Keithley S535 Administrative Manual
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Keithley S535 Administrative Manual

Keithley S535 Administrative Manual

Wafer acceptance test system
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S535 Wafer Acceptance Test System
Administrative Guide
S535-924-01 Rev. B / January 2019
*PS535-924-01B*
S535-924-01B

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  • Page 1 S535 Wafer Acceptance Test System Administrative Guide S535-924-01 Rev. B / January 2019 *PS535-924-01B* S535-924-01B...
  • Page 2 S535 Wafer Acceptance Test System Administrative Guide...
  • Page 3 All rights reserved. Any unauthorized reproduction, photocopy, or use of the information herein, in whole or in part, without the prior written approval of Keithley Instruments, LLC, is strictly prohibited. These are the original instructions in English. All Keithley Instruments product names are trademarks or registered trademarks of Keithley Instruments, LLC.
  • Page 4 Keithley products are designed for use with electrical signals that are measurement, control, and data I/O connections, with low transient overvoltages, and must not be directly connected to mains voltage or to voltage sources with high transient overvoltages.
  • Page 5 (note that selected parts should be purchased only through Keithley to maintain accuracy and functionality of the product). If you are unsure about the applicability of a replacement component, call a Keithley office for information.

  • Page 6: Table Of Contents

    Introduction .......................... 1-1 Systems documentation ....................... 1-1 System description ....................... 1-1 Optional accessories ......................... 1-2 S535 site preparation and installation ..............2-1 Site preparation checklist ..................... 2-1 Unpacking the S535 system ....................2-2 Unpacking system components ....................2-3 Unpacking the S535 system accessories ................2-12 Keithley field service engineer installation tasks ..............
  • Page 7 Table of contents S535 Wafer Acceptance Test System Administrative Guide Additional probe card adapter safety interlock cable ..............3-8 9139A-PCA, 9139B-PCA interlock connections for S535 systems ........... 3-9 LO patch panel and safety interlock ................... 3-10 Prober safety ........................3-10 Network information ......................

  • Page 8: S535 System

    System description ..............1-1 Introduction If you have any questions after reviewing this information, please contact your local Keithley Instruments office, sales partner, or distributor. You can also call the corporate headquarters of Keithley Instruments (toll-free inside the U.S. and Canada only) at 1-800-935-5595, or from outside the U.S.

  • Page 9: Optional Accessories

    Section 1: S535 system S535 Wafer Acceptance Test System Administrative Guide The S535 systems have flexible hardware configurations that allow you to customize them to your specific needs. See the following table for a description of the main system configuration options.

  • Page 10: S535 Site Preparation And Installation

    Are elevators needed to move the system? Can they support the size and weight of the system? Are the doorways wide enough for the system? If you are using a Keithley probe card adapter, you must supply a vacuum connection (50.80 cm Hg / 20 in.). Floor plan Item...

  • Page 11: Unpacking The S535 System

    Did you prepare power outlets for service, testing, or maintenance? Unpacking the S535 system The Keithley field service engineer (FSE) is responsible for unpacking the S535 system cabinet and the accessories. However, we recommend that you move the crate and the accessories box to the area where the system is going to be used.

