Veeco MS40 Operation And Maintenance Manual page 83

O-rings are susceptible to absorbing large quantities of the solvents used in
cleaning. Subsequent evaporation of these solvents when the system is later
evacuated (during testing) must be avoided, therefore O-rings and gaskets
should be removed from flange grooves and treated as a separate cleaning
problem. O-rings and gaskets are either replaced at the time of re-assembly
(recommended), or carefully wiped clean with a lint-free material and
inspected for surface damage of any kind before they are used again. If a new
O-ring is used, it should be wiped clean, inspected and lubricated with a light
film of vacuum grease, essentially the same procedure as would take place
when reusing an old O-ring. Use vacuum grease as sparingly as possible since
it later may become a source of system contamination.
Cleaning the Mass Spectrometer
Refer to Figure 4-2 for an exploded view of the mass spectrometer.
Vacuum Instrument Corp.
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Ronkonkoma, NY 11779
631.737.0900
1109-186-00 Rev. C
NOTE:
Never remove O-rings with a metal tool, as this could
scratch the O-ring groove, and cause a leak. Use a plastic
or wooden (or any soft material) tool to remove the O-ring
by inserting the tool between the inside of the O-ring and
its groove and then sliding the tool around the inside of the
O-ring. This will cause the O-ring to pop up. An O-
ring may have to be held on its opposite side to prevent its
turning in the groove. This procedure usually gives much
better results than trying to pry the O-ring from its groove.
1. Refer to Section 4.9 for an explanation of how to remove the
source from the MS-40.
2 Disassemble the two half sections of the spectrometer housing
and remove the center slit plate and O-ring.
3. Clean the two sections. The interior of both sections should be
lightly sanded or bead blasted to remove all stains. Blow out the
bead blast residue with dry, oil-free air. The sections should
then be cleaned ultrasonically in freon and dried with a hot air
gun. Make sure to handle the sections when wearing lint free
gloves. Reassemble the two sections and install a new O-ring.
4-14