Other Components - Veeco MS40 Operation And Maintenance Manual

5.3
Refer to figures 5-1 and 5-2 for exploded views of the MS-40 Vacuum
System and Valve Block, respectively. The numbered parts in each
illustration are listed, along with their VIC part number and a brief description,
in the accompanying tables.
TABLE 5-1
VACUUM SYSTEM
ITEM #
Vacuum Instrument Corp.
2099 Ninth Avenue
Ronkonkoma, NY 11779
631.737.0900
1109-186-00 Rev. C

Other Components

VIC P/N
1 0137-203-00
2 0011-120-00
3 Commercial
Commercial
4 -----------
5 1620-735-00
6 0137-702-00
7 0137-206-00
0011-115-00
8 1621-239-02
9 1621-231-12
10 1660-253-00
11 1621-150-00
12 1331-527-00
13 0137-214-00
14 1621-239-02
15 1621-231-12
16 Commercial
Commercial
17 0011-119-00
DESCRIPTION
Test Port
O-ring, Test Port Manifold
Screw, #10-32 x 7/16"
Lock washer, #10
Valve Block Assembly
Elbow, 1/4" NPT, M/F
Pirani Gauge, Fore-line
Manifold, Fore-line
O-Ring, Turbo-molecular Pump Fore-line
Clamp, VF16
Centering Ring, VF16
Turbo-molecular Pump
Centering Ring, ISO 63
Claw Clamp
Manifold, High Vacuum
Clamp, VF16
Centering Ring, VF-16
Screw, #10-32 x 7/16"
Lock-washer, #10
O-Ring, High Vacuum Manifold
5-5