Veeco MS40 Operation And Maintenance Manual page 12

Ranging:
[Automatic/Standard
Mode]
Ranging:
[Manual Mode]
Measurement Units:
PUMPS
Mechanical Pump:
Turbo Pump:
External Pump:
PERFORMANCE SPECIFICATIONS
Sensitivity:
Resolution:
Response Time:
Vacuum Instrument Corp. Vacuum Instrument Corp.
Test Time:
2099 Ninth Avenue 2099 Ninth Avenue
Ronkonkoma, NY 11779 Ronkonkoma, NY 11779
631.737.0900 631.737.0900
1109-186-00 Rev. C
Without an external roughing pump, begins at the
least sensitive gross range (10
downward until a leak is detected or until it reaches
its most sensitive range (10
external pump, if a gross leak is detected, the unit
ranges up to the appropriate decade. If a gross leak
is not detected the unit ranges downward until a leak
is detected or until it reaches its most sensitive
range.
May operate at any range, selectable by the operator.
0 -3
The 10 to 10 range is only available when the
optional external pump has been installed.
Pressure: millitorr or millibar (selectable with a
switch located underneath the Service Panel accessible
when the unit's front panel has been opened)
Leak Rate: std cc/sec (standard cubic centimeters/
second) or mbar l/sec (millibar liters/second)
Internal 1.5 CFM dual stage rotary vane pump
60 liter/second turbo-molecular pump
Optional 7 or 16 CFM dual stage rotary vane
(Mechanical pump)
-11
4 x 10 Std cc/sec air equivalent (direct mode)
-10
4 x 10 Std cc/sec air equivalent (reverse mode)
14 at Mass 4
Reverse Mode < 3 seconds
Fine Mode < 2 seconds
<2.5 seconds on a blank port to a pre-selected range
in the reverse flow test mode
1-9
-4
). The unit ranges
-10
). With the optional