  • Page 12: Unpacking System Components

    The following information will help the FSE unpack the system. Series 500 systems are shipped in a wooden crate (see the following figure). Figure 1: S535 system cabinet in shipping crate Unpacking system components Inspect the shock sensor on the outside of the shipping crate (see the following figure). If the shock sensor indicates a shock condition, do a thorough inspection of all components in the system cabinet.
  • Page 13 Report any damage to the shipping agent immediately. Please reuse or recycle packaging materials in accordance with your local requirements. You need at least two people to unpack and move the S535 system cabinet. S535-924-01 Rev. B / January 2019...
  • Page 14 S535 Wafer Acceptance Test System Administrative Guide Section 2: S535 site preparation and installation To unpack the system components: 1. Remove the crate clamps from the crate using a standard screwdriver. Figure 4: Removing the crate clamps 2. Open the front of the crate. The front is identified by the wooden ramp support attached across the panel (see the following figure).
  • Page 15 Section 2: S535 site preparation and installation S535 Wafer Acceptance Test System Administrative Guide Figure 5: Opening the front of the crate 4. Attach the ramp using the two bolts that are attached to the bottom front of the crate.
  • Page 16 S535 Wafer Acceptance Test System Administrative Guide Section 2: S535 site preparation and installation 5. Remove the padding from the front of the S535 system cabinet. Figure 7: Removing the padding 6. Remove the crate clamps and slide the outer box cover off the crate.
  • Page 17 Figure 9: Leveling feet 8. Remove the four bolts from the bottom of the crate that are attached to the bottom of the S535 system cabinet using a 19 mm socket head on a socket wrench.
  • Page 18 9. Save the hardware (the four bolts and washers) that you remove from the bottom of the crate. Figure 12: System crate hardware 10. Unlock the two casters that are on the front of the S535 system cabinet by moving the locks up. S535-924-01 Rev. B / January 2019...
  • Page 19 Section 2: S535 site preparation and installation S535 Wafer Acceptance Test System Administrative Guide Figure 13: System caster brakes 11. With two people, slide the S535 system cabinet down the ramp. Figure 14: Rolling the system down the ramp S535-924-01 Rev. B / January 2019...
  • Page 20 S535 Wafer Acceptance Test System Administrative Guide Section 2: S535 site preparation and installation 12. Remove the tape from the packing material using scissors, taking care not to scratch the S535 system cabinet. Figure 15: Cutting the wrap off the system 13.

  • Page 21: Unpacking The S535 System Accessories

    Section 2: S535 site preparation and installation S535 Wafer Acceptance Test System Administrative Guide Unpacking the S535 system accessories The accessories are shipped in a separate box or in multiple boxes, depending on how many accessories are ordered. Figure 16: S535 system accessories The accessories box contains a computer monitor, keyboard, and mouse.
  • Page 22 S535 Wafer Acceptance Test System Administrative Guide Section 2: S535 site preparation and installation Figure 17: Typical system accessories Figure 18: Monitor arm accessory Figure 19: Keyboard tray and arm accessory S535-924-01 Rev. B / January 2019 2-13...
  • Page 23 A set of chuck cables is included with the optional 9139A-PCA and 9139B-PCA probe card adapters. Model numbers of cables vary based on the prober you are using. For example, the Keithley Field Service Engineer (FSE) will install the cables shown in the following table for Tel P8 probers.

  • Page 24: Keithley Field Service Engineer Installation Tasks

    S535 system cabinet) and power up the entire cabinet. Verify communications of all instruments and with the properly configured prober. Perform diagnostics and system verification tests of the entire S535 system, to include the 60190-PCA (if ordered).
  • Page 25 Section 2: S535 site preparation and installation S535 Wafer Acceptance Test System Administrative Guide Example Series 500 System Installation Form Figure 21: Example Series 500 System Installation Form page 1 S535-924-01 Rev. B / January 2019 2-16...
  • Page 26 S535 Wafer Acceptance Test System Administrative Guide Section 2: S535 site preparation and installation Figure 22: Example Series 500 System Installation Form page 2 S535-924-01 Rev. B / January 2019 2-17...
  • Page 27 Section 2: S535 site preparation and installation S535 Wafer Acceptance Test System Administrative Guide Figure 23: Example Series 500 System Installation Form page 3 S535-924-01 Rev. B / January 2019 2-18...

  • Page 28: Power And Operating Conditions

    The following topics contain information about power and operating environment conditions. Supplied power cords Keithley Instruments provides power cords that match the power requirements of the system. The following figure and table describe these cords. Figure 24: Supplied power cables...

  • Page 29: Line Power Requirements

    S535 systems that are configured to operate between 100 VAC and 120 VAC must use a 20 A circuit; systems that are configured to operate between 200 VAC and 240 VAC must use a 15 A circuit.

  • Page 30: Operating Environment Conditions

    Vibration: High ambient vibration levels may require isolation pads or the repositioning of equipment Air quality: The S535 system is compatible for use in a Class 10 clean room Audible system noise: Decibel level is 65 dBA in optimal environmental conditions...

  • Page 31: Lockout And Tagout

    Section 2: S535 site preparation and installation S535 Wafer Acceptance Test System Administrative Guide Cleaning: Use lint-free swabs moistened with methanol or isopropyl alcohol to clean contaminated connectors and then blow-dry them with nitrogen gas. After blowing dry, wait several minutes before using.
  • Page 32 S535 Wafer Acceptance Test System Administrative Guide Section 2: S535 site preparation and installation To remove system power: You must shut down the software and remove all power from the computer and the system (see Shut down using KTE (on page 3-5)).

