Veeco MS40 Operation And Maintenance Manual page 84

Portable automatic leak detector
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Vacuum Instrument Corp.
2099 Ninth Avenue
Ronkonkoma, NY 11779
631.737.0900
1109-186-00 Rev. C
4.
The source may be cleaned as follows:
a.
Remove the source's O-ring and wipe away any excess
grease from the O-ring groove.
b.
Remove the source's filaments as stated in the Section
4.9. Clean the area using a fine emery cloth held with
needle nose pliers or tweezers. Be careful to not use
excessive force; any bending or shifting of the filament
area may cause an electrical short. Rinse the source in
freon and clean it ultrasonically. Install new filaments as
described in Section 4.9.
5.
The collector may be cleaned as follows:
a.
Remove the collector's O-ring and wipe away any excess
grease from the O-ring groove.
b.
Clean ultrasonically in boiling freon for two minutes.
c.
Bake the entire assembly at 50°C for 30 minutes.
d.
Apply a light film of vacuum grease on the O-ring and
reinstall the collector assembly into the mass
spectrometer.
4-15

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