Instrument Specifications And Documentation; Introduction - Keithley S535 Administrative Manual

Wafer acceptance test system

Table of Contents

In this section:

Switching .................................................................................. 5-2

Sourcing and measuring .......................................................... 5-2

TSP-Link controller ................................................................... 5-4

Optional instrumentation .......................................................... 5-4

Typical matrix connections ....................................................... 5-4

S535 KTE communications ...................................................... 5-6

Introduction

This section contains an overview of the instruments used in S535 test systems and examples of

typical connection schemes.

For more specific information about instruments used in the S535 Wafer Acceptance Test System,

refer to the documentation for each specific model:

4200A-SCS Parameter Analyzer

Series 2600B System SourceMeter

2461-SYS System SourceMeter

707B Semiconductor Switch Matrix

DMM7510 7-1/2 Digit Graphical Sampling Multimeter

2450 System SourceMeter

4210-CVU Capacitance-Voltage Unit Card

Refer to the documentation that is bundled with the Keithley Test Environment (KTE) software

installation. You can also visit the Keithley Instruments website at

updated information by model number.

Example wiring diagrams for the S535 test system are shown later in this section.

Instrument specifications and documentation

Instrument

Section 5

tek.com/keithley

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Table of Contents