  • Page 33: Installation And Connections

    Physically securing the system (on page 2-28)). System securement is required for safety of the S535 system and for personnel. You must bolt the legs adjacent to the four casters to the floor. See Physically securing the system page 2-28) for details.

  • Page 34: Cable Harness Routing

    Section 2: S535 site preparation and installation Cable harness routing The S535 has a dual-door rear portal for output leads. Cables can be routed from the cable harness at the rear portal to either the right or left of the cabinet.
  • Page 35 Section 2: S535 site preparation and installation S535 Wafer Acceptance Test System Administrative Guide Figure 28: S535 floor plan, top view S535-924-01 Rev. B / January 2019 2-26...

  • Page 36: System Cabinet Size And Weight

    S535 Wafer Acceptance Test System Administrative Guide Section 2: S535 site preparation and installation Figure 29: S535 weight distribution and center of gravity System cabinet size and weight The size and weight specifications for the system cabinet are listed in the following table. See...

  • Page 37: Physically Securing The System

    S535 Wafer Acceptance Test System Administrative Guide Physically securing the system You must bolt the S535 system cabinet to the floor for safety purposes and to ensure the cabinet will not tip over. The following figure shows the restraint brackets and bolt installation dimensions for the system cabinet.

  • Page 38: Optional Advanced Seismic Securement

    Figure 32: S535 tip-over hazard warning label on keyboard tray Optional advanced seismic securement The S535 system can be ordered with an advanced seismic fastening option that has been tested and certified to the standards stated in IEC 61587-2 Ed. 2.0 Mechanical structures for electronic equipment —...
  • Page 39 Section 2: S535 site preparation and installation S535 Wafer Acceptance Test System Administrative Guide 1. Position the cabinet where needed on a smooth, level floor. 2. Place the floor mounting brackets at the corners and make sure you have enough room for proper placement.
  • Page 40 S535 Wafer Acceptance Test System Administrative Guide Section 2: S535 site preparation and installation Anchors should have a minimum pullout rating of 450 kg (1000 lb) each. Install 16 anchors for maximum protection. 8. Return the cabinet to marked locations on the floor and use the leveling legs to lift the cabinet to the proper height.

  • Page 41: Equipment Startup

    Section 3 Equipment startup In this section: Introduction ................3-1 Initial equipment startup ............3-1 System startup ................. 3-2 Before starting system software ..........3-3 Start the KTE software ............. 3-4 Shut down using KTE ............... 3-5 Emergency OFF button ............3-5 Safety interlocks ...............

  • Page 42: System Startup

    Section 3: Equipment startup S535 Wafer Acceptance Test System Administrative Guide Figure 35: S535 power distribution unit (PDU) circuit breaker 2. Press the power/standby button on the computer and monitor. 3. Set the power button on the front door of the system cabinet to the ON position.

  • Page 43: Before Starting System Software

    Release Notes document (part number PA-1036). Using Telnet Telnet is not enabled by default on the S535 system; you must to enable it to use it. To enable Telnet: 1. From the command prompt (as root user), type su and the root password.

  • Page 44: Start The Kte Software

    Section 3: Equipment startup S535 Wafer Acceptance Test System Administrative Guide 4. Save and close the file. 5. At the command prompt (as root user), type the following: service xinetd start chk config telnet on chk config xinetd on Start the KTE software To start the KTE software, first start the instrument controller (IC) process.

  • Page 45: Shut Down Using Kte

    S535 Wafer Acceptance Test System Administrative Guide Section 3: Equipment startup Shut down using KTE To shut down using the Keithley Test Environment (KTE) software: 1. Close all KTE programs. ® 2. In the LINUX terminal, type the following command: sudo $KIBIN/shutdown_s530.pl...

  • Page 46: Recovering From An Emergency Shutdown

    For operator safety, the S535 has interlocks on both the front and back cabinet doors and at the DUT. Also, the optional probe card adapter (PCA) has interlocks that provide protection for connections to a prober.
  • Page 47 S535 Wafer Acceptance Test System Administrative Guide Section 3: Equipment startup Figure 40: Interlock indicator Once the interlock has been activated, you must clear the cause of the interlock activation. To clear the interlock activation: 1. Follow the instructions on the computer.

