdown ................................................................................ 3-6

Safety interlocks ................................................................................................................... 3-6

Table of Contents

Table of contents