Veeco MS40 Operation And Maintenance Manual page 116

TABLE 5-2
VALVE BLOCK ASSEMBLY
ITEM #
Vacuum Instrument Corp.
2099 Ninth Avenue
Ronkonkoma, NY 11779
631.737.0900
1109-186-00 Rev. C
VIC P/N
1 0137-200-00
2 1890-284-00
0011-023-00
3 0137-120-03
0019-022-01
4 1890-286-00
1890-286-01
0011-028-00
5 1890-284-00
0011-023-00
6 1890-287-00
1331-776-00
0019-014-00
0019-006-01
0019-013-01
7 0137-208-00
0137-208-01
Commercial
8 0016-013-00
9 0011-006-00
10 1890-287-00
0019-014-00
0019-006-01
0019-013-01
DESCRIPTION
Upper Valve Block
Fine (Direct Valve)
Replacement O-Ring, Fine Valve
Vent Valve
Replacement O-Ring, Vent Valve
Rough Valve (100 -115V Systems)
Rough Valve (230 - 240V Systems)
Replacement O-ring, Rough Valve
Fore-line (Reverse) Valve
Replacement O-Ring, Fore-line Valve
Gross Valve (available only on MS-40
with External Rough Pump Option Kit,
P/N 0137-805-00)
Screw, Pan Head, M3 x .5, 45mm 1g
Replacement O-Ring, Gross Valve Body
Replacement O-Ring, Gross Valve Manifold
Replacement O-Ring, Gross Valve Manifold
Gross Restrictor Plate (with ext. rough)
Blank Plate (no ext. rough)
Screw, Pan Head, M3 x .5, 8mm lg
O-Ring, Gross Restrictor Plate
O-Ring, Gross Restrictor Plate
Sniff Valve
Replacement O-Ring, Sniff Valve Body
Replacement O-Ring, Sniff Valve Body
Replacement O-Ring, Sniff Valve Body
5-8