  • Page 48: Additional Probe Card Adapter Safety Interlock Cable

    The Model 174-7047-XX Safety Interlock Cable provides additional protection from electric shock at the Keithley probe card adapter (PCA). The cable attaches to the prober top plate and the PCA so that if you unlatch the top plate of the prober and lift it up to change a probe card or take off the PCA, the interlock is tripped.

  • Page 49: 9139A-Pca, 9139B-Pca Interlock Connections For S535 Systems

    9139A-PCA, 9139B-PCA interlock connections for S535 systems The following diagrams show the interlock connections to the optional 9139A-PCA and 9139B-PCA Probe Card Adapters. Figure 43: 9139A-PCA interlock block diagram for S535 systems Figure 44: 9139B-PCA interlock block diagram S535-924-01 Rev. B / January 2019...

  • Page 50: Lo Patch Panel And Safety Interlock

    Instruction Manual (part number 9139B-901-01). These manuals are available for download at tek.com/keithley. LO patch panel and safety interlock The S535 must have a single, direct connection between instrument lows and protective earth (safety ground). The S500-LOPATCH-3KV panel provides this common LO connection and protective earth (safety ground) reference.

  • Page 51: Network Information

    One 10Base-T patch cable (connects to your network) IP address is specified by you When setting up the computer for the S535 system, do not change the computer name. Software licenses are tied to the computer name. If you change the computer name, the Keithley Interactive Test Tool (KITT), Keithley Test Execution Engine (KTXE), and other Keithley Test Environment (KTE) tools will not work.

  • Page 52: Maintenance

    Data hub license ..............4-12 Editing the icconfig_<QMO>.ini file ........4-13 Using NPLCs to adjust speed and accuracy ......4-13 Decommissioning an S535 test system ......... 4-15 Hardware replacement The information in this section is intended only for qualified service personnel, as described Safety precautions (on page 1-1).

  • Page 53: Special Handling Of Static-Sensitive Devices

    Section 4: Maintenance S535 Wafer Acceptance Test System Administrative Guide Take the following precautions when servicing any system component: Do not store or operate the system in an environment where dust could settle on the components. Use dry nitrogen gas to clean dust off the components, if necessary.

  • Page 54: Electrical Hazard Tasks

    SEMI S2, Appendix 3, Table A3-1. Repair and replacement Keithley Instruments offers a fee-based service agreement with all S535 systems. Under this agreement, a field service engineer will either repair or replace equipment. For more information about this service agreement, contact Keithley Instruments at 1-800-935-5595.

  • Page 55: Instrument Removal And Installation

    4. Place the main circuit breakers on the power distribution units (PDUs) on the front and back of the cabinet in the OFF position. 5. Disconnect the source power to the S535 system (power cords on back of the PDUs). 6. Place a lock and tag on the main circuit breakers of the PDUs.

  • Page 56: Heavy Instrument Removal And Installation

    40 pounds or if they are located at or near the top of the system cabinet. Some instruments in the S535 system are not heavy enough to require a two-person lift individually, but when put together in a rack, require two people to remove and install them safely.

  • Page 57: General Replacement Procedure

    For more information about adjustment or other S535 services, contact your sales representative. You can also do system verification as described in the S535 Reference Manual (part number S535-901-01). Hazardous voltages may be present on the probe card adapter, even after you disengage the interlock.

  • Page 58: Restore System Power

    1. Remove the locks and tags placed on the main circuit breakers of the power distribution units (PDUs). 2. Connect the source power to the S535 system (power cord on the back of each of the PDUs). 3. Place the main circuit breakers on the PDUs in the ON position.

  • Page 59: Power Distribution And Emergency Off

    S535 Wafer Acceptance Test System Administrative Guide Power distribution and emergency off The following figure contains a simplified example layout of various components in the S535 system. Figure 46: S535 system cabinet rear view S535-924-01 Rev. B / January 2019...

  • Page 60: Power Distribution Unit Connections And Power Distribution Basics

    S535 Wafer Acceptance Test System Administrative Guide Section 4: Maintenance Power distribution unit connections and power distribution basics Each 42000-PDU consists of: 24 VDC output to emergency off (EMO) circuits and cabinet fans with power 24 VDC output through banana jacks...
  • Page 61 Section 4: Maintenance S535 Wafer Acceptance Test System Administrative Guide The following table provides a detailed description of the available connections in the 42000-PDU. Information about the EMO circuit connections and operation is also in the table. Depending on how many instruments you have in your system, you may have two power distribution units (PDUs).

