Veeco MS40 Operation And Maintenance Manual page 38

Vacuum Instrument Corp. Vacuum Instrument Corp.
2099 Ninth Avenue 2099 Ninth Avenue
Ronkonkoma, NY 11779 Ronkonkoma, NY 11779
631.737.0900 631.737.0900
1109-186-00 Rev. C
5 If a vacuum testing procedure is underway, spraying of the test
object with helium should now commence.
6 Leak testing begins in the 10
7 The unit will continue to search for a leak, ranging downward
until it reaches the 10
8 If a leak is still not found, the unit will automatically begin
direct mode testing when the test port pressure goes below
Crossover 2.The rough valve will close, the fine valve will open
and the leak detector will range downward to the 10
range.
9 If a leak is not found, the unit will continue to test at this level
until the VENT pushbutton is pressed. If a leak is found, the
unit will range upward to the proper range. The unit stays in
direct mode when ranging upward until it reaches the 10
where it crosses back into reverse mode testing.
10 When leak testing has been completed, pressing and holding the
VENT pushbutton (the default is for 0.5 second or may be
programmed by the user - the D3 time interval) closes all
vacuum system valves except for the fore-line valve, opens the
vent valve and vents the test port and test object.
-4
std cc/sec range.
-9
std cc/sec range.
2-21
-10
std cc/sec
-4
range,