Veeco MS40 Operation And Maintenance Manual page 86

Parts List for the MS-40 Mass Spectrometer (as illustrated in Figure 4-2):
ITEM #
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
Cleaning the Turbo-molecular Pump
Cleaning of this pump must be in accordance with the procedures
recommended by the manufacturer. These procedures are detailed in the pump
manufacturer's manual that accompanies the MS-40. For questions regarding
servicing the turbo-molecular pump, contact the Customer Service Department
at Vacuum Instrument.
Vacuum Instrument Corp.
2099 Ninth Avenue
Ronkonkoma, NY 11779
1. Vent the MS-40 (as stated in Section 4.6).
631.737.0900
1109-186-00 Rev. C
VIC P/N
0137-014-00
0136-051-00
0011-037-00
0137-011-00
0135-053-00
0130-151-00
Commercial
Commercial
0130-195-00
0130-168-00
0011-024-00
Commercial
Commercial
Commercial
Commercial
DESCRIPTION
Source Assembly
Collector Assembly
O-Ring, 2 1/2 x 1/16
Source Body
Collector Body
Magnet
Lock-washer, Split #4
Screw, #4-40 x 3/8
Slit Plate
Screw, vented, #2-56 x 3/16
O-Ring, 1 1/8 x 1/16
Lock-washer, Split #6
Screw, Socket Head, #6-32 x 1/2
Lock-washer, Split #6
Screw, Socket Head, #6-32 x 1/2
4-17