General Service & Repair - Veeco MS40 Operation And Maintenance Manual

9.
10.
11.
Generally if the machine powers up and the high vacuum is >4X10-5 after ½ hour
the gauge is close to being accurate and may not need re-calibration.
Calibrating the Temperature Sensor
4.9
Servicing the Valves
The most likely cause for a leaky vacuum system is faulty valve closure. A
valve's seat and seal become dirty or contaminated with use, causing small
leaks that must be corrected for the leak detector to function as required. The
valves must be cleaned when a leak develops or the system becomes
contaminated as described in Section 4.5. If a valve seal is damaged the valve
should be replaced.
Generally, valves exposed to low pressure and high flow are most likely to
be the cause of a leak and should be serviced first. Cleaning procedures are
discussed in Section 4.7.
All valve servicing is performed while the unit is in Service Mode. In order to
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easily access the valve block the rear panel needs to be opened. Refer to
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Figure 5-2 for an exploded view of the valve block.
1109-186-00 Rev. C
Close the fine valve. Open the vent valve and remove the variable leak.
Blank off the test port.
Put the MS40 into normal operating mode.
Make sure that the filament is turned ON.
1. Ensure that the unit is in standard mode. Open the rear panel
by turning the captive screw at the top of the panel ¼ turn
counterclockwise and gently lowering the door.
2. Connect a temperature probe to the temperature sensor located on
the body of the internal calibrator.
3. Using either of the SELECT arrow keys on the left side of the
User Panel, select the CAL TEMP function so that the temperature
reading appears on the alphanumeric display.
NOTE: The temperature probe should have a resolution of 0.1°C.
4. On the "A" board mounted on the interior of the rear door, adjust
the R53 potentiometer (at the bottom right of the board) until the
temperature reading on the alphanumeric display matches the
temperature indicated by the temperature probe.
General Service & Repair
4-22