  • Page 62: System Emergency Off Circuit

    S535 Wafer Acceptance Test System Administrative Guide Section 4: Maintenance System emergency off circuit The following figure shows a simplified schematic of the 42000-PDU power distribution unit (PDU) emergency off (EMO) circuit. Figure 48: 42000-PDU simplified schematic with optional second PDU S535-924-01 Rev.

  • Page 63: Data Hub License

    S535 Wafer Acceptance Test System Administrative Guide Data hub license The data hub license allows the Keithley Test Environment (KTE) software to communicate with a prober. This license is installed on all systems when they are shipped. If you upgrade or reinstall the KTE software, you may need to reinstall the data hub license.

  • Page 64: Editing The Icconfig_.Ini File

    S535 system, matrix and terminal configuration, and default system settings. Your Keithley field service engineer (FSE) configures this file when your system is installed. The FSE can edit this file to reflect changes in system hardware or to set different default system settings.

  • Page 65: Setting The Number Of Power Line Cycles

    S535 Wafer Acceptance Test System Administrative Guide Setting the number of power line cycles The default number of power line cycles (NPLCs) for measurements using the S535 can be set in several ways: Specify in the icconfig_<QMO>.ini file; your field service engineer (FSE) can change this from...

  • Page 66: Nplc Default Differences

    The NPLC setting for measurements when running diagnostics is always 1. Decommissioning an S535 test system The S535 Wafer Acceptance Test System does not contain any intentionally released substances, but may contain substances that are potentially hazardous to the environment if not properly recycled.
  • Page 67 Any cleaning solutions used during the life of the system (such as isopropyl alcohol (IPA)) should be disposed of separately and properly. The S535 system may be used with other equipment such as automatic probers and third-party probe card adapters. Tektronix is not in control of these products and the original equipment manufacturer should always be contacted for proper recycling procedures.

  • Page 68: Instrument Specifications And Documentation

    Typical matrix connections ............5-4 S535 KTE communications ............5-6 Introduction This section contains an overview of the instruments used in S535 test systems and examples of typical connection schemes. For more specific information about instruments used in the S535 Wafer Acceptance Test System,...

  • Page 69: Switching

    Model 7530 High-Speed Low-Current 8 × 12 Matrix Card The S535 uses the 7530 8 × 12 matrix card to support up to 60 pin connections to the probe card adaptor (PCA) in single-site mode. In dual-site mode, 30 pin connections are supported.

  • Page 70: Sourcing And Measuring

    Instrument is a 6-1/2 digit, two-channel source-measure unit (SMU) that simultaneously sources and measures voltage and current. You can have up to eight 2636B SMUs (for a total of 16 SMU channels) in the S535 system. Figure 51: 2636B System SourceMeter Instrument...

  • Page 71: Tsp-Link Controller

    S535 systems to act as the ® TSP-Link master controller. ® In S535 systems, the 2450 is used only for system communications (TSP-Link master). Other 2450 functions are not used. Optional instrumentation Keithley Test Environment (KTE) version 5.8.1 supports the following optional instrument: DMM7510 7½...

  • Page 72: S535 Standard 4-Wire Low-Current On 7530-Based System

    S535 Wafer Acceptance Test System Administrative Guide Section 5: Instrument specifications and documentation S535 standard 4-wire low-current on 7530-based system Figure 53: S535 standard 4-wire low-current S535-924-01 Rev. B / January 2019...

  • Page 73: S535 Kte Communications

    S535 Wafer Acceptance Test System Administrative Guide S535 KTE communications The S535 KTE system uses both ethernet and GPIB to communicate with and control the instruments. The following diagram shows how the instruments are connected to each other and what type of communications are used.
  • Page 74 All Keithley trademarks and trade names are the property of Keithley Instruments. All other trademarks and trade names are the property of their respective companies. Keithley Instruments Corporate Headquarters • 28775 Aurora Road • Cleveland, Ohio 44139 • 440-248-0400 • Fax: 440-248-6168 • 1-800-935-5595 • www.tek.com/keithley 12/17...

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