Calibration Requirements - Veeco MS40 Operation And Maintenance Manual

4.8
Calibration is required when components associated with a measurement
function are serviced, repaired or replaced.
The items that need to be calibrated and reset after service, repair or
replacement are:
Test Port Pirani Calibration
Vacuum Instrument Corp.
2099 Ninth Avenue
Ronkonkoma, NY 11779
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1109-186-00 Rev. C
14. Reconnect the electrical connector to the source and collector on the mass
spectrometer.
15. Reconnect the electrical connector to the turbo-molecular pump.

Calibration Requirements

• Test port and fore-line Pirani gauges
• Hi-Vac gauge
• Temperature sensor
NOTE
Calibration is required whenever a gauge is replaced.
1. Ensure that a blank plug is attached to the test port and that all
valves except the fore-line valve are closed. Verify that the MS-40
is in the Standard mode.
2. Open the rear panel. To open the rear panel, turn the captive screw
at the top of the panel 1/4 turn counterclockwise and gently lower
the door.
3. Using either of the SELECT arrow keys on the left side of the
User Panel, select the Test Port Pressure function. The function
has been selected when the green indicator light to its left is lit.
4. Set the unit to manually range down to 10
that the unit is in direct mode) by pressing the auto/manual
momentary switch so that the manual ranging mode is initiated and
then pressing the "down arrow" key so that the "10 range" is
selected as the eventual "pump down" goal.
5. Press the START pushbutton to start the test cycle. Allow the unit
to pump down so that it reaches Crossover 2. The fine valve will
be open (the green indicator next to FINE VALVE on the User
Panel will be lit).
-10
range (to ensure
4-19